10 nm deep, sub-nanoliter fluidic nanochannels on germanium for attenuated total reflection infrared (ATR-IR) spectroscopy.
Analyst
; 142(2): 273-278, 2017 01 16.
Article
in En
| MEDLINE
| ID: mdl-27900373
ABSTRACT
The fabrication of sub-nanoliter fluidic channels is demonstrated, with merely 10 nm depth on germanium, using conventional semiconductor device fabrication methods and a polymer assisted room-temperature sealing method. As a first application, an ultralow volume (650 pL) was studied by ATR-IR spectroscopy. A detection limit of â¼7.9 × 1010 molecules of human serum albumin (HSA) (â¼0.2 mM) in D2O was achieved with highly specific ATR-IR spectroscopy.
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Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Analyst
Year:
2017
Document type:
Article
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