Flexible Seven-in-One Microsensor Embedded in High-Pressure Proton Exchange Membrane Water Electrolyzer for Real-Time Microscopic Monitoring.

The voltage, current, temperature, humidity, pressure, flow, and hydrogen in the high-pressure proton exchange membrane water electrolyzer (PEMWE) can influence its performance and life. For example, if the temperature is too low to reach the working temperature of the membrane electrode assembly (MEA), the performance of the high-pressure PEMWE cannot be enhanced. However, if the temperature is too high, the MEA may be damaged. In this study, the micro-electro-mechanical systems (MEMS) technology was used to innovate and develop a high-pressure-resistant flexible seven-in-one (voltage, current, temperature, humidity, pressure, flow, and hydrogen) microsensor. It was embedded in the upstream, midstream, and downstream of the anode and cathode of the high-pressure PEMWE and the MEA for the real-time microscopic monitoring of internal data. The aging or damage of the high-pressure PEMWE was observed through the changes in the voltage, current, humidity, and flow data. The over-etching phenomenon was likely to occur when this research team used wet etching to make microsensors. The back-end circuit integration was unlikely to be normalized. Therefore, this study used lift-off process to further stabilize the quality of the microsensor. In addition, the PEMWE is more prone to aging and damage under high pressure, so its material selection is very important.

Long-Acting Real-Time Microscopic Monitoring Inside the Proton Exchange Membrane Water Electrolyzer.

The proton exchange membrane water electrolyzer (PEMWE) requires a high operating voltage for hydrogen production to accelerate the decomposition of hydrogen molecules so that the PEMWE ages or fails. According to the prior findings of this R&D team, temperature and voltage can influence the performance or aging of PEMWE. As the PEMWE ages inside, the nonuniform flow distribution results in large temperature differences, current density drops, and runner plate corrosion. The mechanical stress and thermal stress resulting from pressure distribution nonuniformity will induce the local aging or failure of PEMWE. The authors of this study used gold etchant for etching, and acetone was used for the lift-off part. The wet etching method has the risk of over-etching, and the cost of the etching solution is also higher than that of acetone. Therefore, the authors of this experiment adopted a lift-off process. Using the flexible seven-in-one (voltage, current, temperature, humidity, flow, pressure, oxygen) microsensor developed by our team, after optimized design, fabrication, and reliability testing, it was embedded in PEMWE for 200 h. The results of our accelerated aging test prove that these physical factors affect the aging of PEMWE.

The Application of a Self-Made Integrated Three-in-One Microsensor and Commercially Available Wind Speed Sensor to the Cold Air Pipe of the Heating, Ventilation, and Air Conditioning in a Factory for Real-Time Wireless Measurement.

In this study, the integrated three-in-one (temperature, humidity, and wind speed) microsensor was made through the technology of the Micro-electro-mechanical Systems (MEMS) to measure three important physical quantities of the internal environment of the cold air pipe of the Heating, Ventilation and Air Conditioning (HVAC) in the factory, plan the installation positions of the integrated three-in-one microsensor and commercially available wind speed sensor required by the internal environment of the cold air pipe, and conduct the actual 310-h long term test and comparison. In the experiment, it was also observed that the self-made micro wind speed sensor had higher stability compared to the commercially available wind speed sensor (FS7.0.1L.195). The self-made micro wind speed sensor has a variation range of ±200 mm/s, while the commercially available wind speed sensor a variation range of ±1000 mm/s. The commercially available wind speed sensor (FS7.0.1L.195) can only measure the wind speed; however, the self-made integrated three-in-one microsensor can conduct real-time measurements of temperature and humidity according to the environment at that time, and use different calibration curves to know the wind speed. As a result, it is more accurate and less costly than commercially available wind speed sensors. The material cost of self-made integrated three-in-one microsensor includes chemicals, equipment usage fees, and wires. In the future, factories may install a large number of self-made integrated three-in-one microsensors in place of commercially available wind speed sensors. Through real-time wireless measurements, the self-made integrated three-in-one microsensors can achieve the control optimization of the HVAC cold air pipe's internal environment to improve the quality of manufactured materials.

