Accelerated Bottom-Up Gold Filling of Metallized Trenches.

Josell, D; Williams, M E; Ambrozik, S; Zhang, C; Moffat, T P

Josell, D; Williams, M E; Ambrozik, S; Zhang, C; Moffat, T P.

Afiliação

Josell D; Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Williams ME; Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Ambrozik S; Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Zhang C; Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Moffat TP; Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.

J Electrochem Soc ; 166(12)2019.

Article em En | MEDLINE | ID: mdl-33041356

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article

Texto completo

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article