Nucleation of Co and Ru Precursors on Silicon with Different Surface Terminations: Impact on Nucleation Delay.

Liu, Ji; Mullins, Rita; Lu, Hongliang; Zhang, David Wei; Nolan, Michael

Liu, Ji; Mullins, Rita; Lu, Hongliang; Zhang, David Wei; Nolan, Michael.

Affiliation

Liu J; Tyndall National Institute, University College Cork, Lee Maltings, Dyke Parade, Cork T12 R5CP, Ireland.
Mullins R; Tyndall National Institute, University College Cork, Lee Maltings, Dyke Parade, Cork T12 R5CP, Ireland.
Lu H; State Key Laboratory of ASIC and System, School of Microelectronics, Shanghai Institute of Intelligent Electronics & Systems, Fudan University, Shanghai 200433, China.
Zhang DW; State Key Laboratory of ASIC and System, School of Microelectronics, Shanghai Institute of Intelligent Electronics & Systems, Fudan University, Shanghai 200433, China.
Nolan M; Tyndall National Institute, University College Cork, Lee Maltings, Dyke Parade, Cork T12 R5CP, Ireland.

J Phys Chem C Nanomater Interfaces ; 127(28): 13651-13658, 2023 Jul 20.

Article de En | MEDLINE | ID: mdl-37492191

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Texte intégral: 1 Collection: 01-internacional Base de données: MEDLINE Langue: En Journal: J Phys Chem C Nanomater Interfaces Année: 2023 Type de document: Article Pays d'affiliation: Irlande

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