Note: Near infrared interferometric silicon wafer metrology. | Rev Sci Instrum;87(4): 046106, 2016 04. | MEDLINE

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Note: Near infrared interferometric silicon wafer metrology.

Choi, M S; Park, H M; Joo, K N.

Affiliation

Choi MS; Department of Photonic Engineering, Chosun University, Gwangju 61452, South Korea.
Park HM; Department of Photonic Engineering, Chosun University, Gwangju 61452, South Korea.
Joo KN; Department of Photonic Engineering, Chosun University, Gwangju 61452, South Korea.

Rev Sci Instrum ; 87(4): 046106, 2016 04.

Article in En | MEDLINE | ID: mdl-27131722

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2016 Document type: Article Affiliation country:

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2016 Document type: Article Affiliation country: