Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding.
Micromachines (Basel)
; 13(3)2022 Mar 17.
Article
in En
| MEDLINE
| ID: mdl-35334746
ABSTRACT
In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from -143 to -257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Micromachines (Basel)
Year:
2022
Document type:
Article
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