Staircase array of inclined refractive multi-lenses for large field of view pixel super-resolution scanning transmission hard X-ray microscopy.

Owing to the development of X-ray focusing optics during the past decades, synchrotron-based X-ray microscopy techniques allow the study of specimens with unprecedented spatial resolution, down to 10 nm, using soft and medium X-ray photon energies, though at the expense of the field of view (FOV). One of the approaches to increase the FOV to square millimetres is raster-scanning of the specimen using a single nanoprobe; however, this results in a long data acquisition time. This work employs an array of inclined biconcave parabolic refractive multi-lenses (RMLs), fabricated by deep X-ray lithography and electroplating to generate a large number of long X-ray foci. Since the FOV is limited by the pattern height if a single RML is used by impinging X-rays parallel to the substrate, many RMLs at regular intervals in the orthogonal direction were fabricated by tilted exposure. By inclining the substrate correspondingly to the tilted exposure, 378000 X-ray line foci were generated with a length in the centimetre range and constant intervals in the sub-micrometre range. The capability of this new X-ray focusing device was first confirmed using ray-tracing simulations and then using synchrotron radiation at BL20B2 of SPring-8, Japan. Taking account of the fact that the refractive lens is effective for focusing high-energy X-rays, the experiment was performed with 35 keV X-rays. Next, by scanning a specimen through the line foci, this device was used to perform large FOV pixel super-resolution scanning transmission hard X-ray microscopy (PSR-STHXM) with a 780 ± 40 nm spatial resolution within an FOV of 1.64 cm × 1.64 cm (limited by the detector area) and a total scanning time of 4 min. Biomedical implant abutments fabricated via selective laser melting using Ti-6Al-4V medical alloy were measured by PSR-STHXM, suggesting its unique potential for studying extended and thick specimens. Although the super-resolution function was realized in one dimension in this study, it can be expanded to two dimensions by aligning a pair of presented devices orthogonally.

Zooming X-rays with a single rotation in X-ray prism zoom lenses (XPZL).

Prism arrays arranged to form a slightly open alligator mouth were found to focus incident X-rays, as with increasing distance from the object symmetry axis these rays hit an increasing number of refracting prism tips. Such an object is then formally a refractive lens. Due to the strong energy dependence of the refractive index of material for X-rays a refractive X-ray lens is chromatically focusing. The attractive feature of the alligator lens is the inherent zoomability possible as the mouth can easily be opened or closed. However, the required tolerances for the jaw rotations and the jaw positioning are so stringent, that the routine use of such systems has not been reported yet. This study will show that the related technical problems can be overcome by proper object fabrication. In fact the here presented objects can already be aligned in the production stage. Then the assembly can be made with simple tools. And the zooming is achieved by just a simple rotation. The transmission through the devices was found to be as expected, and thus performance-wise these objects can directly compete with other refractive X-ray focusing systems.

At-wavelength optics characterisation via X-ray speckle- and grating-based unified modulated pattern analysis.

The current advances in new generation X-ray sources are calling for the development and improvement of high-performance optics. Techniques for high-sensitivity phase sensing and wavefront characterisation, preferably performed at-wavelength, are increasingly required for quality control, optimisation and development of such devices. We here show that the recently proposed unified modulated pattern analysis (UMPA) can be used for these purposes. We characterised two polymer X-ray refractive lenses and quantified the effect of beam damage and shape errors on their refractive properties. Measurements were performed with two different setups for UMPA and validated with conventional X-ray grating interferometry. Due to its adaptability to different setups, the ease of implementation and cost-effectiveness, we expect UMPA to find applications for high-throughput quantitative optics characterisation and wavefront sensing.

X-ray Phase-Contrast Imaging and Metrology through Unified Modulated Pattern Analysis.

We present a method for x-ray phase-contrast imaging and metrology applications based on the sample-induced modulation and subsequent computational demodulation of a random or periodic reference interference pattern. The proposed unified modulated pattern analysis (UMPA) technique is a versatile approach and allows tuning of signal sensitivity, spatial resolution, and scan time. We characterize the method and demonstrate its potential for high-sensitivity, quantitative phase imaging, and metrology to overcome the limitations of existing methods.

Determination of the packing fraction in photonic glass using synchrotron radiation nanotomography.

Photonic glass is a material class that can be used as photonic broadband reflectors, for example in the infrared regime as thermal barrier coating films. Photonic properties such as the reflectivity depend on the ordering and material packing fraction over the complete film thickness of up to 100 µm. Nanotomography allows acquiring these key parameters throughout the sample volume at the required resolution in a non-destructive way. By performing a nanotomography measurement at the PETRA III beamline P05 on a photonic glass film, the packing fraction throughout the complete sample thickness was analyzed. The results showed a packing fraction significantly smaller than the expected random close packing giving important information for improving the fabrication and processing methods of photonic glass material in the future.

Simulation of aperture-optimised refractive lenses for hard X-ray full field microscopy.

The aperture of refractive X-ray lenses is limited by absorption and geometry. We introduce a specific simulation method to develop an aperture-optimized lens design for hard X-ray full field microscopy. The aperture-optimized lens, referred to as Taille-lens, allows for high spatial resolution as well as homogeneous image quality. This is achieved by the individual adaptation of the apertures of hundreds of lens elements of an X-ray imaging lens to the respective microscopy setup. For full field microscopy, the simulations result in lenses with both a large entrance and exit aperture and lens elements with smaller apertures in the middle of the lens.

