Scalable and robust beam shaping using apodized fish-bone grating couplers.

Efficient power coupling between on-chip guided and free-space optical modes requires precision spatial mode matching with apodized grating couplers. Yet, grating apodizations are often limited by the minimum feature size of the fabrication approach. This is especially challenging when small feature sizes are required to fabricate gratings at short wavelengths or to achieve weakly scattered light for large-area gratings. Here, we demonstrate a fish-bone grating coupler for precision beam shaping and the generation of millimeter-scale beams at 461 nm wavelength. Our design decouples the minimum feature size from the minimum achievable optical scattering strength, allowing smooth turn-on and continuous control of the emission. Our approach is compatible with commercial foundry photolithography and has reduced sensitivity to both the resolution and the variability of the fabrication approach compared to subwavelength meta-gratings, which often require electron beam lithography.

High Throughput Nanoimaging of Thermal Conductivity and Interfacial Thermal Conductance.

Thermal properties of materials are often determined by measuring thermalization processes; however, such measurements at the nanoscale are challenging because they require high sensitivity concurrently with high temporal and spatial resolutions. Here, we develop an optomechanical cantilever probe and customize an atomic force microscope with low detection noise ≈1 fm/Hz1/2 over a wide (>100 MHz) bandwidth that measures thermalization dynamics with ≈10 ns temporal resolution, ≈35 nm spatial resolution, and high sensitivity. This setup enables fast nanoimaging of thermal conductivity (η) and interfacial thermal conductance (G) with measurement throughputs ≈6000× faster than conventional macroscale-resolution time-domain thermoreflectance acquiring the full sample thermalization. As a proof-of-principle demonstration, 100 × 100 pixel maps of η and G of a polymer particle are obtained in 200 s with a small relative uncertainty (<10%). This work paves the way to study fast thermal dynamics in materials and devices at the nanoscale.

Fractional Optical Angular Momentum and Multi-Defect-Mediated Mode Renormalization and Orientation Control in Photonic Crystal Microring Resonators.

Whispering gallery modes (WGMs) in circularly symmetric optical microresonators exhibit integer quantized angular momentum numbers due to the boundary condition imposed by the geometry. Here, we show that incorporating a photonic crystal pattern in an integrated microring can result in WGMs with fractional optical angular momentum. By choosing the photonic crystal periodicity to open a photonic band gap with a band-edge momentum lying between that of two WGMs of the unperturbed ring, we observe hybridized WGMs with half-integer quantized angular momentum numbers (m∈Z+1/2). Moreover, we show that these modes with fractional angular momenta exhibit high optical quality factors with good cavity-waveguide coupling and an order of magnitude reduced group velocity. Additionally, by introducing multiple artificial defects, multiple modes can be localized to small volumes within the ring, while the relative orientation of the delocalized band-edge states can be well controlled. Our Letter unveils the renormalization of WGMs by the photonic crystal, demonstrating novel fractional angular momentum states and nontrivial multimode orientation control arising from continuous rotational symmetry breaking. The findings are expected to be useful for sensing and metrology, nonlinear optics, and cavity quantum electrodynamics.

Meta-grating outcouplers for optimized beam shaping in the visible.

Accurate coupling between optical modes at the interface between photonic chips and free space is required for the development of many on-chip devices. This control is critical in quantum technologies where large-diameter beams with designed mode profiles are required. Yet, these designs are often difficult to achieve at shorter wavelengths where fabrication limits the resolution of designed devices. In this work we demonstrate optimized outcoupling of free-space beams at 461 nm using a meta-grating approach that achieves a 16 dB improvement in the apodized outcoupling strength. We design and fabricate devices, demonstrating accurate reproduction of beams with widths greater than 100 µm.

Using thermo-optical nonlinearity to robustly separate absorption and radiation losses in nanophotonic resonators.

Key for optical microresonator engineering, the total intrinsic loss is easily determined by spectroscopy; however, quantitatively separating absorption and radiative losses is challenging, and there is not a general and robust method. Here, we propose and experimentally demonstrate a general all-optical characterization technique for separating the loss mechanisms with high confidence using only linear spectroscopic measurements and an optically measured resonator thermal time constant. We report the absorption, radiation, and coupling losses for ten whispering-gallery modes of three different radial orders on a Si microdisk. Although the total dissipation rates show order-of-magnitude differences, the small absorptive losses are successfully distinguished from the overwhelming radiation losses and show similar values for all the modes as expected for the bulk material absorption.

Frequency Stabilization of Nanomechanical Resonators Using Thermally Invariant Strain Engineering.

