A-Si/SiO2 nanolaminates for tuning the complex refractive index and band gap in optical interference coatings.
Appl Opt
; 63(6): 1641-1647, 2024 Feb 20.
Article
in En
| MEDLINE
| ID: mdl-38437380
ABSTRACT
A-S i/S i O 2 nanolaminates are deposited by magnetron sputtering and show a decreasing absorption when the a-Si single-layer thickness is reduced from 2.4n m to 0.7n m. Moreover, an increase of the Tauc band gap by 0.18e V is measured. Experimental Tauc band gaps are compared to calculated effective band gaps, utilizing a numerical Schrödinger solver. Further, it is demonstrated that the refractive index can be controlled by adjusting the a-Si and S i O 2 single-layer thicknesses in the nanolaminates. The nanolaminates are optically characterized by spectroscopic ellipsometry, transmittance, and reflectance measurements. Additionally, TEM images reveal uniform, well-separated layers, and EDX measurements show the silicon and oxygen distribution in the nanolaminates.
Full text:
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Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Appl Opt
Year:
2024
Document type:
Article