Nanowatt-Level Photoactivated Gas Sensor Based on Fully-Integrated Visible MicroLED and Plasmonic Nanomaterials.

Photoactivated gas sensors that are fully integrated with micro light-emitting diodes (µLED) have shown great potential to substitute conventional micro/nano-electromechanical (M/NEMS) gas sensors owing to their low power consumption, high mechanical stability, and mass-producibility. Previous photoactivated gas sensors mostly have utilized ultra-violet (UV) light (250-400 nm) for activating high-bandgap metal oxides, although energy conversion efficiencies of gallium nitride (GaN) LEDs are maximized in the blue range (430-470 nm). This study presents a more advanced monolithic photoactivated gas sensor based on a nanowatt-level, ultra-low-power blue (λpeak  = 435 nm) µLED platform (µLP). To promote the blue light absorbance of the sensing material, plasmonic silver (Ag) nanoparticles (NPs) are uniformly coated on porous indium oxide (In2 O3 ) thin films. By the plasmonic effect, Ag NPs absorb the blue light and spontaneously transfer excited hot electrons to the surface of In2 O3 . Consequently, high external quantum efficiency (EQE, ≈17.3%) and sensor response (ΔR/R0 (%) = 1319%) to 1 ppm NO2 gas can be achieved with a small power consumption of 63 nW. Therefore, it is highly expected to realize various practical applications of mobile gas sensors such as personal environmental monitoring devices, smart factories, farms, and home appliances.

Ultra-Low-Power E-Nose System Based on Multi-Micro-LED-Integrated, Nanostructured Gas Sensors and Deep Learning.

As interests in air quality monitoring related to environmental pollution and industrial safety increase, demands for gas sensors are rapidly increasing. Among various gas sensor types, the semiconductor metal oxide (SMO)-type sensor has advantages of high sensitivity, low cost, mass production, and small size but suffers from poor selectivity. To solve this problem, electronic nose (e-nose) systems using a gas sensor array and pattern recognition are widely used. However, as the number of sensors in the e-nose system increases, total power consumption also increases. In this study, an ultra-low-power e-nose system was developed using ultraviolet (UV) micro-LED (µLED) gas sensors and a convolutional neural network (CNN). A monolithic photoactivated gas sensor was developed by depositing a nanocolumnar In2O3 film coated with plasmonic metal nanoparticles (NPs) directly on the µLED. The e-nose system consists of two different µLED sensors with silver and gold NP coating, and the total power consumption was measured as 0.38 mW, which is one-hundredth of the conventional heater-based e-nose system. Responses to various target gases measured by multi-µLED gas sensors were analyzed by pattern recognition and used as the training data for the CNN algorithm. As a result, a real-time, highly selective e-nose system with a gas classification accuracy of 99.32% and a gas concentration regression error (mean absolute) of 13.82% for five different gases (air, ethanol, NO2, acetone, methanol) was developed. The µLED-based e-nose system can be stably battery-driven for a long period and is expected to be widely used in environmental internet of things (IoT) applications.

Deep-learning-based gas identification by time-variant illumination of a single micro-LED-embedded gas sensor.

Electronic nose (e-nose) technology for selectively identifying a target gas through chemoresistive sensors has gained much attention for various applications, such as smart factory and personal health monitoring. To overcome the cross-reactivity problem of chemoresistive sensors to various gas species, herein, we propose a novel sensing strategy based on a single micro-LED (µLED)-embedded photoactivated (µLP) gas sensor, utilizing the time-variant illumination for identifying the species and concentrations of various target gases. A fast-changing pseudorandom voltage input is applied to the µLED to generate forced transient sensor responses. A deep neural network is employed to analyze the obtained complex transient signals for gas detection and concentration estimation. The proposed sensor system achieves high classification (~96.99%) and quantification (mean absolute percentage error ~ 31.99%) accuracies for various toxic gases (methanol, ethanol, acetone, and nitrogen dioxide) with a single gas sensor consuming 0.53 mW. The proposed method may significantly improve the efficiency of e-nose technology in terms of cost, space, and power consumption.

High Accuracy Real-Time Multi-Gas Identification by a Batch-Uniform Gas Sensor Array and Deep Learning Algorithm.

Semiconductor metal oxide (SMO) gas sensors are attracting great attention as next-generation environmental monitoring sensors. However, there are limitations to the actual application of SMO gas sensors due to their low selectivity. Although the electronic nose (E-nose) systems based on a sensor array are regarded as a solution for the selectivity issue, poor accuracy caused by the nonuniformity of the fabricated gas sensors and difficulty of real-time gas detection have yet to be resolved. In this study, these problems have been solved by fabricating uniform gas sensor arrays and applying the deep learning algorithm to the data from the sensor arrays. Nanocolumnar films of metal oxides (SnO2, In2O3, WO3, and CuO) with a high batch uniformity deposited through glancing angle deposition were used as the sensing materials. The convolutional neural network (CNN) using the input data as a matrix form was adopted as a learning algorithm, which could conduct pattern recognition of the sensor responses. Finally, real-time selective gas detection for CO, NH3, NO2, CH4, and acetone (C3H6O) gas was achieved (minimum response time of 1, 8, 5, 19, and 2 s, respectively) with an accuracy of 98% by applying preprocessed response data to the CNN.