Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model.

Cardenas-Benitez, Braulio; Eschenbaum, Carsten; Mager, Dario; Korvink, Jan G; Madou, Marc J; Lemmer, Uli; Leon, Israel De; Martinez-Chapa, Sergio O

Cardenas-Benitez, Braulio; Eschenbaum, Carsten; Mager, Dario; Korvink, Jan G; Madou, Marc J; Lemmer, Uli; Leon, Israel De; Martinez-Chapa, Sergio O.

Afiliação

Cardenas-Benitez B; 1School of Engineering and Sciences, Tecnologico de Monterrey, Av. Eugenio Garza Sada 2501 Sur, 64849 Monterrey, NL Mexico.
Eschenbaum C; 2Light Technology Institute, Karlsruhe Institute of Technology (KIT), Engesserstraße 13, 76131 Karlsruhe, Germany.
Mager D; 3Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.
Korvink JG; 3Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.
Madou MJ; 3Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.
Lemmer U; 1School of Engineering and Sciences, Tecnologico de Monterrey, Av. Eugenio Garza Sada 2501 Sur, 64849 Monterrey, NL Mexico.
Leon I; 4Department of Mechanical and Aerospace Engineering, University of California, Irvine, 4200 Engineering Gateway, Irvine, CA 92697 USA.
Martinez-Chapa SO; 2Light Technology Institute, Karlsruhe Institute of Technology (KIT), Engesserstraße 13, 76131 Karlsruhe, Germany.

Microsyst Nanoeng ; 5: 38, 2019.

Article em En | MEDLINE | ID: mdl-31636928

Palavras-chave

NEMS; Nanowires

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Revista: Microsyst Nanoeng Ano de publicação: 2019 Tipo de documento: Article País de publicação: Reino Unido

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