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B-Doped δ-Layers and Nanowires from Area-Selective Deposition of BCl3 on Si(100).
Dwyer, Kevin J; Baek, Sungha; Farzaneh, Azadeh; Dreyer, Michael; Williams, James R; Butera, Robert E.
Afiliação
  • Dwyer KJ; Department of Physics, University of Maryland, College Park, Maryland 20742, United States.
  • Baek S; Department of Physics, University of Maryland, College Park, Maryland 20742, United States.
  • Farzaneh A; Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States.
  • Dreyer M; Department of Physics, University of Maryland, College Park, Maryland 20742, United States.
  • Williams JR; Department of Physics, University of Maryland, College Park, Maryland 20742, United States.
  • Butera RE; Laboratory for Physical Sciences, 8050 Greenmead Drive, College Park, Maryland 20740, United States.
ACS Appl Mater Interfaces ; 13(34): 41275-41286, 2021 Sep 01.
Article em En | MEDLINE | ID: mdl-34405671
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2021 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2021 Tipo de documento: Article