Measurement and Simulation of Ultra-Low-Energy Ion-Solid Interaction Dynamics.

Titze, Michael; Poplawsky, Jonathan D; Kretschmer, Silvan; Krasheninnikov, Arkady V; Doyle, Barney L; Bielejec, Edward S; Hobler, Gerhard; Belianinov, Alex

Titze, Michael; Poplawsky, Jonathan D; Kretschmer, Silvan; Krasheninnikov, Arkady V; Doyle, Barney L; Bielejec, Edward S; Hobler, Gerhard; Belianinov, Alex.

Afiliación

Titze M; Ion Beam Laboratory, Sandia National Laboratories, Albuquerque, NM 87185, USA.
Poplawsky JD; Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA.
Kretschmer S; Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany.
Krasheninnikov AV; Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany.
Doyle BL; Ion Beam Laboratory, Sandia National Laboratories, Albuquerque, NM 87185, USA.
Bielejec ES; Ion Beam Laboratory, Sandia National Laboratories, Albuquerque, NM 87185, USA.
Hobler G; Institute of Solid-State Electronics, TU Wien, Gußhausstraße 25-25a, A-1040 Wien, Austria.
Belianinov A; Ion Beam Laboratory, Sandia National Laboratories, Albuquerque, NM 87185, USA.

Micromachines (Basel) ; 14(10)2023 Sep 30.

Article en En | MEDLINE | ID: mdl-37893321

Palabras clave

focused ion beam; ion implantation; ultra-low energy

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Estados Unidos

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google