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Large aperture off-axis Fresnel lens will play an important role in the future 10 m scale aperture transmission space telescope system. Improving diffraction efficiency and wavefront image quality is always the goal of engineering applications. A 4-level off-axis fresnel lens with Ф350 mm effective aperture was fabricated through overlay etching technique by laser direct writing system. The wavefront aberration characteristics of the off-axis Fresnel lens at 632.8â nm wavelength are analyzed and discussed in detail, and the large aperture off-axis Fresnel lenses wavefront aberration measurement scheme, including a high-precision plane reflector, measured LAOFL, CGH, interferometer and laser tracker to compensate for certain low-order aberrations caused by LAOFL imperfect imaging, is proposed. Wavefront aberration of 0.020 λ(1/50 λ) RMS was achieved. This work presented the best results to our knowledge among the same field with similar aperture in open publications and provided a strong foundation for the future 10 m scale aperture transmission space telescope system.
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The aperture of space telescopes increases with their required resolution, and the transmission optical systems with long focal length and diffractive primary lens are becoming increasingly popular. In space, the changes in the pose of the primary lens relative to the rear lens group have a significant impact on the imaging performance of the telescope system. The measurement of the pose of the primary lens in real-time and with high-precision is one of the important techniques for a space telescope. In this paper, a high-precision real-time pose measurement method for the primary lens of a space telescope in orbit based on laser ranging is proposed, and a verification system is established. The pose change of the telescope's primary lens can be easily calculated through six high-precision laser distance changes. The measurement system can be installed freely, which solves the problems of complex system structure and low measurement accuracy in traditional pose measurement techniques. Analysis and experiments show that this method can accurately obtain the pose of the primary lens in real-time. The rotation error of the measurement system is 2 × 10-5 degrees (0.072 arcsecs), and the translation error is 0.2 µm. This study will provide a scientific basis for high-quality imaging of a space telescope.
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Large aperture high diffraction efficiency off-axis Fresnel lens is one of the most important optical elements in future 10m scale aperture transmissive space telescope systems. Improving diffraction efficiency and effective aperture are long-term goals and bottlenecks for engineering applications. A 4-level off-axis fresnel lens with Ф350 mm effective aperture and 2 µm critical dimension was fabricated through overlay etching technique bylaser direct writing system. Average diffraction efficiency of 75.9% was achieved and certain distribution pattern was observed. Influence of alignment errors on diffraction efficiency distribution was analysed and discussed in detail. This work presented the best results to our knowledge among the same field with similar aperture and critical dimension in open publications, and layed a solid foundation for future large aperture diffractive telescope development.
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In the process of plasma figure correction for a quartz sub-mirror, the plasma parallel removal process and ink masking layer are combined for the first time. A universal plasma figure correction method based on multiple distributed material removal functions is demonstrated, and its technological characteristics are analyzed. Through this method, the processing time is independent of the workpiece aperture, which saves time for the material removal function to scan along the trajectory. After seven iterations, the form error of the quartz element is converged from the initial figure error of ~114 nm RMS to a figure error of ~28 nm RMS, which shows the practical potential of the plasma figure correction method based on multiple distributed material removal functions in optical element manufacturing and the possibility of becoming a new stage process in the optical manufacturing chain.
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Reactive ion etching (RIE) is a promising material removal method for processing membrane diffractive optical elements and fabrication of meter-scale aperture optical substrates because of its high-efficiency parallel processing and low surface damage. However, the non-uniformity of the etching rate in the existing RIE technology will obviously reduce the machining accuracy of diffractive elements, deteriorate the diffraction efficiency and weaken the surface convergence rate of optical substrates. In the etching process of the polyimide (PI) membrane, additional electrodes were introduced for the first time to achieve the modulation of the plasma sheath properties on the same spatial surface, thus changing the etch rate distribution. Using the additional electrode, a periodic profile structure similar to the additional electrode was successfully processed on the surface of a 200-mm diameter PI membrane substrate by a single etching iteration. By combining etching experiments with plasma discharge simulations, it is demonstrated that additional electrodes can affect the material removal distribution, and the reasons for this are analyzed and discussed. This work demonstrates the feasibility of etching rate distribution modulation based on additional electrodes, and lays a foundation for realizing tailored material removal distribution and improving etching uniformity in the future.
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Sr-contained calcium hydroxyapatite (SrCaHA) cement is a potential biomaterial for in vivo bone repair and surgery fixation due to its excellent biodegradability, bioactivity, biocompatibility, easily shaping and self-hardening. We had ever reported the in vitro physiochemical properties, biocompatibility and in vivo degradability of the SrCaHA cement obtained by mixing a cement powder of Ca(4)(PO(4))(2)O/CaHPO(4)/SrHPO(4) and a cement liquid of diluted H(3)PO(4) aqueous solution. In the present study, we intensively studied the influences of both Sr content and H(3)PO(4) concentration in diluted phosphoric acid aqueous solution on the setting time, hydration heat-liberation behaviours, and real-time microstructure and phase evolutions of the SrCaHA cement. The results show that both PO(4)(3-) and H(+) ions in PA solution attended the hydration reaction as reactants, and thus the increase of the PA concentration not only promoted the dissolution of Ca(4)(PO(4))(2)O but also pushed the hydration progress of SrCaHA bone cement. Sr content exhibits a remarkable retardation role on the apatite transformation of the SrCaHA cement pastes which probably attributed to its higher degree of supersaturation for yielding apatite crystals and lower transformation rate when exposed to the Sr(2+)-containing hydration system. This present results contribute to a better understanding on the hydration mechanism of the new SrCaHA cement and help to the more precisely controlling of its hydration process.
Assuntos
Materiais Biocompatíveis/química , Cimentos Ósseos/química , Durapatita/química , Ácidos Fosfóricos/química , Estrôncio/química , Implantes Absorvíveis , Cristalização , Temperatura Alta , Íons , Teste de Materiais , Microscopia Eletrônica de Varredura , Tamanho da Partícula , Pós , Propriedades de Superfície , Difração de Raios XRESUMO
Optical polyimide (PI) membrane is a promising substrate material for diffractive lens applied in future large-aperture space based imaging system because of its light weight, environmental adaptability and deployable feature. In this letter, we put forward a facile large-area uniform photolithography technique using vacuum assisted self contact method to fabricate large-aperture membrane diffractive lens. We fabricated a φ 400 mm aperture membrane off-axis 2-levels Fresnel Zone Lens (FZL) based on the method and achieved uniformly distributed photoresist morphology as well as over 36.6% average diffraction efficiency in full aperture. The results demonstrated that vacuum assisted self contact method effectively eliminates considerable air gaps caused by unevenness of large area photomask and substrate, thus facilitates uniform light field distribution in photoresist. This work provides reference to fabrication techniques of large aperture membrane diffractive lens, and offers feasible methods for future large area flexible electronics manufacturing.
RESUMO
In this paper, large area and deep sub-wavelength interference patterns are realized experimentally by using odd surface plasmon modes in the metal/insulator/metal structure. Theoretical investigation shows that the odd modes possesses much higher transversal wave vector and great inhibition of tangential electric field components, facilitating surface plasmon interference fringes with high resolution and contrast in the measure of electric field intensity. Interference resist patterns with 45 nm (â¼λ/8) half-pitch, 50 nm depth, and area size up to 20 mm × 20 mm were obtained by using 20 nm Al/50 nm photo resist/50 nm Al films with greatly reduced surface roughness and 180 nm pitch exciting grating fabricated with conventional laser interference lithography. Much deeper resolution down to 19.5 nm is also feasible by decreasing the thickness of PR. Considering that no requirement of expensive EBL or FIB tools are employed, it provides a cost-effective way for large area and nano-scale fabrication.