Monolithic coherent LABS lidar based on an integrated transceiver array.

We demonstrate a monolithic frequency-modulated continuous-wave (FMCW) lidar chip with an integrated transceiver array based on lens-assisted beam steering (LABS) technology. It enables beam emitting, steering, receiving, and coherent detecting on a single chip with simultaneous distance and velocity detection. An integrated transceiver is designed with a composite structure of a Bragg grating in the middle and a U-shaped photodetector (PD) surrounding it. For a proof-of-concept demonstration, a chip with 2 × 2 switchable transceiver array is fabricated. A monolithic coherent LABS lidar system with a scanning angle of 2.86° and a scanning speed of 5.3 µs is implemented for 5 m ranging and 0.45 m/s velocity detection.