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Application of x-ray energy dispersive spectroscopy to analyzing the thickness of diamond-like carbon film deposited on the surface of microparticles.
Zhao, Junping; An, Zhengjie; Ai, Zhijun; Wu, Zhicheng; Zhang, Qiaogen.
Afiliación
  • Zhao J; State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an 710049, China.
  • An Z; High Voltage Division, School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Ai Z; State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an 710049, China.
  • Wu Z; High Voltage Division, School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhang Q; State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an 710049, China.
Rev Sci Instrum ; 95(9)2024 Sep 01.
Article en En | MEDLINE | ID: mdl-39283181
ABSTRACT
Depositing diamond-like carbon (DLC) film is considered to be more promising for surface modification of microparticles. The development of reliable and precise measurement techniques for DLC coatings on microparticles is crucial for advancing research in this field. This paper introduces a methodological approach for quantifying the thickness of the film on microparticles. The thickness of the film is obtained by establishing the quantitative relationship between the energy lost when electrons pass through the film and the thickness of the film. The proposed method allows for the estimation of film thickness by assessing solely the elemental abundance on the particle surfaces.

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2024 Tipo del documento: Article País de afiliación: China Pais de publicación: Estados Unidos

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2024 Tipo del documento: Article País de afiliación: China Pais de publicación: Estados Unidos