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Growth behavior of Ir metal formed by atomic layer deposition in the nanopores of anodic aluminum oxide.
Zhu, Lin; Yang, Geng-Lai; Ding, Wen-Juan; Cao, Yan-Qiang; Li, Wei-Ming; Li, Ai-Dong.
Affiliation
  • Zhu L; National Laboratory of Solid State Microstructures, Materials Science and Engineering Department, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, P. R. China. adli@nju.edu.cn.
  • Yang GL; National Laboratory of Solid State Microstructures, Materials Science and Engineering Department, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, P. R. China. adli@nju.edu.cn.
  • Ding WJ; National Laboratory of Solid State Microstructures, Materials Science and Engineering Department, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, P. R. China. adli@nju.edu.cn.
  • Cao YQ; Jiangsu Leadmicro Nano-Technology Co., Ltd, Wuxi, Jiangsu, People's Republic of China.
  • Li WM; Institute of Micro-nano Photonic & Beam Steering, School of Science, Nanjing University of Science and Technology, Nanjing 210094, P. R. China.
  • Li AD; National Laboratory of Solid State Microstructures, Materials Science and Engineering Department, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, P. R. China. adli@nju.edu.cn.
Dalton Trans ; 51(25): 9664-9672, 2022 Jun 27.
Article in En | MEDLINE | ID: mdl-35704906
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Dalton Trans Journal subject: QUIMICA Year: 2022 Document type: Article Country of publication:
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Dalton Trans Journal subject: QUIMICA Year: 2022 Document type: Article Country of publication: