Transduction of Single Nanomechanical Pillar Resonators by Scattering of Surface Acoustic Waves.

One of the challenges of nanoelectromechanical systems (NEMS) is the effective transduction of the tiny resonators. Vertical structures, such as nanomechanical pillar resonators, which are exploited in optomechanics, acoustic metamaterials, and nanomechanical sensing, are particularly challenging to transduce. Existing electromechanical transduction methods are ill-suited as they put constraints on the pillars' material and do not enable a transduction of freestanding pillars. Here, we present an electromechanical transduction method for single nanomechanical pillar resonators based on surface acoustic waves (SAWs). We demonstrate the transduction of freestanding nanomechanical platinum-carbon pillars in the first-order bending and compression mode. Since the principle of the transduction method is based on resonant scattering of a SAW by a nanomechanical resonator, our transduction method is independent of the pillar's material and not limited to pillar-shaped geometries. It represents a general method to transduce vertical mechanical resonators with nanoscale lateral dimensions.

Design considerations of gold nanoantenna dimers for plasmomechanical transduction.

Internal optical forces emerging from plasmonic interactions in gold nanodisc, nanocube and nanobar dimers were studied by the finite element method. A direct correlation between the electric-field enhancement and optical forces was found by observing the largest magnitude of optical forces in nanocube dimers. Moreover, further amplification of optical forces was achieved by employing optical power of the excitation source. The strength of optical forces was observed to be governed by the magnitude of polarisation density on the nanoparticles, which can be varied by modifying the nanoparticle geometry and source wavelength. This study allows us to recognise that nanoparticle geometry along with the inter-dimer distance are the most prominent design considerations for optimising optical forces in plasmonic dimers. The findings facilitate the realisation of all-optical modulation in a plasmomechanical nanopillar system, which has promising applications in ultra-sensitive nanomechanical sensing and building reconfigurable metamaterials.

Single-molecule optical absorption imaging by nanomechanical photothermal sensing.

Absorption microscopy is a promising alternative to fluorescence microscopy for single-molecule imaging. So far, molecular absorption has been probed optically via the attenuation of a probing laser or via photothermal effects. The sensitivity of optical probing is not only restricted by background scattering but it is fundamentally limited by laser shot noise, which minimizes the achievable single-molecule signal-to-noise ratio. Here, we present nanomechanical photothermal microscopy, which overcomes the scattering and shot-noise limit by detecting the photothermal heating of the sample directly with a temperature-sensitive substrate. We use nanomechanical silicon nitride drums, whose resonant frequency detunes with local heating. Individual Au nanoparticles with diameters from 10 to 200 nm and single molecules (Atto 633) are scanned with a heating laser with a peak irradiance of 354 ± 45 µW/µm2 using 50× long-working-distance objective. With a stress-optimized drum we reach a sensitivity of 16 fW/Hz1/2 at room temperature, resulting in a single-molecule signal-to-noise ratio of >70. The high sensitivity combined with the inherent wavelength independence of the nanomechanical sensor presents a competitive alternative to established tools for the analysis and localization of nonfluorescent single molecules and nanoparticles.

Spectrally broadband electro-optic modulation with nanoelectromechanical string resonators.

In this paper, we present a shutter-based electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibrations modulate the width of the gap between the strings. The gold electrodes on both sides of the gap act as a mobile mirror that modulate the laser light that is focused in the middle of this gap. These electro-optical modulators can achieve an optical modulation depth of almost 100% for a driving voltage lower than 1 mV at a frequency of 314 kHz. The frequency range is determined by the string resonance frequency, which can take values of the order of a few hundred kilohertz to several megahertz. The strings are driven in the strongly nonlinear regime, which allows a frequency tuning of several kilohertz without significant effect on the optical modulation depth.

Nanomechanical Infrared Spectroscopy with Vibrating Filters for Pharmaceutical Analysis.

Standard infrared spectroscopy techniques are well-developed and widely used. However, they typically require milligrams of sample and can involve time-consuming sample preparation. A promising alternative is represented by nanomechanical infrared spectroscopy (NAM-IR) based on the photothermal response of a nanomechanical resonator, which enables the chemical analysis of picograms of analyte directly from a liquid solution in only a few minutes. Herein, we present NAM-IR using perforated membranes (filters). The method was tested with the pharmaceutical compound indomethacin to successfully perform a chemical and morphological analysis on roughly 100 pg of sample. With an absolute estimated sensitivity of 109±15 fg, the presented method is suitable for ultrasensitive vibrational spectroscopy.

Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties.

Micro- and nanomechanical string resonators, which essentially are highly stressed bridges, are of particular interest for micro- and nanomechanical sensing because they exhibit resonant behavior with exceptionally high quality factors. Here, we fabricated and characterized nanomechanical pyrolytic carbon resonators (strings and cantilevers) obtained through pyrolysis of photoresist precursors. The developed fabrication process consists of only three processing steps: photolithography, dry etching and pyrolysis. Two different fabrication strategies with two different photoresists, namely SU-8 2005 (negative) and AZ 5214e (positive), were compared. The resonant behavior of the pyrolytic resonators was characterized at room temperature and in high vacuum using a laser Doppler vibrometer. The experimental data was used to estimate the Young's modulus of pyrolytic carbon and the tensile stress in the string resonators. The Young's moduli were calculated to be 74 ± 8 GPa with SU-8 and 115 ± 8 GPa with AZ 5214e as the precursor. The tensile stress in the string resonators was 33 ± 7 MPa with AZ 5214e as the precursor. The string resonators displayed maximal quality factor values of up to 3000 for 525-µm-long structures.

Low-power photothermal probing of single plasmonic nanostructures with nanomechanical string resonators.

We demonstrate the direct photothermal probing and mapping of single plasmonic nanostructures via the temperature-induced detuning of nanomechanical string resonators. Single Au nanoslits and nanorods are illuminated with a partially polarized focused laser beam (λ = 633 nm) with irradiances in the range of 0.26-38 µW/µm(2). Photothermal heating maps with a resolution of ∼375 nm are obtained by scanning the laser over the nanostructures. Based on the string sensitivities, absorption efficiencies of 2.3 ± 0.3 and 1.1 ± 0.7 are extracted for a single nanoslit (53 nm × 1 µm) and nanorod (75 nm × 185 nm). Our results show that nanomechanical resonators are a unique and robust analysis tool for the low-power investigation of thermoplasmonic effects in plasmonic hot spots.

Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics.

Dielectric membranes with exceptional mechanical and optical properties present one of the most promising platforms in quantum opto-mechanics. The performance of stressed silicon nitride nanomembranes as mechanical resonators notoriously depends on how their frame is clamped to the sample mount, which in practice usually necessitates delicate, and difficult-to-reproduce mounting solutions. Here, we demonstrate that a phononic bandgap shield integrated in the membrane's silicon frame eliminates this dependence, by suppressing dissipation through phonon tunneling. We dry-etch the membrane's frame so that it assumes the form of a cm-sized bridge featuring a 1-dimensional periodic pattern, whose phononic density of states is tailored to exhibit one, or several, full band gaps around the membrane's high-Q modes in the MHz-range. We quantify the effectiveness of this phononic bandgap shield by optical interferometry measuring both the suppressed transmission of vibrations, as well as the influence of frame clamping conditions on the membrane modes. We find suppressions up to 40 dB and, for three different realized phononic structures, consistently observe significant suppression of the dependence of the membrane's modes on sample clamping-if the mode's frequency lies in the bandgap. As a result, we achieve membrane mode quality factors of 5 × 10(6) with samples that are tightly bolted to the 8 K-cold finger of a cryostat. Q × f -products of 6 × 10(12) Hz at 300 K and 14 × 10(12) Hz at 8 K are observed, satisfying one of the main requirements for optical cooling of mechanical vibrations to their quantum ground-state.

Correction to "Photothermal Microscopy and Spectroscopy with Nanomechanical Resonators".

[This corrects the article DOI: 10.1021/acs.jpcc.3c04361.].

Photothermal infrared spectroscopy of airborne samples with mechanical string resonators.

Micromechanical photothermal infrared spectroscopy is a promising technique, where absorption-related heating is detected by frequency detuning of microstring resonators. We present photothermal infrared spectroscopy with mechanical string resonators providing rapid identification of femtogram-scale airborne samples. Airborne sample material is directly collected on the microstring with an efficient nondiffusion limited sampling method based on inertial impaction. Resonance frequency shifts, proportional to the absorbed heat in the microstring, are recorded as monochromatic IR light is scanned over the mid-infrared range. As a proof-of-concept, we sample and analyze polyvinylpyrrolidone (PVP) and the IR spectrum measured by photothermal spectroscopy matches the reference IR spectrum measured by an FTIR spectrometer. We further identify the organic surface coating of airborne TiO2 nanoparticles with a total mass of 4 pg. With an estimated detection limit of 44 fg, the presented sensor demonstrates a new paradigm in ultrasensitive vibrational spectroscopy for identification of airborne species.

