Detalhe da pesquisa
1.
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process.
Sensors (Basel)
; 23(5)2023 Feb 24.
Artigo
em Inglês
| MEDLINE | ID: mdl-36904724
2.
Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics.
Sensors (Basel)
; 22(15)2022 Jul 22.
Artigo
em Inglês
| MEDLINE | ID: mdl-35897990
3.
Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation.
Sensors (Basel)
; 22(15)2022 Aug 05.
Artigo
em Inglês
| MEDLINE | ID: mdl-35957427
4.
Investigation into SiO2 Etching Characteristics Using Fluorocarbon Capacitively Coupled Plasmas: Etching with Radical/Ion Flux-Controlled.
Nanomaterials (Basel)
; 12(24)2022 Dec 15.
Artigo
em Inglês
| MEDLINE | ID: mdl-36558310
5.
Influence of Additive N2 on O2 Plasma Ashing Process in Inductively Coupled Plasma.
Nanomaterials (Basel)
; 12(21)2022 Oct 27.
Artigo
em Inglês
| MEDLINE | ID: mdl-36364574
6.
Observation of prior light emission before arcing development in a low-temperature plasma with multiple snapshot analysis.
Sci Rep
; 12(1): 20976, 2022 12 05.
Artigo
em Inglês
| MEDLINE | ID: mdl-36470956