Ion-beam assisted sputtering of titanium nitride thin films.

Draher, Timothy; Polakovic, Tomas; Li, Juliang; Li, Yi; Welp, Ulrich; Jiang, Jidong Samuel; Pearson, John; Armstrong, Whitney; Meziani, Zein-Eddine; Chang, Clarence; Kwok, Wai-Kwong; Xiao, Zhili; Novosad, Valentine

Draher, Timothy; Polakovic, Tomas; Li, Juliang; Li, Yi; Welp, Ulrich; Jiang, Jidong Samuel; Pearson, John; Armstrong, Whitney; Meziani, Zein-Eddine; Chang, Clarence; Kwok, Wai-Kwong; Xiao, Zhili; Novosad, Valentine.

Afiliación

Draher T; Materials Science Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Polakovic T; Department of Physics, Northern Illinois University, Dekalb, IL, 60115, USA.
Li J; Physics Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Li Y; High Energy Physics Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Welp U; Materials Science Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Jiang JS; Materials Science Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Pearson J; Materials Science Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Armstrong W; Materials Science Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Meziani ZE; Physics Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Chang C; Physics Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Kwok WK; High Energy Physics Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Xiao Z; Materials Science Division, Argonne National Laboratory, Lemont, IL, 60439, USA.
Novosad V; Materials Science Division, Argonne National Laboratory, Lemont, IL, 60439, USA.

Sci Rep ; 13(1): 6315, 2023 Apr 18.

Article en En | MEDLINE | ID: mdl-37072413

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Sci Rep Año: 2023 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Reino Unido

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