RESUMO
A phase shift proximity printing lithographic mask is designed, manufactured and tested. Its design is based on a Fresnel computer-generated hologram, employing the scalar diffraction theory. The obtained amplitude and phase distributions were mapped into discrete levels. In addition, a coding scheme using sub-cells structure was employed in order to increase the number of discrete levels, thus increasing the degree of freedom in the resulting mask. The mask is fabricated on a fused silica substrate and an amorphous hydrogenated carbon (a:C-H) thin film which act as amplitude modulation agent. The lithographic image is projected onto a resist coated silicon wafer, placed at a distance of 50 microm behind the mask. The results show a improvement of the achieved resolution--linewidth as good as 1.5 microm--what is impossible to obtain with traditional binary masks in proximity printing mode. Such achieved dimensions can be used in the fabrication of MEMS and MOEMS devices. These results are obtained with a UV laser but also with a small arc lamp light source exploring the partial coherence of this source.
Assuntos
Simulação por Computador , Luz , Fotografação/métodos , Impressão/métodos , Algoritmos , Holografia/métodosRESUMO
We introduce the use of a lanthanide complex, tetracycline-europium, for the clinical diagnosis of urea hydrogen peroxide in human whole blood. The values obtained agree with the urea concentration variation verified in 49 patients, including 12 predialysis, 12 peritoneal, and 15 dialysis subjects, and 10 controls. This method is noninvasive and can help in the identification of renal and cardiac diseases.