Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications.

Gikunda, Millicent N; Harerimana, Ferdinand; Mangum, James M; Rahman, Sumaya; Thompson, Joshua P; Harris, Charles Thomas; Churchill, Hugh O H; Thibado, Paul M

Gikunda, Millicent N; Harerimana, Ferdinand; Mangum, James M; Rahman, Sumaya; Thompson, Joshua P; Harris, Charles Thomas; Churchill, Hugh O H; Thibado, Paul M.

Afiliación

Gikunda MN; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Harerimana F; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Mangum JM; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Rahman S; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Thompson JP; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Harris CT; Sandia National Laboratories, Albuquerque, NM 87123, USA.
Churchill HOH; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Thibado PM; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.

Membranes (Basel) ; 12(5)2022 May 19.

Article en En | MEDLINE | ID: mdl-35629859

Palabras clave

atomic force microscopy; critical point drying; graphene; graphene transfer; integrated circuit; photolithography; variable capacitor; wet etching

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Membranes (Basel) Año: 2022 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Suiza

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