New Heteroleptic Germanium Precursors for GeO<sub>2</sub> Thin Films by Atomic Layer Deposition.

Choi, Heenang; Park, Chanwoo; Lee, Sung Kwang; Ryu, Ji Yeon; Son, Seung Uk; Eom, Taeyong; Chung, Taek-Mo

New Heteroleptic Germanium Precursors for GeO₂ Thin Films by Atomic Layer Deposition.

Choi, Heenang; Park, Chanwoo; Lee, Sung Kwang; Ryu, Ji Yeon; Son, Seung Uk; Eom, Taeyong; Chung, Taek-Mo.

Affiliation

Choi H; Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea.
Park C; Department of Chemistry, Sungkyunkwan University (SKKU), 2066 Seobu-ro, Jangan-gu, Suwon-si, Gyeonggi-do 16419, Republic of Korea.
Lee SK; Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea.
Ryu JY; Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea.
Son SU; Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea.
Eom T; Department of Chemistry, Sungkyunkwan University (SKKU), 2066 Seobu-ro, Jangan-gu, Suwon-si, Gyeonggi-do 16419, Republic of Korea.
Chung TM; Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea.

ACS Omega ; 8(46): 43759-43770, 2023 Nov 21.

Article de En | MEDLINE | ID: mdl-38027341

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Texte intégral: 1 Collection: 01-internacional Base de données: MEDLINE Langue: En Journal: ACS Omega Année: 2023 Type de document: Article Pays de publication: États-Unis d'Amérique

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