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Large-Displacement Vertical Electrostatic Microactuator Dynamics using Duty-Cycled Softening/Stiffening Parametric Resonance.
Li, H; Barnes, P; Harding, E; Duan, X; Wang, T D; Oldham, K R.
Affiliation
  • Li H; University of Michigan Medical School, Ann Arbor MI.
  • Barnes P; University of Michigan Department of Mechanical Engineering, Ann Arbor, MI 48109.
  • Harding E; University of Michigan Department of Mechanical Engineering, Ann Arbor, MI 48109.
  • Duan X; University of Michigan Medical School and Department of Biomedical Engineering, Ann Arbor, MI 48109.
  • Wang TD; University of Michigan Medical School, Department of Biomedical Engineering, and Department of Mechanical Engineering, Ann Arbor, MI 48109.
  • Oldham KR; Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109.
J Microelectromech Syst ; 28(3): 351-361, 2019 Jun.
Article in En | MEDLINE | ID: mdl-32863693
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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Prognostic_studies Language: En Journal: J Microelectromech Syst Year: 2019 Document type: Article Country of publication:
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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Prognostic_studies Language: En Journal: J Microelectromech Syst Year: 2019 Document type: Article Country of publication: