Lyman-ß narrowband coatings with strong Lyman-α rejection.

Novel narrowband multilayer coatings efficient at a wavelength as short as 100 mn are presented, which pushes shortwards the existing limit of reported narrowband multilayers. Such limit had been established at ~120 nm, close to the MgF2 cutoff wavelength. The new multilayers combine layers of Al, LiF, and SiC, in an Al/LiF/SiC/LiF multilayer design (four layers, starting with the innermost layer). Among these materials, Al and LiF are deposited by evaporation and SiC by ion-beam-sputtering. In addition to a high, narrow peak close to H Lyman ß (102.6 nm), these multilayers simultaneously provide a very small reflectance at H Lyman α (121.6 nm). This combined performance is demanded in space instrumentation for astrophysics and solar physics observations among others, where imaging the sky at the important diagnostic spectral line of Lyman ß line requires rejecting the frequently much more intense background at Lyman α line. Such is the case for solar corona observations at Lyman ß, which is masked by the strong Lyman α line. The multilayer peak is placed close to another important diagnostic tool: the OVI doublet at 103.2 and 103.8 nm. The target of small reflectance at 121.6 nm was seen to be the most critical. The best strategy in multilayer preparation was to prepare it with such minimum reflectance at slightly shorter wavelengths so that the coating evolved to shift it longwards over time. Multilayers kept a remarkable 102.6 nm/121.6 nm reflectance ratio over time in spite of some performance degradation. Hence, a multilayer coating aged of 4 years kept a reflectance of 43% at 102.6 nm and 0.2% at 121.6 nm.

Transmittance and optical constants of Ca films in the 4-1000 eV spectral range.

The low expected absorption of Ca in the extreme ultraviolet (EUV) makes it an attractive material for multilayers and filters because most materials in nature strongly absorb the EUV. Few optical constant data had been reported for Ca. In this research, Ca films of various thicknesses were deposited on grid-supported C films and their transmittance measured in situ from the visible to the soft x-rays. The measurement range contains M2,3 and L2,3 absorption edges. Transmittance measurements were used to obtain the Ca extinction coefficient k. A minimum k of 0.017 was obtained at ∼23 eV, which makes Ca a promising low-absorption material for EUV coatings. A second spectral range of interest for its low absorption is below the Ca L3 edge at ∼343 eV. Measured k data and extrapolations were used to calculate the refractive index n using Kramers-Krönig relations. This is the first self-consistent data set on Ca covering a wide spectral range including the EUV.

Self-consistent optical constants of sputter-deposited B4C thin films.

The optical constants of ion-beam-sputtered B4C films have been measured by ellipsometry in the 190-950 nm range. The set of data has been extended toward both shorter and longer wavelengths with data in the literature, along with interpolations and extrapolations, in order to obtain a self-consistent set of data by means of Kramers-Krönig analysis. All data correspond to films that were deposited by sputtering on nonheated substrates, and hence they are expected to be amorphous. The B4C bandgap was calculated as a fitting parameter of Tauc equations for indirect transitions using the present optical constants. Good global accuracy of the data was estimated through the use of various sum rules. The consistent data set includes the visible to the extreme UV (EUV); this large spectrum of characterization will enable the design of multilayer coatings that combine a relatively high reflectance in parts of the EUV with a desired performance at a secondary range, such as the visible.

Self-consistent optical constants of SiC thin films.

The optical constants of ion-beam-sputtered SiC films have been measured by ellipsometry in the 190 to 950 nm range. The set of data has been extended both toward shorter and longer wavelengths with data in the literature, along with inter- and extrapolations, in order to obtain a self-consistent set of data by means of Kramers-Krönig analysis. All data correspond to films that were deposited by sputtering on nonheated substrates, and hence they are expected to be amorphous. A bandgap of 1.9 eV for the films was fitted from the obtained optical constants. A good global accuracy of the data was estimated through the use of various sum rules. The consistent dataset includes the visible to the extreme ultraviolet (EUV); this large spectrum of characterization will enable the design of multilayer coatings that combine a high reflectance in parts of the EUV with desired performance at a secondary range, such as the visible. To our knowledge, this paper provides the first compilation of the optical constants of amorphous SiC films.

Transmittance and optical constants of erbium films in the 3.25-1580 eV spectral range.

The optical constants of erbium (Er) films were obtained in the 3.25-1580 eV range from transmittance measurements performed at room temperature. Thin films of Er were deposited by evaporation in ultra high vacuum conditions and their transmittance was measured in situ. Substrates consisted of a thin C film supported on a grid. Transmittance measurements were used to obtain the extinction coefficient k of the Er films. The refractive index n of Er was calculated using the Kramers-Krönig analysis. k data were extrapolated both on the high- and low-energy parts of the spectrum by using experimental data and calculated k values available in the literature. Er, similar to other lanthanides, has a low-absorption band below the O(2,3) edge onset; the smallest absorption was measured at ~22.5 eV. Therefore, Er is a promising material for filters and multilayer coatings in the energy range below the O(2,3) edge, in which materials typically have an absorption stronger than at other energies. Good consistency of the data resulted from the application of f and inertial sum rules.