Utilizing the Intrinsic Mode of Weakly Coupled Resonators for Temperature Compensation.

Wang, Kunfeng; Xiong, Xingyin; Wang, Zheng; Cai, Pengcheng; Ma, Liangbo; Zou, Xudong

Wang, Kunfeng; Xiong, Xingyin; Wang, Zheng; Cai, Pengcheng; Ma, Liangbo; Zou, Xudong.

Afiliación

Wang K; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Xiong X; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Wang Z; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Cai P; QiLu Aerospace Information Research Institute, Jinan 250101, China.
Ma L; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Zou X; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

Micromachines (Basel) ; 13(9)2022 Sep 01.

Article en En | MEDLINE | ID: mdl-36144070

Palabras clave

MEMS; accelerometer; mode localization; temperature compensation

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Micromachines (Basel) Año: 2022 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza

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