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Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.
Pezone, Roberto; Anzinger, Sebastian; Baglioni, Gabriele; Wasisto, Hutomo Suryo; Sarro, Pasqualina M; Steeneken, Peter G; Vollebregt, Sten.
Afiliación
  • Pezone R; Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands.
  • Anzinger S; Infineon Technologies AG, Am Campeon 1-15, Neubiberg, 85579 Germany.
  • Baglioni G; Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands.
  • Wasisto HS; Infineon Technologies AG, Am Campeon 1-15, Neubiberg, 85579 Germany.
  • Sarro PM; Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands.
  • Steeneken PG; Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands.
  • Vollebregt S; Department of Precision and Microsystems Engineering (PME), Delft University of Technology, Delft, The Netherlands.
Microsyst Nanoeng ; 10: 27, 2024.
Article en En | MEDLINE | ID: mdl-38384678
ABSTRACT
Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene's suitability as a microphone diaphragm. The potential for achieving smaller, more sensitive, and scalable on-chip MEMS microphones is yet to be determined. To address large graphene sizes, graphene-polymer heterostructures have been proposed, but they compromise performance due to added polymer mass and stiffness. This work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2R = 220-320 µm, thickness of 7 nm multi-layer graphene, that is suspended over a back-plate with a residual gap of 5 µm. The microphones are manufactured with MEMS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the graphene. Different designs, all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive read-out. The devices show high mechanical compliances Cm = 0.081-1.07 µmPa-1 (10-100 × higher than the silicon reported in the state-of-the-art diaphragms) and pull-in voltages in the range of 2-9.5 V. In addition, to validate the proof of concept, we have electrically characterized the graphene microphone when subjected to sound actuation. An estimated sensitivity of S1kHz = 24.3-321 mV Pa-1 for a Vbias = 1.5 V was determined, which is 1.9-25.5 × higher than of state-of-the-art microphone devices while having a ~9 × smaller area.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsyst Nanoeng Año: 2024 Tipo del documento: Article País de afiliación: Países Bajos

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsyst Nanoeng Año: 2024 Tipo del documento: Article País de afiliación: Países Bajos