Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation. | Micromachines (Basel);13(2)2022 Jan 29. | MEDLINE

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Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation.

Guo, Ping; Meng, Hongling; Dan, Lin; Zhao, Jianye.

Affiliation

Guo P; Department of Electronics, Peking University, Beijing 100871, China.
Meng H; Zhongkeqidi Optoelectronic Technology (Guangzhou) Co., Ltd., Guangzhou 510700, China.
Dan L; Department of Electronics, Peking University, Beijing 100871, China.
Zhao J; Department of Electronics, Peking University, Beijing 100871, China.

Micromachines (Basel) ; 13(2)2022 Jan 29.

Article in En | MEDLINE | ID: mdl-35208340

Key words

CSAC; MEMS vapor cells; anodic bonding; physics package

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2022 Document type: Article Affiliation country: Country of publication:

Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2022 Document type: Article Affiliation country: Country of publication: