Precise Focal Spot Positioning on an Opaque Substrate Based on the Diffraction Phenomenon in Laser Microfabrication.

ABSTRACT

The precise positioning of the laser focal spot on the substrate is an important issue for laser microfabrication. In this work, a diffraction pattern-based focal spot positioning method (DFSPM) is proposed to achieve the precise positioning of the laser focal spot on opaque substrates. A series of diffraction patterns of laser focus under-positioning, exact positioning and over-positioning were obtained to investigate the cross-section light distribution of the laser focal spot. According to the monotonic tendency of FWHM to exhibit light intensity at the focal spot cross-section away from the focal plane, the FWHM threshold of polynomial fitted curves was used to determine the exact positioning of laser focus. The ascending scanning method was used to obtain the diffraction patterns at various vertical positions and the FWHM threshold of light distribution at the exact position. The polynomial fitted curves verify the FWHM monotonic tendency of light intensity distribution at the focal spot cross-section along the optical axis. Precise positioning can be achieved with a 100 nm adjustment resolution. This work was expected to provide references for laser microfabrication on opaque materials.