Quantitative characterization of X-ray lenses from two fabrication techniques with grating interferometry.

Refractive X-ray lenses are in use at a large number of synchrotron experiments. Several materials and fabrication techniques are available for their production, each having their own strengths and drawbacks. We present a grating interferometer for the quantitative analysis of single refractive X-ray lenses and employ it for the study of a beryllium point focus lens and a polymer line focus lens, highlighting the differences in the outcome of the fabrication methods. The residuals of a line fit to the phase gradient are used to quantify local lens defects, while shape aberrations are quantified by the decomposition of the retrieved wavefront phase profile into either Zernike or Legendre polynomials, depending on the focus and aperture shape. While the polymer lens shows better material homogeneity, the beryllium lens shows higher shape accuracy.

Parabolic gratings enhance the X-ray sensitivity of Talbot interferograms.

In grating-based X-ray Talbot interferometry, the wave nature of X-ray radiation is exploited to generate phase contrast images of objects that do not generate sufficient contrast in conventional X-ray imaging relying on X-ray absorption. The phase sensitivity of this interferometric technique is proportional to the interferometer length and inversely proportional to the period of gratings. However, the limited spatial coherency of X-rays limits the maximum interferometer length, and the ability to obtain smaller-period gratings is limited by the manufacturing process. Here, we propose a new optical configuration that employs a combination of a converging parabolic micro-lens array and a diverging micro-lens array, instead of a binary phase grating. Without changing the grating period or the interferometer length, the phase signal is enhanced because the beam deflection by a sample is amplified through the array of converging-diverging micro-lens pairs. We demonstrate that the differential phase signal detected by our proposed set-up is twice that of a Talbot interferometer, using the same binary absorption grating, and with the same overall inter-grating distance.

A large field-of-view high-resolution hard x-ray microscope using polymer optics.

We present an effective approach using a matched pair of polymer-based condenser-objective lenses to build a compact full-field x-ray microscope with a high spatial resolution. A unique condenser comprising arrays of high-aspect-ratio prisms with equilateral cross section is used for uniformly illuminating samples over a large field of view (FOV) from all angles, which match the acceptance of an objective made of interdigitated orthogonal rows of one-dimensional lenses. State-of-the-art Talbot grating interferometry used to characterize these lenses for the first time revealed excellent focusing properties and minimal wavefront distortions. Using a specific lens pair designed for 20 keV x rays, short-exposure times, and image registration with a cross-correlation technique, we circumvent vibrational instabilities to obtain distortion-free images with a uniform resolution of 240 nm (smallest resolvable line pair) over a large FOV, 80 × 80 µm2 in extent. The results were contrasted with those collected using commercial two-dimensional parabolic lenses with a smaller FOV. This approach implemented on a diffractometer would enable diffraction-contrast or dark-field microscopy for fast observations of "mesoscopic" phenomena in real space complementing reciprocal-space studies using diffraction on the same instrument.

Grid-enhanced X-ray coded aperture microscopy with polycapillary optics.

Polycapillary devices focus X-rays by means of multiple reflections of X-rays in arrays of bent glass capillaries. The size of the focal spot (typically 10-100 µm) limits the resolution of scanning, absorption and phase-contrast X-ray imaging using these devices. At the expense of a moderate resolution, polycapillary elements provide high intensity and are frequently used for X-ray micro-imaging with both synchrotrons and X-ray tubes. Recent studies have shown that the internal microstructure of such an optics can be used as a coded aperture that encodes high-resolution information about objects located inside the focal spot. However, further improvements to this variant of X-ray microscopy will require the challenging fabrication of tailored devices with a well-defined capillary microstructure. Here, we show that submicron coded aperture microscopy can be realized using a periodic grid that is placed at the output surface of a polycapillary optics. Grid-enhanced X-ray coded aperture microscopy with polycapillary optics does not rely on the specific microstructure of the optics but rather takes advantage only of its focusing properties. Hence, submicron X-ray imaging can be realized with standard polycapillary devices and existing set-ups for micro X-ray fluorescence spectroscopy.

Hybrid setup for micro- and nano-computed tomography in the hard X-ray range.

With increasing miniaturization in industry and medical technology, non-destructive testing techniques are an area of ever-increasing importance. In this framework, X-ray microscopy offers an efficient tool for the analysis, understanding, and quality assurance of microscopic samples, in particular as it allows reconstructing three-dimensional data sets of the whole sample's volume via computed tomography (CT). The following article describes a compact X-ray microscope in the hard X-ray regime around 9 keV, based on a highly brilliant liquid-metal-jet source. In comparison to commercially available instruments, it is a hybrid that works in two different modes. The first one is a micro-CT mode without optics, which uses a high-resolution detector to allow scans of samples in the millimeter range with a resolution of 1 µm. The second mode is a microscope, which contains an X-ray optical element to magnify the sample and allows resolving 150 nm features. Changing between the modes is possible without moving the sample. Thus, the instrument represents an important step towards establishing high-resolution laboratory-based multi-mode X-ray microscopy as a standard investigation method.