Automated SEM Image Analysis of the Sphere Diameter, Sphere-Sphere Separation, and Opening Size Distributions of Nanosphere Lithography Masks.

Riedl, Thomas; Lindner, Jörg K N

Riedl, Thomas; Lindner, Jörg K N.

Afiliação

Riedl T; Department of Physics and Center for Optoelectronics and Photonics Paderborn (CeOPP), Paderborn University, Warburger Straße 100, 33098Paderborn, Germany.
Lindner JKN; Department of Physics and Center for Optoelectronics and Photonics Paderborn (CeOPP), Paderborn University, Warburger Straße 100, 33098Paderborn, Germany.

Microsc Microanal ; 28(1): 185-195, 2022 Feb.

Article em En | MEDLINE | ID: mdl-35042572

Palavras-chave

close-packed monolayers; nanosphere lithography; numerical image analysis; polystyrene colloids; scanning electron microscopy; size distribution

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Clinical_trials Idioma: En Revista: Microsc Microanal Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Alemanha País de publicação: Reino Unido

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