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Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition.
Charvot, Jaroslav; Pokorný, Daniel; Zazpe, Raul; Krumpolec, Richard; Pavlinák, David; Hromádko, Ludek; Prikryl, Jan; Rodriguez-Pereira, Jhonatan; Klikar, Milan; Jelínková, Veronika; Macak, Jan M; Bures, Filip.
Afiliação
  • Charvot J; Institute of Organic Chemistry and Technology Faculty of Chemical Technology, University of Pardubice, Studentská 573, Pardubice, Czech Republic.
  • Pokorný D; Institute of Organic Chemistry and Technology Faculty of Chemical Technology, University of Pardubice, Studentská 573, Pardubice, Czech Republic.
  • Zazpe R; Center of Materials and Nanotechnologies Faculty of Chemical Technology, University of Pardubice, Nám. Cs. Legií 565, 53002, Pardubice, Czech Republic.
  • Krumpolec R; Central European Institute of Technology, Brno University of Technology, Purkynova 123, 61200, Brno, Czech Republic.
  • Pavlinák D; R & D Center for Low-Cost Plasma and Nanotechnology Surface Modifications Department of Physical Electronics, Faculty of Science, Kotlárská 267/2, 611 37, Brno, Czech Republic.
  • Hromádko L; R & D Center for Low-Cost Plasma and Nanotechnology Surface Modifications Department of Physical Electronics, Faculty of Science, Kotlárská 267/2, 611 37, Brno, Czech Republic.
  • Prikryl J; Center of Materials and Nanotechnologies Faculty of Chemical Technology, University of Pardubice, Nám. Cs. Legií 565, 53002, Pardubice, Czech Republic.
  • Rodriguez-Pereira J; Central European Institute of Technology, Brno University of Technology, Purkynova 123, 61200, Brno, Czech Republic.
  • Klikar M; Center of Materials and Nanotechnologies Faculty of Chemical Technology, University of Pardubice, Nám. Cs. Legií 565, 53002, Pardubice, Czech Republic.
  • Jelínková V; Center of Materials and Nanotechnologies Faculty of Chemical Technology, University of Pardubice, Nám. Cs. Legií 565, 53002, Pardubice, Czech Republic.
  • Macak JM; Institute of Organic Chemistry and Technology Faculty of Chemical Technology, University of Pardubice, Studentská 573, Pardubice, Czech Republic.
  • Bures F; The Institute of Technology and Business in Ceské Budejovice, Okruzní 517/10, 370 01, Ceské Budejovice, Czech Republic.
Chempluschem ; 85(3): 576-579, 2020 Mar.
Article em En | MEDLINE | ID: mdl-32202391
Three cyclic silylselenides were prepared in a straightforward manner. Property tuning has been achieved by varying the ring size and the number of embedded selenium atoms. All silylselenides possess improved resistance towards moisture and oxidation as well as high thermal robustness and sufficient volatility with almost zero residues. The six-membered diselenide proved to be particularly superior Se precursors for atomic layer deposition and allowed facile preparation of MoSe2 layers. Their structure and composition have been investigated by Raman and X-ray photoelectron spectroscopy as well as scanning electron microscopy revealing vertically aligned flaky shaped nanosheets.
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Chempluschem Ano de publicação: 2020 Tipo de documento: Article País de afiliação: República Tcheca País de publicação: Alemanha

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Chempluschem Ano de publicação: 2020 Tipo de documento: Article País de afiliação: República Tcheca País de publicação: Alemanha