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Nanofabrication of High-Resolution Periodic Structures with a Gap Size Below 100 nm by Two-Photon Polymerization.
Zheng, Lei; Kurselis, Kestutis; El-Tamer, Ayman; Hinze, Ulf; Reinhardt, Carsten; Overmeyer, Ludger; Chichkov, Boris.
Affiliation
  • Zheng L; Laboratory of Nano and Quantum Engineering, Leibniz Universität Hannover, Schneiderberg 39, Hannover, 30167, Germany. lei.zheng@lnqe.uni-hannover.de.
  • Kurselis K; Laser Zentrum Hannover e.V., Hollerithallee 8, Hannover, 30419, Germany. lei.zheng@lnqe.uni-hannover.de.
  • El-Tamer A; Laboratory of Nano and Quantum Engineering, Leibniz Universität Hannover, Schneiderberg 39, Hannover, 30167, Germany.
  • Hinze U; Institute of Quantum Optics, Leibniz Universität Hannover, Welfengarten 1, Hannover, 30167, Germany.
  • Reinhardt C; Laser Zentrum Hannover e.V., Hollerithallee 8, Hannover, 30419, Germany.
  • Overmeyer L; Institute of Quantum Optics, Leibniz Universität Hannover, Welfengarten 1, Hannover, 30167, Germany.
  • Chichkov B; Laser Zentrum Hannover e.V., Hollerithallee 8, Hannover, 30419, Germany.
Nanoscale Res Lett ; 14(1): 134, 2019 Apr 17.
Article de En | MEDLINE | ID: mdl-30997578
ABSTRACT
In this paper, approaches for the realization of high-resolution periodic structures with gap sizes at sub-100 nm scale by two-photon polymerization (2PP) are presented. The impact of laser intensity on the feature sizes and surface quality is investigated. The influence of different photosensitive materials on the structure formation is compared. Based on the elliptical geometry character of the voxel, the authors present an idea to realize high-resolution structures with feature sizes less than 100 nm by controlling the laser focus position with respect to the glass substrate. This investigation covers structures fabricated respectively in the plane along and perpendicular to the major axis of voxel. The authors also provide a useful approach to manage the fabrication of proposed periodic structure with a periodic distance of 200 nm and a gap size of 65 nm.
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Texte intégral: 1 Collection: 01-internacional Base de données: MEDLINE Langue: En Journal: Nanoscale Res Lett Année: 2019 Type de document: Article Pays d'affiliation: Allemagne

Texte intégral: 1 Collection: 01-internacional Base de données: MEDLINE Langue: En Journal: Nanoscale Res Lett Année: 2019 Type de document: Article Pays d'affiliation: Allemagne