Design of Piezoelectric Dual-Bandwidth Accelerometers for Completely Implantable Auditory Prostheses.

For the last 20 years, researchers have developed accelerometers to function as ossicular vibration sensors in order to eliminate the external components of hearing aid and cochlear implant systems. To date, no accelerometer has met all of the stringent performance requirements necessary to function in this capacity. In this work, we present an accelerometer design with an equivalent noise floor less than 20 phon equal-loudness-level over a 0.1-8 kHz bandwidth in a package small enough to be implanted in the middle ear. Our approach uses a dual-bandwidth (two sensing elements) microelectromechanical systems piezoelectric accelerometer, sized using an area-minimization process based on an experimentally-validated analytical model of the sensor. The resulting bandwidth of the low-frequency sensing element is 0.1-1.25 kHz and that of the high-frequency sensing element is 1.25-8 kHz. These sensing elements fit within a silicon frame that is 795 µm × 778 µm, which can reasonably be housed along with a required integrated circuit in a 2.2 mm × 2.7 mm × 1 mm package. The estimated total mass of the packaged system is approximately 14 mg. This dual-bandwidth MEMS sensor fills a technological gap in current completely implantable auditory prosthesis research and development by enabling a device capable of meeting physical and performance specifications needed for use in the middle ear.

Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors.

The ubiquity of vibration sensors and accelerometers, as well as advances in microfabrication technologies, have led to the development of implantable devices for biomedical applications. This work describes a piezoelectric microelectromechanical systems accelerometer designed for potential use in auditory prostheses. The design includes an aluminum nitride bimorph beam with a silicon proof mass. Analytic models of the device sensitivity and noise are presented. These lead to a minimum detectable acceleration cost function for the sensor that can be used to optimize sensor designs more effectively than typical sensitivity maximizing or electrical noise minimizing approaches. A fabricated device with a 1 µm thick, 100 µm long, and 700 µm wide beam and a 400 µm thick, 63 µm long, and 740 µm wide proof mass is tested experimentally. Results indicate accurate modeling of the system sensitivity up to the first resonant frequency (1420 Hz). The low-frequency sensitivity of the device is 1.3 mV/g, and the input referred noise is 36.3 nV / Hz at 100 Hz and 11.8 nV / Hz at 1 kHz. The resulting minimum detectable acceleration at 100 Hz and 1 kHz is 28 µg / Hz and 9.1 µg / Hz , respectively. A brief explanation of the use of the validated cost function for sensor design is provided, as well as an example comparing the piezoelectric sensor design to another from the literature. It is concluded that a traditional single-resonance design cannot compete with the performance of acoustic sensors; therefore, novel device designs must be considered for implantable auditory prosthesis applications.

The nematode C. elegans senses airborne sound.

Unlike olfaction, taste, touch, vision, and proprioception, which are widespread across animal phyla, hearing is found only in vertebrates and some arthropods. The vast majority of invertebrate species are thus considered insensitive to sound. Here, we challenge this conventional view by showing that the earless nematode C. elegans senses airborne sound at frequencies reaching the kHz range. Sound vibrates C. elegans skin, which acts as a pressure-to-displacement transducer similar to vertebrate eardrum, activates sound-sensitive FLP/PVD neurons attached to the skin, and evokes phonotaxis behavior. We identified two nAChRs that transduce sound signals independently of ACh, revealing an unexpected function of nAChRs in mechanosensation. Thus, the ability to sense airborne sound is not restricted to vertebrates and arthropods as previously thought, and might have evolved multiple times independently in the animal kingdom, suggesting convergent evolution. Our studies also demonstrate that animals without ears may not be presumed to be sound insensitive.

Ultraminiature AlN diaphragm acoustic transducer.

Piezoelectric acoustic transducers consisting of a circular aluminum nitride and silicon nitride unimorph diaphragm and an encapsulated air-filled back cavity are reported. Analytical and finite element analysis models are used to design the transducer to achieve low minimum detectable pressure (MDP) within chosen size restrictions. A series of transducers with varying radii are fabricated using microelectromechanical systems (MEMS) techniques. Experimental results are reported for a transducer with a 175 µm radius on a 400 × 500 × 500 µm3 die exhibiting structural resonances at 552 kHz in air and 133 kHz in water. The low-frequency (10 Hz-50 kHz) sensitivity is 1.87 µV/Pa (-114.5 dB re 1 V/Pa) in both air and water. The sensor has an MDP of 43.7 mPa/ Hz (67 dB SPL) at 100 Hz and 10.9 mPa/ Hz (55 dB SPL) at 1 kHz. This work contributes a set of design rules for MEMS piezoelectric diaphragm transducers that focuses on decreasing the MDP of the sensor through size, material properties, and residual stress considerations.