Development of a microfurnace dedicated to in situ scanning electron microscope observation up to 1300 °C. I. Concept, fabrication, and validation.

ABSTRACT

The development of a new heating system dedicated to in situ scanning electron microscope (SEM) experimentation at high temperatures is reported. This system, called FurnaSEM, is a compact microfurnace, enabling heat treatments up to 1300 °C. The choice of materials for the microfurnace is explained. The design of the microfurnace is optimized by iterations of numerical simulations, and the thermal characteristics of the microfurnace are calculated numerically. The numerical results obtained are compared with the thermal characteristics of a manufactured microfurnace, measured on a specially developed dedicated test bench. This test bench includes a working chamber simulating a SEM chamber equipped with a thermal camera. The results obtained during various qualification tests enabled us to determine the main technical characteristics of the FurnaSEM microfurnace temperature profiles on the sample support surface, energy consumption at high temperatures, and the range of achievable thermal cycles.