Hard, Flexible, and Transparent Nanolayered SiN x/BN Periodical Coatings.

ABSTRACT

In this study, SiN x/BN periodical nanolayered coatings (PNCs) are developed. PNCs were deposited at the room temperature on plastic and glass substrates. They demonstrate the excellent mechanical durability of inorganic materials and optical transparency and flexibility of organic ones. The 150 nm thick PNC shows optical transparency, sapphire-like hardness, high wear protection, and flexibility. Such a coating with a superior combination of optical and mechanical properties has not been reported previously.