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A Study on the Sub-5 nm Nano-Step Height Reference Materials Fabricated by Atomic Layer Deposition Combined with Wet Etching.
Wang, Chenying; Li, Lei; Jing, Weixuan; Zhang, Yaxin; Wang, Song; Lin, Qijing; Xian, Dan; Mao, Qi; Zhang, Yijun; Duan, Duanzhi; Liu, Ming; Jiang, Zhuangde.
Affiliation
  • Wang C; Collaborative Innovation Center of High-End Manufacturing, Xi'an Jiaotong University, Xi'an 710049, China.
  • Li L; International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Jing W; Collaborative Innovation Center of High-End Manufacturing, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhang Y; International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Wang S; International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Lin Q; International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Xian D; State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin 150001, China.
  • Mao Q; Collaborative Innovation Center of High-End Manufacturing, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhang Y; International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Duan D; Collaborative Innovation Center of High-End Manufacturing, Xi'an Jiaotong University, Xi'an 710049, China.
  • Liu M; International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Jiang Z; International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Micromachines (Basel) ; 13(9)2022 Sep 02.
Article de En | MEDLINE | ID: mdl-36144077
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Texte intégral: 1 Collection: 01-internacional Base de données: MEDLINE Langue: En Journal: Micromachines (Basel) Année: 2022 Type de document: Article Pays d'affiliation: Chine
Texte intégral
Ajouter à My VHL
Imprimer
XML
PubMed Links
Recherche sur Google

Texte intégral: 1 Collection: 01-internacional Base de données: MEDLINE Langue: En Journal: Micromachines (Basel) Année: 2022 Type de document: Article Pays d'affiliation: Chine