Microfabricated mechanical resonators enable precision measurement techniques from atomic force microscopy to emerging quantum applications. The resonance frequency-based physical sensing combines high precision with long-term stability. However, widely used Si3N4 resonators suffer from frequency sensitivity to temperature due to the differential thermal expansion vs the Si substrates. Here we experimentally demonstrate temperature- and residual stress-insensitive 16.51 MHz tuning fork nanobeam resonators with nonlinear clamps defining the stress and frequency by design, achieving a low fractional frequency sensitivity of (2.5 ± 0.8) × 10-6 K-1, a 72× reduction. On-chip optical readout of resonator thermomechanical fluctuations allows precision frequency measurement without any external excitation at the thermodynamically limited frequency Allan deviation of ≈7 Hz/Hz1/2 and (relative) bias stability of ≈10 Hz (≈ 0.6 × 10-6) above 1 s averaging, remarkably, on par with state-of-the-art driven devices of similar mass. Both the resonator stabilization and the passive frequency readout can benefit a wide variety of micromechanical sensors.

Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies.

We investigate the collective dynamics and nondegenerate parametric resonance (NPR) of coplanar, interdigitated arrays of microcantilevers distinguished by their cantilevers having linearly expanding lengths and thus varying natural frequencies. Within a certain excitation frequency range, the resonators begin oscillating via NPR across the entire array consisting of 200 single-crystal silicon cantilevers. Tunable coupling generated from fringing electrostatic fields provides a mechanism to vary the scope of the NPR. Our experimental results are supported by a reduced-order model that reproduces the leading features of our data including the NPR band. The potential for tailoring the coupled response of suspended mechanical structures using NPR presents new possibilities in mass, force, and energy sensing applications, energy harvesting devices, and optomechanical systems.

Nanophotonic Atomic Force Microscope Transducers Enable Chemical Composition and Thermal Conductivity Measurements at the Nanoscale.

The atomic force microscope (AFM) offers a rich observation window on the nanoscale, yet many dynamic phenomena are too fast and too weak for direct AFM detection. Integrated cavity-optomechanics is revolutionizing micromechanical sensing; however, it has not yet impacted AFM. Here, we make a groundbreaking advance by fabricating picogram-scale probes integrated with photonic resonators to realize functional AFM detection that achieve high temporal resolution (<10 ns) and picometer vertical displacement uncertainty simultaneously. The ability to capture fast events with high precision is leveraged to measure the thermal conductivity (η), for the first time, concurrently with chemical composition at the nanoscale in photothermal induced resonance experiments. The intrinsic η of metal-organic-framework individual microcrystals, not measurable by macroscale techniques, is obtained with a small measurement uncertainty (8%). The improved sensitivity (50×) increases the measurement throughput 2500-fold and enables chemical composition measurement of molecular monolayer-thin samples. Our paradigm-shifting photonic readout for small probes breaks the common trade-off between AFM measurement precision and ability to capture transient events, thus transforming the ability to observe nanoscale dynamics in materials.

Quantitative Chemical Analysis at the Nanoscale Using the Photothermal Induced Resonance Technique.

Photothermal induced resonance (PTIR), also known as AFM-IR, is a scanning probe technique that provides sample composition information with a lateral resolution down to 20 nm. Interest in PTIR stems from its ability to identify unknown samples at the nanoscale thanks, in first approximation, to the direct comparability of PTIR spectra with far-field infrared databases. The development of rapidly tuning quantum cascade lasers has increased the PTIR throughput considerably, making nanoscale hyperspectral imaging within a reasonable time frame possible. Consequently, a better understanding of PTIR signal generation and of the fine details of PTIR analysis has become of paramount importance for extending complex IR analysis methods developed in the far-field, e.g., for classification and hyperspectral imaging, to nanoscale PTIR spectra. Here we calculate PTIR spectra via thin-film optics, to identify subtle changes (band shifts, deviation from linear approximation, etc.) for common sample parameters in the case of PTIR with total internal reflection illumination. Results show signal intensity linearity and small band shifts as long as the sample is prepared correctly, with band shifts typically smaller than macroscale attenuated total reflection (ATR) spectroscopy. Finally, a generally applicable algorithm to retrieve the pure imaginary component of the refractive index (i.e., the chemically specific information) is provided to overcome the PTIR spectra nonlinearity.

Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation.

This article reports a process for batch fabrication of a fiber pigtailed optomechanical transducer platform with overhanging. The platform enables a new class of high bandwidth, high sensitivity, and highly integrated sensors that are, compact, robust, and small, with the potential potential for low cost batch fabrication inherent in Micro-Opto-Electro-Mechanical-Systems technology. This article provides a guide to the whole fabrication process and explains critical steps and process choices in detail. Possible alternative fabrication techniques and problems are discussed. The fabrication process consists of electron beam lithography, i-line stepper lithography, and back- and frontside mask aligner lithography. The goal of this article is to provide a comprehensive description of the fabrication process, presenting context and details which are highly relevant to the rational implementation and reliable repetition of the process. Moreover, this process makes use of equipment commonly found in nanofabrication facilities and research laboratories, facilitating the broad adaptation and application of the process. Therefore, while this article specifically informs users of the Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST), we anticipate that this information will be generally useful for the nano- and microfabrication research communities at large.