Nanomechanical Photothermal Near Infrared Spectromicroscopy of Individual Nanorods.

Understanding light-matter interaction at the nanoscale requires probing the optical properties of matter at the individual nanoabsorber level. To this end, we developed a nanomechanical photothermal sensing platform that can be used as a full spectromicroscopy tool for single molecule and single particle analysis. As a demonstration, the absorption cross-section of individual gold nanorods is resolved from a spectroscopic and polarization standpoint. By exploiting the capabilities of nanomechanical photothermal spectromicroscopy, the longitudinal localized surface plasmon resonance in the NIR range is unraveled and quantitatively characterized. The polarization features of the transversal surface plasmon resonance in the VIS range are also analyzed. The measurements are compared with the finite element method, elucidating the role played by electron surface and bulk scattering in these plasmonic nanostructures, as well as the interaction between the nanoabsorber and the nanoresonator, ultimately resulting in absorption strength modulation. Finally, a comprehensive comparison is conducted, evaluating the signal-to-noise ratio of nanomechanical photothermal spectroscopy against other cutting-edge single molecule and particle spectroscopy techniques. This analysis highlights the remarkable potential of nanomechanical photothermal spectroscopy due to its exceptional sensitivity.

Photothermal Microscopy and Spectroscopy with Nanomechanical Resonators.

In nanomechanical photothermal absorption spectroscopy and microscopy, the measured substance becomes a part of the detection system itself, inducing a nanomechanical resonance frequency shift upon thermal relaxation. Suspended, nanometer-thin ceramic or 2D material resonators are innately highly sensitive thermal detectors of localized heat exchanges from substances on their surface or integrated into the resonator itself. Consequently, the combined nanoresonator-analyte system is a self-measuring spectrometer and microscope responding to a substance's transfer of heat over the entire spectrum for which it absorbs, according to the intensity it experiences. Limited by their own thermostatistical fluctuation phenomena, nanoresonators have demonstrated sufficient sensitivity for measuring trace analyte as well as single particles and molecules with incoherent light or focused and wide-field coherent light. They are versatile in their design, support various sampling methods-potentially including hydrated sample encapsulation-and hyphenation with other spectroscopic methods, and are capable in a wide range of applications including fingerprinting, separation science, and surface sciences.

Nanoelectromechanical Infrared Spectroscopy with In Situ Separation by Thermal Desorption: NEMS-IR-TD.

We present a novel method for the quantitative analysis of mixtures of semivolatile chemical compounds. For the first time, thermal desorption is integrated directly with nanoelectromechanical infrared spectroscopy (NEMS-IR-TD). In this new technique, an analyte mixture is deposited via nebulization on the surface of a NEMS sensor and subsequently desorbed using heating under vacuum. The desorption process is monitored in situ via infrared spectroscopy and thermogravimetric analysis. The resulting spectro-temporal maps allow for selective identification and analysis of the mixture. In addition, the corresponding thermogravimetric data allow for analysis of the desorption dynamics of the mixture components. As a demonstration, caffeine and theobromine were selectively identified and quantified from a mixture with a detection limit of less than 6 pg (about 30 fmol). With its exceptional sensitivity, NEMS-IR-TD allows for the analysis of low abundance and complex analytes with potential applications ranging from environmental sensing to life sciences.

Real-time particle mass spectrometry based on resonant micro strings.

Micro- and nanomechanical resonators are widely being used as mass sensors due to their unprecedented mass sensitivity. We present a simple closed-form expression which allows a fast and quantitative calculation of the position and mass of individual particles placed on a micro or nano string by measuring the resonant frequency shifts of the first two bending modes. The method has been tested by detecting the mass spectrum of micro particles placed on a micro string. This method enables real-time mass spectrometry necessary for applications such as personal monitoring devices for the assessment of the exposure dose of airborne nanoparticles.

Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution.

Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/ for a low laser power of 85 µW and a repeatability of 2 nm after five cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.

Ultrathin 2 nm gold as impedance-matched absorber for infrared light.