A Flexible 5-In-1 Microsensor for Internal Microscopic Diagnosis of Vanadium Redox Flow Battery Charging Process.

Multiple important physical parameters in the vanadium redox flow battery are difficult to measure accurately, and the multiple important physical parameters (e.g., temperature, flow, voltage, current, pressure, and electrolyte concentration) are correlated with each other; all of them have a critical influence on the performance and life of vanadium redox flow battery. In terms of the feed of fuel to vanadium redox flow battery, the pump conveys electrolytes from the outside to inside for reaction. As the performance of vanadium redox flow battery can be tested only by an external machine-after which, the speed of pump is adjusted to control the flow velocity of electrolyte-the optimum performance cannot be obtained. There is a demand for internal real-time microscopic diagnosis of vanadium redox flow batteries, and this study uses micro-electro-mechanical systems (MEMS) technology to develop a flexible five-in-one (temperature, flow, voltage, current, and pressure) microsensor, which is embedded in vanadium redox flow battery, for real-time sensing. Its advantages include: (1) Small size and the simultaneous measurement of five important physical quantities; (2) elastic measurement position and accurate embedding; and (3) high accuracy, sensitivity, and quick response time. The flexible five-in-one microsensor embedded in the vanadium redox flow battery can instantly monitor the changes in different physical quantities in the vanadium redox flow battery during charging; as such, optimum operating parameters can be found out so that performance and life can be enhancec.

Development of an Internal Real-Time Wireless Diagnostic Tool for a Proton Exchange Membrane Fuel Cell.

To prolong the operating time of unmanned aerial vehicles which use proton exchange membrane fuel cells (PEMFC), the performance of PEMFC is the key. However, a long-term operation can make the Pt particles of the catalyst layer and the pollutants in the feedstock gas bond together (e.g., CO), so that the catalyst loses reaction activity. The performance decay and aging of PEMFC will be influenced by operating conditions, temperature, flow and CO concentration. Therefore, this study proposes the development of an internal real-time wireless diagnostic tool for PEMFC, and uses micro-electro-mechanical systems (MEMS) technology to develop a wireless and thin (<50 µm) flexible integrated (temperature, flow and CO) microsensor. The technical advantages are (1) compactness and three wireless measurement functions; (2) elastic measurement position and accurate embedding; (3) high accuracy and sensitivity and quick response; (4) real-time wireless monitoring of dynamic performance of PEMFC; (5) customized design and development. The flexible integrated microsensor is embedded in the PEMFC, three important physical quantities in the PEMFC, which are the temperature, flow and CO, can be measured simultaneously and instantly, so as to obtain the authentic and complete reaction in the PEMFC to enhance the performance of PEMFC and to prolong the service life.

Application of Flexible Four-In-One Microsensor to Internal Real-Time Monitoring of Proton Exchange Membrane Fuel Cell.

In recent years, the development of green energy sources, such as fuel cell, biomass energy, solar energy, and tidal energy, has become a popular research subject. This study aims at a flexible four-in-one microsensor, which can be embedded in the proton exchange membrane fuel cell (PEMFC) for real-time microscopic diagnosis so as to assist in developing and improving the technology of the fuel cell. Therefore, this study uses micro-electro-mechanical systems (MEMS) technology to integrate a micro humidity sensor, micro pH sensor, micro temperature sensor, and micro voltage sensor into a flexible four-in-one microsensor. This flexible four-in-one microsensor has four functions and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, and real-time measurement. The goal was to be able to put the four-in-one microsensor in any place for measurement without affecting the performance of the fuel cell.

Real-Time Microscopic Monitoring of Flow, Voltage and Current in the Proton Exchange Membrane Water Electrolyzer.