The Nanolithography Toolbox.

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

Design and modeling of an ultra-compact 2x2 nanomechanical plasmonic switch.

A 2x2 Mach-Zehnder optical switch design with a footprint of 0.5 µm x 2.5 µm using nanomechanical gap plasmon phase modulators [Nat. Photonics 9(4),267-273(2015)] is presented. The extremely small footprint and modest optical loss are enabled by the strong phase modulation of gap plasmons in a mechanically actuated 17 nm air gap. Frequency-domain finite-element modeling at operating wavelength 780 nm shows that the insertion loss is ≤ 8.5 dB, the extinction ratio is > 25 dB, and crosstalk for all ports is > 24 dB. A design optimization approach and its dependence on geometrical parameters are discussed.

Diffraction limited focusing and routing of gap plasmons by a metal-dielectric-metal lens.

Passive optical elements can play key roles in photonic applications such as plasmonic integrated circuits. Here we experimentally demonstrate passive gap-plasmon focusing and routing in two-dimensions. This is accomplished using a high numerical-aperture metal-dielectric-metal lens incorporated into a planar-waveguide device. Fabrication via metal sputtering, oxide deposition, electron- and focused-ion- beam lithography, and argon ion-milling is reported on in detail. Diffraction-limited focusing is optically characterized by sampling out-coupled light with a microscope. The measured focal distance and full-width-half-maximum spot size agree well with the calculated lens performance. The surface plasmon polariton propagation length is measured by sampling light from multiple out-coupler slits.

High-Resolution Imaging and Spectroscopy at High Pressure: A Novel Liquid Cell for the Transmission Electron Microscope.

We demonstrate quantitative core-loss electron energy-loss spectroscopy of iron oxide nanoparticles and imaging resolution of Ag nanoparticles in liquid down to 0.24 nm, in both transmission and scanning transmission modes, in a novel, monolithic liquid cell developed for the transmission electron microscope (TEM). At typical SiN membrane thicknesses of 50 nm the liquid-layer thickness has a maximum change of only 30 nm for the entire TEM viewing area of 200×200 µm.

Nanoscale imaging of plasmonic hot spots and dark modes with the photothermal-induced resonance technique.

The collective oscillation of conduction electrons, responsible for the localized surface plasmon resonances, enables engineering nanomaterials by tuning their optical response from the visible to terahertz as a function of nanostructure size, shape, and environment. While theoretical calculations helped tremendously in understanding plasmonic nanomaterials and optimizing their light matter interaction, only a few experimental techniques are available to study these materials with high spatial resolution. In this work, the photothermal-induced resonance (PTIR) technique is applied for the first time to image the dark plasmonic resonance of gold asymmetric split ring resonators (A-SRRs) in the mid-infrared (IR) spectral region with nanoscale resolution. Additionally, the chemically specific PTIR signal is used to map the local absorption enhancement of poly(methyl methacrylate) coated on A-SRRs, revealing hot spots with local enhancement factors up to ≈30 at 100 nm lateral resolution. We argue that PTIR nanoscale characterization will facilitate the engineering and application of plasmonic nanomaterials for mid-IR applications.

Bound-state-in-continuum guided modes in a multilayer electro-optically active photonic integrated circuit platform.

In many physical systems, the interaction with an open environment leads to energy dissipation and reduced coherence, making it challenging to control these systems effectively. In the context of wave phenomena, such lossy interactions can be specifically controlled to isolate the system, a condition known as a bound-state-in-continuum (BIC). Despite the recent advances in engineered BICs for photonic waveguiding, practical implementations are still largely polarization- and geometry-specific, and the underlying principles remain to be systematically explored. Here, we theoretically and experimentally study low loss BIC photonic waveguiding within a two-layer heterogeneous electro-optically active integrated photonic platform. We show that coupling to the slab wave continuum can be selectively suppressed for guided modes with different polarizations and spatial structure. We demonstrate a low-loss same-polarization quasi-BIC guided mode enabling a high extinction Mach-Zehnder electro-optic amplitude modulator within a single Si3N4 ridge waveguide integrated with an extended LiNbO3 slab layer. By elucidating the broad BIC waveguiding principles and demonstrating them in an industry-relevant photonic configuration, this work may inspire innovative approaches to photonic applications such as switching and filtering. The broader impact of this work extends beyond photonics, influencing research in other wave dynamics disciplines, including microwave and acoustics.

Nanoscale infrared spectroscopy: improving the spectral range of the photothermal induced resonance technique.