Thermal detectors are a cornerstone of infrared and terahertz technology due to their broad spectral range. These detectors call for efficient absorbers with a broad spectral response and minimal thermal mass. A common approach is based on impedance-matching the sheet resistance of a thin metallic film to half the free-space impedance. Thereby, one can achieve a wavelength-independent absorptivity of up to 50%. However, existing absorber films typically require a thickness of the order of tens of nanometers, which can significantly deteriorate the response of a thermal transducer. Here, we present the application of ultrathin gold (2 nm) on top of a surfactant layer of oxidized copper as an effective infrared absorber. An almost wavelength-independent and long-time stable absorptivity of 47(3)%, ranging from 2 µm to 20 µm, can be obtained. The presented absorber allows for a significant improvement of infrared/terahertz technologies in general and thermal detectors in particular.

Thin Film Analysis by Nanomechanical Infrared Spectroscopy.

There is a fundamental need for techniques for thin film characterization. The current options for obtaining infrared (IR) spectra typically suffer from low signal-to-noise-ratios (SNRs) for sample thicknesses confined to a few nanometers. We present nanomechanical infrared spectroscopy (NAM-IR), which enables the measurement of a complete infrared fingerprint of a polyvinylpyrrolidone (PVP) layer as thin as 20 nm with an SNR of 307. Based on the characterization of the given NAM-IR setup, a minimum film thickness of only 160 pm of PVP can be analyzed with an SNR of 2. Compared to a conventional attenuated total reflectance Fourier transform infrared spectroscopy (ATR-FTIR) system, NAM-IR yields an SNR that is 43 times larger for a 20 nm-thick PVP layer and requires only a fraction of the acquisition time. These results pave the way for NAM-IR as a highly sensitive, fast, and practical tool for IR analysis of polymer thin films.

Immobilisation of DNA to polymerised SU-8 photoresist.

SU-8 is an epoxy-based photosensitive resist, which is currently used for a large variety of MEMS and lab-on-a-chip applications. Here, we demonstrate a one-step process to functionalize SU-8 with DNA probes. The immobilisation procedure relies on direct coupling of DNA to SU-8 and resulted in surfaces with functional capture probe densities of approximately 10 fmol/mm(2) as determined by hybridisation assays with fluorescent labelled target molecules. A comparable density of functional capture probes was measured on commercial aldehyde coated glass. DNA probes did not decrease in hybridisation performance after 10 min incubation in water at 98 degrees C prior to hybridisation, indicating a covalent bond between DNA and SU-8. Finally, DNA microarrays of high quality were obtained on SU-8 by contact printing of probe solution directly on SU-8 demonstrating a simple method for the implementation of microarrays in microsystems.

Micromechanical String Resonators: Analytical Tool for Thermal Characterization of Polymers.

Resonant microstrings show promise as a new analytical tool for thermal characterization of polymers with only few nanograms of sample. The detection of the glass transition temperature (Tg) of an amorphous poly(d,l-lactide) (PDLLA) and a semicrystalline poly(l-lactide) (PLLA) is investigated. The polymers are spray coated on one side of the resonating microstrings. The resonance frequency and quality factor (Q) are measured simultaneously as a function of temperature. Change in the resonance frequency reflects a change in static tensile stress, which yields information about the Young's modulus of the polymer, and a change in Q reflects the change in damping of the polymer-coated string. The frequency response of the microstring is validated with an analytical model. From the frequency independent tensile stress change, static Tg values of 40.6 and 57.6 °C were measured for PDLLA and PLLA, respectively. The frequency-dependent damping from Q indicates higher Tg values of 62.6 and 88.8 °C for PDLLA and PLLA, respectively, at ∼105 Hz. Resonant microstrings facilitate thermal analysis of nanogram polymer samples measuring the static and a dynamic glass transition temperature simultaneously.

Nanomechanical identification of liquid reagents in a microfluidic channel.

Integration of promising technologies that can enhance sensitivity, selectivity, and throughput into micro total analysis systems (µTAS) are important in making them useful in precise screening of reaction byproducts in analytical chemistry, cellular biology and pharmaceutical industries. But unfortunately so far a method to precisely determine molecular signatures of reagents is missing in µTAS. We have developed a technique whereby molecular signatures of 50 pL of liquid reagents confined within a bimetallic microchannel cantilever can be obtained. This is achieved using wavelength dependent mechanical bending of the cantilever under infrared (IR) radiation. This technique also allows simultaneous physical characterization of the liquid reagent using variations in resonance frequency. It is useful in lab-on-a-chip devices and has a myriad of applications in drug screening, bioreactor monitoring, and petrochemical analysis.