Looking for alternative energy sources has been an inevitable trend since the oil crisis, and close attentioned has been paid to hydrogen energy. The proton exchange membrane (PEM) water electrolyzer is characterized by high energy efficiency, high yield, simple system and low operating temperature. The electrolyzer generates hydrogen from water free of any carbon sources (provided the electrons come from renewable sources such as solar and wind), so it is very clean and completely satisfies the environmental requirement. However, in long-term operation of the PEM water electrolyzer, the membrane material durability, catalyst corrosion and nonuniformity of local flow, voltage and current in the electrolyzer can influence the overall performance. It is difficult to measure the internal physical parameters of the PEM water electrolyzer, and the physical parameters are interrelated. Therefore, this study uses micro-electro-mechanical systems (MEMS) technology to develop a flexible integrated microsensor; internal multiple physical information is extracted to determine the optimal working parameters for the PEM water electrolyzer. The real operational data of local flow, voltage and current in the PEM water electrolyzer are measured simultaneously by the flexible integrated microsensor, so as to enhance the performance of the PEM water electrolyzer and to prolong the service life.

In-Situ Measurement of High-Temperature Proton Exchange Membrane Fuel Cell Stack Using Flexible Five-in-One Micro-Sensor.

In the chemical reaction that proceeds in a high-temperature proton exchange membrane fuel cell stack (HT-PEMFC stack), the internal local temperature, voltage, pressure, flow and current nonuniformity may cause poor membrane material durability and nonuniform fuel distribution, thus influencing the performance and lifetime of the fuel cell stack. In this paper micro-electro-mechanical systems (MEMS) are utilized to develop a high-temperature electrochemical environment-resistant five-in-one micro-sensor embedded in the cathode channel plate of an HT-PEMFC stack, and materials and process parameters are appropriately selected to protect the micro-sensor against failure or destruction during long-term operation. In-situ measurement of the local temperature, voltage, pressure, flow and current distributions in the HT-PEMFC stack is carried out. This integrated micro-sensor has five functions, and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, real-time measurement, and the goal is being able to be put in any place for measurement without affecting the performance of the battery.

A Flexible Three-in-One Microsensor for Real-Time Monitoring of Internal Temperature, Voltage and Current of Lithium Batteries.

Lithium batteries are widely used in notebook computers, mobile phones, 3C electronic products, and electric vehicles. However, under a high charge/discharge rate, the internal temperature of lithium battery may rise sharply, thus causing safety problems. On the other hand, when the lithium battery is overcharged, the voltage and current may be affected, resulting in battery instability. This study applies the micro-electro-mechanical systems (MEMS) technology on a flexible substrate, and develops a flexible three-in-one microsensor that can withstand the internal harsh environment of a lithium battery and instantly measure the internal temperature, voltage and current of the battery. Then, the internal information can be fed back to the outside in advance for the purpose of safety management without damaging the lithium battery structure. The proposed flexible three-in-one microsensor should prove helpful for the improvement of lithium battery design or material development in the future.

The effects of electrode spacing on the performance of microbial fuel cells under different substrate concentrations.

In this study, the electricity generation and organic removal in microbial fuel cells (MFCs) were examined for electrode spacing (ES) covering 5.8, 10.2, 15.1, and 19.5 cm, and for each ES the MFCs were discharged with a series of influent substrates (COD(in)). Results indicate that organic removal was related to COD(in) but not to ES. Best chemical oxygen demand (COD) removals of 64-71% could be achieved at COD(in) around 100 mg COD/L (0.11-0.14 kg COD/m(3)-day). Best power output 3.32 mW/m(2) occurred at ES 5.8 cm and nominal COD(in) 300 mg COD/L. For every ES, the relationship of electricity generation to local substrate near anode (COD(ad)) could be adequately modeled by Monod-type kinetics. The estimated kinetic constants involve maximum current production, I(max), 15.3-19.6 mA/m(2); maximum attainable power output, P(p,max), 4.0-2.5 mW/m(2); half-saturation constant of current, K(si), 22-30 mg COD/L; and half-saturation constant of power, K(sp), 24-90 mg COD/L. This study reveals that the control over ES for improving electricity generation is dependent on the level of COD(ad), which profoundly affects the optimal design of electrode placement.

An Internal Real-Time Microscopic Diagnosis of a Proton Battery Stack during Charging and Discharging.

The proton battery has facilitated a new research direction for technologies related to fuel cells and energy storage. Our R&D team has developed a prototype of a proton battery stack, but there are still problems to be solved, such as leakage and unstable power generation. Moreover, it is unlikely that the multiple important physical parameters inside the proton battery stack can be measured accurately and simultaneously. At present, external or single measurements represent the bottleneck, yet the multiple important physical parameters (oxygen, hydrogen, voltage, current, temperature, flow, and humidity) are interrelated and have a significant impact on the performance, life, and safety of the proton battery stack. This research uses micro-electro-mechanical systems (MEMS) technology to develop a micro oxygen sensor and integrates the six-in-one microsensor that our R&D team previously developed in order to improve sensor output and facilitate overall operation by redesigning the incremental mask and having this co-operate with a flexible board for sensor back-end integration, completing the development of a flexible seven-in-one (oxygen, hydrogen, voltage, current, temperature, flow, and humidity) microsensor.

A Flexible Six-in-One Microsensor Embedded in a Vanadium Redox Flow Battery for Long-Term Monitoring.

The vanadium redox flow battery (VRFB) can be used as a supporting technology for energy storage corresponding to wind and solar power generation. An aqueous vanadium compound solution can be used repeatedly. As the monomer is large, the flow uniformity of electrolytes in the battery is better, the service life is long, and the safety is better. Hence, large-scale electrical energy storage can be achieved. The instability and discontinuity of renewable energy can then be solved. If the VRFB precipitates in the channel, there will be a strong impact on the flow of vanadium electrolyte, and the channel could even be blocked as a result. The factors which influence its performance and life include electrical conductivity, voltage, current, temperature, electrolyte flow, and channel pressure. This study used micro-electro-mechanical systems (MEMS) technology to develop a flexible six-in-one microsensor which can be embedded in the VRFB for microscopic monitoring. The microsensor can perform real-time and simultaneous long-term monitoring of the physical parameters of VRFB, such as electrical conductivity, temperature, voltage, current, flow, and pressure to keep the VRFB system in the best operating condition.

A Flexible 8-in-1 Microsensor Embedded in Proton Battery Stack for Real-Time Microscopic Measurements.

According to the latest literature, it is difficult to measure the multiple important physical parameters inside a proton battery stack accurately and simultaneously. The present bottleneck is external or single measurements, and the multiple important physical parameters (oxygen, clamping pressure, hydrogen, voltage, current, temperature, flow, and humidity) are interrelated, and have a significant impact on the performance, life, and safety of the proton battery stack. Therefore, this study used micro-electro-mechanical systems (MEMS) technology to develop a micro oxygen sensor and a micro clamping pressure sensor, which were integrated into the 6-in-1 microsensor developed by this research team. In order to improve the output and operability of microsensors, an incremental mask was redesigned to integrate the back end of the microsensor in combination with a flexible printed circuit. Consequently, a flexible 8-in-1 (oxygen, clamping pressure, hydrogen, voltage, current, temperature, flow, and humidity) microsensor was developed and embedded in a proton battery stack for real-time microscopic measurement. Multiple micro-electro-mechanical systems technologies were used many times in the process of developing the flexible 8-in-1 microsensor in this study, including physical vapor deposition (PVD), lithography, lift-off, and wet etching. The substrate was a 50 µm-thick polyimide (PI) film, characterized by good tensile strength, high temperature resistance, and chemical resistance. The microsensor electrode used Au as the main electrode and Ti as the adhesion layer.

Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique.

The design, fabrication, and measurement of a microelectromechanical system (MEMS) three-axis magnetic field sensor (MFS) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The MFS is a magnetic transistor type. The performance of the MFS was analyzed employing the semiconductor simulation software, Sentaurus TCAD. In order to decrease the cross-sensitivity of the three-axis MFS, the structure of the MFS is planed to accommodate two independent sensing components, a z-MFS utilized to sense magnetic field (M-F) in the z-direction and a y/x-MFS composed of a y-MFS and a x-MFS to be utilized to sense M-F in the y- and x-directions. The z-MFS incorporates four additional collectors to increase its sensitivity. The commercial 1P6M 0.18 µm CMOS process of the Taiwan Semiconductor Manufacturing Company (TSMC) is utilized to manufacture the MFS. Experiments depict that the MFS has a low cross-sensitivity of less than 3%. The sensitivities of z-, y-, and x-MFS are 237 mV/T, 485 mV/T, and 484 mV/T, respectively.

Local area water removal analysis of a proton exchange membrane fuel cell under gas purge conditions.

In this study, local area water content distribution under various gas purging conditions are experimentally analyzed for the first time. The local high frequency resistance (HFR) is measured using novel micro sensors. The results reveal that the liquid water removal rate in a membrane electrode assembly (MEA) is non-uniform. In the under-the-channel area, the removal of liquid water is governed by both convective and diffusive flux of the through-plane drying. Thus, almost all of the liquid water is removed within 30 s of purging with gas. However, liquid water that is stored in the under-the-rib area is not easy to remove during 1 min of gas purging. Therefore, the re-hydration of the membrane by internal diffusive flux is faster than that in the under-the-channel area. Consequently, local fuel starvation and membrane degradation can degrade the performance of a fuel cell that is started from cold.

A Micro Air Velocity Sensor for Measuring the Internal Environment of the Cold Air Ducts of Heating, Ventilation, and Air Conditioning Systems.

A wireless flexible air velocity microsensor was developed by using micro-electro-mechanical systems (MEMS) technology. Polyimide (PI) material was selected for the waterproof and oilproof requirements of the cold air duct environment of heating, ventilation, and air conditioning (HVAC) systems, and then a wireless flexible micro air velocity sensor was completed. To obtain real-time wireless measurements of the air velocity inside the cold air ducts of an HVAC system, and to create a measurements database, the deployment locations and quantity of micro air velocity sensors for the internal environment of the cold air ducts were planned. A field domain verification was performed to optimize the internal environment control of the cold air ducts of ventilation and air conditioning systems and to enhance the quality and reliability of process materials. This study realized real-time monitoring of velocity in the HVAC ducts of a chemical-fiber plant. A commercial velocity sensor (FS7.0.1L.195) was purchased and a micro-electro-mechanical systems (MEMS) approach was also used to develop a home-built micro air velocity sensor, to optimize the provision of the commercial sensors and our home-built micro air velocity sensor. Comparing the specifications of the two commercially available sensors with our home-built micro air velocity sensor, the results show that the home-built micro air velocity sensor has the advantages of fast response time, simultaneous sensing of three important physical quantities, and low cost.

Real-Time Monitoring of the Temperature, Flow, and Pressure Inside High-Temperature Proton Exchange Membrane Fuel Cells.

The proton exchange membrane fuel cell (PEMFC) system is a highly efficient and environmentally friendly energy conversion technology. However, the local temperature, flow, and pressure inhomogeneity within the fuel cell during the electrochemical reaction process may lead to depletion of PEMFC material and uneven fuel distribution, thus affecting the performance and service life of high-temperature PEMFCs. In this study, micromachining technology is used to develop a three-in-one flexible micro-sensor that is resistant to a high-temperature electrochemical environment (120~200 °C). Appropriate materials and process parameters are used to protect the micro-sensor from failure or damage under long-term testing, and to conduct a real-time micro-monitor of the local temperature, flow, and pressure distribution inside high-temperature PEMFCs.

Real-Time Monitoring of HT-PEMFC.

During the electrochemical reaction of a high temperature proton exchange membrane fuel cell (HT-PEMFC), (in this paper HT-PEMFC means operating in the range of 120 to 200 °C) the inhomogeneity of temperature, flow rate, and pressure in the interior is likely to cause the reduction of ion conductivity or thermal stability weight loss of proton exchange membrane materials, and it is additionally likely to cause uneven fuel distribution, thereby affecting the working performance and service life of the HT-PEMFC. This study used micro-electro-mechanical systems (MEMS) technology to develop a flexible three-in-one microsensor which is resistant to high temperature electrochemical environments; we selected appropriate materials and process parameters to protect the microsensor from failure or damage under long-term tests. The proposed method can monitor the local temperature, flow rate, and pressure distribution in HT-PEMFC in real time.

Flexible, Multifunctional Micro-Sensor Applied to Internal Measurement and Diagnosis of Vanadium Flow Battery.

The vanadium redox flow battery (VRFB) system is an emerging energy storage technology with many advantages, such as high efficiency, long life, and high safety. However, during the power-generation process, if local high temperature is generated, the rate of ions passing through the membrane will increase. In addition, it will also cause vanadium pentoxide molecules (V2O5) to exist in the solid state. Once the solid is formed, it will affect the flow of the vanadium electrolyte, which will eventually cause the temperature of the VRFB to continue to rise. According to the various physical parameters of VRFB shown in the literature, they have a significant impact on the efficiency and life of VRFB. Therefore, this research proposes to develop flexible multifunction (voltage, current, temperature, and flow) micro-sensors using micro-electro-mechanical systems (MEMS) technology to meet the need for real-time micro-diagnosis in the VRFB. The device is embedded in the VRFB of real-time microscopic sensing and diagnosis. Its technical advantages are: (1) it can simultaneously locally measure four physical quantities of voltage, current, temperature, and flow; (2) due to its mall size it can be accurately embedded; (3) the high accuracy and sensitivity provides it with a fast response time; and (4) it possesses extreme environment resistance.

Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique.

This study develops a TEMH (thermoelectric energy micro harvester) chip utilizing a commercial 0.18 µm CMOS (complementary metal oxide semiconductor) process. The chip contains a TEMH and temperature sensors. The TEMH is established using a series of 54 thermocouples. The use of the temperature sensors monitors the temperature of the thermocouples. One temperature sensor is set near the cold part of the thermocouples, and the other is set near the hot part of the thermocouples. The performance of the TEMH relies on the TD (temperature difference) at the CHP (cold and hot parts) of the thermocouples. The more the TD at the CHP of the thermocouples increases, the higher the output voltage and output power of the TEMH become. To obtain a higher TD, the cold part of the thermocouples is designed as a suspended structure and is combined with cooling sheets to increase heat dissipation. The cooling sheet is constructed of a stack of aluminum layers and is mounted above the cold part of the thermocouple. A finite element method software, ANSYS, is utilized to compute the temperature distribution of the TEMH. The TEMH requires a post-process to obtain the suspended thermocouple structure. The post-process utilizes an RIE (reactive ion etch) to etch the two sacrificial materials, which are silicon dioxide and silicon substrate. The results reveal that the structure of the thermocouples is completely suspended and does not show any injury. The measured results reveal that the output voltage of the TEMH is 32.5 mV when the TD between the CHP of the thermocouples is 4 K. The TEMH has a voltage factor of 8.93 mV/mm2K. When the TD between the CHP of the thermocouples is 4 K, the maximum output power of the TEMH is 4.67 nW. The TEMH has a power factor of 0.31 nW/mm2K2.