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Self-Rolled-Up Aluminum Nitride-Based 3D Architectures Enabled by Record-High Differential Stress.
Khandelwal, Apratim; Ren, Zhongjie; Namiki, Shunya; Yang, Zhendong; Choudhary, Nitin; Li, Chao; Wang, Ping; Mi, Zetian; Li, Xiuling.
Afiliación
  • Khandelwal A; Department of Electrical and Computer Engineering, Holonyak Micro and Nanotechnology Laboratory, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.
  • Ren Z; Department of Electrical and Computer Engineering, Microelectronics Research Center, The University of Texas at Austin, Austin, Texas 78758, United States.
  • Namiki S; Department of Electrical and Computer Engineering, Holonyak Micro and Nanotechnology Laboratory, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.
  • Yang Z; Department of Electrical and Computer Engineering, Microelectronics Research Center, The University of Texas at Austin, Austin, Texas 78758, United States.
  • Choudhary N; Plasma-Therm LLC, 1051 North Fiesta Blvd., Suite 3, Gilbert, Maricopa, Arizona 85233, United States.
  • Li C; Plasma-Therm LLC, 1051 North Fiesta Blvd., Suite 3, Gilbert, Maricopa, Arizona 85233, United States.
  • Wang P; Department of Electrical Engineering and Computer Science (EECS), University of Michigan, Ann Arbor, Michigan 48109, United States.
  • Mi Z; Department of Electrical Engineering and Computer Science (EECS), University of Michigan, Ann Arbor, Michigan 48109, United States.
  • Li X; Department of Electrical and Computer Engineering, Microelectronics Research Center, The University of Texas at Austin, Austin, Texas 78758, United States.
ACS Appl Mater Interfaces ; 14(25): 29014-29024, 2022 Jun 29.
Article en En | MEDLINE | ID: mdl-35700345
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2022 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos
Texto completo
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2022 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos