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Deposition Mechanism and Properties of Plasma-Enhanced Atomic Layer Deposited Gallium Nitride Films with Different Substrate Temperatures.
Ren, Fang-Bin; Jiang, Shi-Cong; Hsu, Chia-Hsun; Zhang, Xiao-Ying; Gao, Peng; Wu, Wan-Yu; Chiu, Yi-Jui; Lien, Shui-Yang; Zhu, Wen-Zhang.
Afiliación
  • Ren FB; Xiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Jiang SC; Xiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Hsu CH; Xiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Zhang XY; Xiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Gao P; Fujian Provincial Key Laboratory of Nanomaterials, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, Fuzhou 350002, China.
  • Wu WY; Department of Materials Science and Engineering, National United University, Miaoli 36063, Taiwan.
  • Chiu YJ; School of Mechanical and Automotive Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Lien SY; Xiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
  • Zhu WZ; Department of Materials Science and Engineering, Da-Yeh University, Changhua 51591, Taiwan.
Molecules ; 27(23)2022 Nov 22.
Article en En | MEDLINE | ID: mdl-36500217
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Plasma / Semiconductores Idioma: En Revista: Molecules Asunto de la revista: BIOLOGIA Año: 2022 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza
Texto completo
Añadir a Mi BVS
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XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Plasma / Semiconductores Idioma: En Revista: Molecules Asunto de la revista: BIOLOGIA Año: 2022 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza