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CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer.
Yang, Zihao; Wei, Xiucheng; Roy, Pinku; Zhang, Di; Lu, Ping; Dhole, Samyak; Wang, Haiyan; Cucciniello, Nicholas; Patibandla, Nag; Chen, Zhebo; Zeng, Hao; Jia, Quanxi; Zhu, Mingwei.
Afiliación
  • Yang Z; Applied Materials Inc., Santa Clara, CA 95054, USA.
  • Wei X; Department of Physics, University at Buffalo-The State University of New York, Buffalo, NY 14260, USA.
  • Roy P; Department of Materials Design and Innovation, University at Buffalo-The State University of New York, Buffalo, NY 14260, USA.
  • Zhang D; School of Materials Engineering, Purdue University, West Lafayette, IN 47907, USA.
  • Lu P; Sandia National Laboratories, Albuquerque, NM 87185, USA.
  • Dhole S; Department of Materials Design and Innovation, University at Buffalo-The State University of New York, Buffalo, NY 14260, USA.
  • Wang H; School of Materials Engineering, Purdue University, West Lafayette, IN 47907, USA.
  • Cucciniello N; Department of Materials Design and Innovation, University at Buffalo-The State University of New York, Buffalo, NY 14260, USA.
  • Patibandla N; Applied Materials Inc., Santa Clara, CA 95054, USA.
  • Chen Z; Applied Materials Inc., Santa Clara, CA 95054, USA.
  • Zeng H; Department of Physics, University at Buffalo-The State University of New York, Buffalo, NY 14260, USA.
  • Jia Q; Department of Materials Design and Innovation, University at Buffalo-The State University of New York, Buffalo, NY 14260, USA.
  • Zhu M; Applied Materials Inc., Santa Clara, CA 95054, USA.
Materials (Basel) ; 16(23)2023 Nov 30.
Article en En | MEDLINE | ID: mdl-38068212
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Materials (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Suiza
Texto completo
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Materials (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Suiza