Information transfer in a TEM corrected for spherical and chromatic aberration.

For the transmission electron aberration-corrected microscope (TEAM) initiative of five U.S. Department of Energy laboratories in the United States, a correction system for the simultaneous compensation of the primary axial aberrations, the spherical aberration Cs, and the chromatic aberration Cc has been developed and successfully installed. The performance of the resulting Cc /Cs-corrected TEAM instrument has been investigated thoroughly. A significant improvement of the linear contrast transfer can be demonstrated. The information about the instrument one obtains using Young's fringe method is compared for uncorrected, Cs-corrected, and Cc /Cs-corrected instruments. The experimental results agree well with simulations. The conclusions might be useful to others in understanding the process of image formation in a Cc /Cs-corrected transmission electron microscope.

On the residual six-fold astigmatism in DCOR/ASCOR.

After the introduction of the hexapole Cs-correctors for scanning transmission electron microscopes (STEM), the next big step forward was the strong reduction of the six-fold astigmatism A5 by means of an advanced hexapole design (DCOR/ASCOR). As a result all axial aberrations up to fifth order are sufficiently small to allow for large semi-aperture angles beyond 40 mrad for electron energies in the range of 30 to 300 kV without deterioration of the STEM resolution. In this paper we derive simple expressions for the optimum hexapole strength for minimum A5 and the size of the residual A5. Both quantities are intrinsic properties of the hexapoles and the transfer lens doublet in between. The optimum hexapole strength scales with the inverse of the electron wavelength, while the residual A5 does not depend on the electron energy directly, but on the spherical aberration Cs of the pole piece. With the given properties of the DCOR/ASCOR and typical values of Cs in the range of 0.5 to 2.7 mm, at all acceleration voltages A5 remains in the range from 0.03 to 0.4 mm, the latter even for a large-gap pole piece.

Prerequisites for a Cc/Cs-corrected ultrahigh-resolution TEM.

After the introduction of a corrector to compensate for the spherical aberration of a TEM and the acceptance of this new instrumentation for high-resolution CTEM (conventional transmission electron microscope) and STEM (scanning transmission electron microscope) by the electron microscopy community, a demand for even higher resolution far below 1A has emerged. As a consequence several projects around the world have been launched to make these new instruments available and to further push the resolution limits down toward fractions of 1A. For this purpose the so-called TEAM (transmission electron aberration-corrected microscope) has been initiated and is currently under development. With the present paper we give a detailed assessment of the stability required for the base instrument and the electric stability, the manufacturing precision, and feasible semi-automatic alignment procedures for a novel C(c)/C(s)-corrector in order to achieve aberration-free imaging with an information limit of 0.5A at an acceleration voltage of 200 kV according to the goals for the first TEAM instrument. This new aberration corrector, a so-called Achroplanat, in combination with a very stable high-resolution TEM leads to an imaging device with unprecedented resolving power and imaging properties.

Current and future aberration correctors for the improvement of resolution in electron microscopy.

The achievable resolution of a modern transmission electron microscope (TEM) is mainly limited by the inherent aberrations of the objective lens. Hence, one major goal over the past decade has been the development of aberration correctors to compensate the spherical aberration. Such a correction system is now available and it is possible to improve the resolution with this corrector. When high resolution in a TEM is required, one important parameter, the field of view, also has to be considered. In addition, especially for the large cameras now available, the compensation of off-axial aberrations is also an important task. A correction system to compensate the spherical aberration and the off-axial coma is under development. The next step to follow towards ultra-high resolution will be a correction system to compensate the chromatic aberration. With such a correction system, a new area will be opened for applications for which the chromatic aberration defines the achievable resolution, even if the spherical aberration is corrected. This is the case, for example, for low-voltage electron microscopy (EM) for the investigation of beam-sensitive materials, for dynamic EM or for in-situ EM.

Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-A information limit.

The ability of electron microscopes to analyze all the atoms in individual nanostructures is limited by lens aberrations. However, recent advances in aberration-correcting electron optics have led to greatly enhanced instrument performance and new techniques of electron microscopy. The development of an ultrastable electron microscope with aberration-correcting optics and a monochromated high-brightness source has significantly improved instrument resolution and contrast. In the present work, we report information transfer beyond 50 pm and show images of single gold atoms with a signal-to-noise ratio as large as 10. The instrument's new capabilities were exploited to detect a buried Sigma3 {112} grain boundary and observe the dynamic arrangements of single atoms and atom pairs with sub-angstrom resolution. These results mark an important step toward meeting the challenge of determining the three-dimensional atomic-scale structure of nanomaterials.

Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM

The development of correctors for electron optical systems has already brought the improvement of resolution for a low-voltage scanning electron microscope and a commercially available transmission electron microscope and is anticipated in the near future for a dedicated scanning transmission electron microscope (STEM). The resolution attainable especially of a probe-forming system at 200 kV cannot only be estimated from calculations ignoring all non-rotationally symmetric axial aberrations in an electron optical system. For a certain resolution, one would like to attain, the influence of the deviations from the ideal, aberration-free system has to be investigated. Therefore, in the following we have carried out the evaluation of the required accuracy for the compensation of the various residual aberrations in order to achieve a resolution in the sub-Angstrom regime with a probe-forming system.