Photothermal induced resonance (PTIR) is a new technique which combines the chemical specificity of infrared (IR) spectroscopy with the lateral resolution of atomic force microscopy (AFM). PTIR requires a pulsed tunable laser for sample excitation and an AFM tip to measure the sample expansion induced by light absorption. The limited tunability of commonly available laser sources constrains the application of the PTIR technique to a portion of the IR spectrum. In this work, a broadly tunable pulsed laser relying on a difference frequency generation scheme in a GaSe crystal to emit light tunable from 1.55 µm to 16 µm (from 6450 cm(-1) to 625 cm(-1)) was interfaced with a commercial PTIR instrument. The result is a materials characterization platform capable of chemical imaging, in registry with atomic force images, with a spatial resolution that notably surpasses the light diffraction limit throughout the entire mid-IR spectral range. PTIR nanoscale spectra and images allow the identification of compositionally and optically similar yet distinct materials; organic, inorganic, and composite samples can be studied with this nanoscale analog of infrared spectroscopy, suggesting broad applicability. Additionally, we compare the results obtained with the two tunable lasers, which have different pulse lengths, to experimentally assess the recently developed theory of PTIR signal generation.

Electromagnetically induced transparency and wideband wavelength conversion in silicon nitride microdisk optomechanical resonators.

We demonstrate optomechanically mediated electromagnetically induced transparency and wavelength conversion in silicon nitride (Si3N4) microdisk resonators. Fabricated devices support whispering gallery optical modes with a quality factor (Q) of 10(6), and radial breathing mechanical modes with a Q=10(4) and a resonance frequency of 625 MHz, so that the system is in the resolved sideband regime. Placing a strong optical control field on the red (blue) detuned sideband of the optical mode produces coherent interference with a resonant probe beam, inducing a transparency (absorption) window for the probe. This is observed for multiple optical modes of the device, all of which couple to the same mechanical mode, and which can be widely separated in wavelength due to the large band gap of Si3N4. These properties are exploited to demonstrate frequency up-conversion and down-conversion of optical signals between the 1300 and 980 nm bands with a frequency span of 69.4 THz.

Surface-Normal Free-Space Beam Projection via Slow-Light Standing-Wave Resonance Photonic Gratings.

On-chip grating couplers directly connect photonic circuits to free-space light. The commonly used photonic gratings have been specialized for small areas, specific intensity profiles, and nonvertical beam projection. This falls short of the precise and flexible wavefront control over large beam areas needed to empower emerging integrated miniaturized optical systems that leverage volumetric light-matter interactions, including trapping, cooling, and interrogation of atoms, bio- and chemi- sensing, and complex free-space interconnect. The large coupler size challenges general inverse design techniques, and solutions obtained by them are often difficult to physically understand and generalize. Here, by posing the problem to a carefully constrained computational inverse-design algorithm capable of large area structures, we discover a qualitatively new class of grating couplers. The numerically found solutions can be understood as coupling an incident photonic slab mode to a spatially extended slow-light (near-zero refractive index) region, backed by a reflector. The structure forms a spectrally broad standing wave resonance at the target wavelength, radiating vertically into free space. A reflectionless adiabatic transition critically couples the incident photonic mode to the resonance, and the numerically optimized lower cladding provides 70% overall theoretical conversion efficiency. We have experimentally validated an efficient surface normal collimated emission of ≈90 µm full width at half-maximum Gaussian at the thermally tunable operating wavelength of ≈780 nm. The variable-mesh-deformation inverse design approach scales to extra large photonic devices, while directly implementing the fabrication constraints. The deliberate choice of smooth parametrization resulted in a novel type of solution, which is both efficient and physically comprehensible.

Highly-twisted states of light from a high quality factor photonic crystal ring.

Twisted light with orbital angular momentum (OAM) has been extensively studied for applications in quantum and classical communications, microscopy, and optical micromanipulation. Ejecting high angular momentum states of a whispering gallery mode (WGM) microresonator through a grating-assisted mechanism provides a scalable, chip-integrated solution for OAM generation. However, demonstrated OAM microresonators have exhibited a much lower quality factor (Q) than conventional WGM resonators (by >100×), and an understanding of the limits on Q has been lacking. This is crucial given the importance of Q in enhancing light-matter interactions. Moreover, though high-OAM states are often desirable, the limits on what is achievable in a microresonator are not well understood. Here, we provide insight on these two questions, through understanding OAM from the perspective of mode coupling in a photonic crystal ring and linking it to coherent backscattering between counter-propagating WGMs. In addition to demonstrating high-Q (105 to 106), a high estimated upper bound on OAM ejection efficiency (up to 90%), and high-OAM number (up to l = 60), our empirical model is supported by experiments and provides a quantitative explanation for the behavior of Q and the upper bound of OAM ejection efficiency with l. The state-of-the-art performance and understanding of microresonator OAM generation opens opportunities for OAM applications using chip-integrated technologies.