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Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry.
Tanksalvala, Michael; Porter, Christina L; Esashi, Yuka; Wang, Bin; Jenkins, Nicholas W; Zhang, Zhe; Miley, Galen P; Knobloch, Joshua L; McBennett, Brendan; Horiguchi, Naoto; Yazdi, Sadegh; Zhou, Jihan; Jacobs, Matthew N; Bevis, Charles S; Karl, Robert M; Johnsen, Peter; Ren, David; Waller, Laura; Adams, Daniel E; Cousin, Seth L; Liao, Chen-Ting; Miao, Jianwei; Gerrity, Michael; Kapteyn, Henry C; Murnane, Margaret M.
Affiliation
  • Tanksalvala M; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA. michael.tanksalvala@colorado.edu yuka.esashi@colorado.edu.
  • Porter CL; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Esashi Y; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA. michael.tanksalvala@colorado.edu yuka.esashi@colorado.edu.
  • Wang B; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Jenkins NW; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Zhang Z; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Miley GP; Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA.
  • Knobloch JL; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • McBennett B; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Horiguchi N; Imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Yazdi S; Renewable and Sustainable Energy Institute (RASEI), University of Colorado, Boulder, CO 80309, USA.
  • Zhou J; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Jacobs MN; Department of Physics and Astronomy and California NanoSystem Institute, University of California, Los Angeles, CA 90095, USA.
  • Bevis CS; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Karl RM; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Johnsen P; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Ren D; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Waller L; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Adams DE; Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, USA.
  • Cousin SL; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Liao CT; Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, USA.
  • Miao J; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Gerrity M; KMLabs Inc., 4775 Walnut St. #102, Boulder, CO 80301, USA.
  • Kapteyn HC; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
  • Murnane MM; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
Sci Adv ; 7(5)2021 Jan.
Article in En | MEDLINE | ID: mdl-33571123
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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Diagnostic_studies Language: En Journal: Sci Adv Year: 2021 Document type: Article
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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Diagnostic_studies Language: En Journal: Sci Adv Year: 2021 Document type: Article