Your browser doesn't support javascript.
loading
Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation.
Yamashita, Yuya; Doi, Kenta; Kiyota, Tetsuji; Asakawa, Keiichiro; Hosoya, Sotaro; Kikuchi, Wataru; Nezu, Atsushi; Akatsuka, Hiroshi.
Afiliação
  • Yamashita Y; Department of Electrical and Electronic Engineering, School of Engineering, Tokyo Institute of Technology, 2-12-1-N1-10 Ookayama, Meguro-ku, Tokyo 152-8550, Japan.
  • Doi K; Institute of Advanced Technology, ULVAC, Inc., 1220-1 Suyama, Susono-shi, Shizuoka 410-1231, Japan.
  • Kiyota T; Strategic Planning Department, ULVAC, Inc., 2500 Hagisono, Chigasaki-shi, Kanagawa 253-8543, Japan.
  • Asakawa K; Institute of Advanced Technology, ULVAC, Inc., 1220-1 Suyama, Susono-shi, Shizuoka 410-1231, Japan.
  • Hosoya S; Department of Electrical and Electronic Engineering, School of Engineering, Tokyo Institute of Technology, 2-12-1-N1-10 Ookayama, Meguro-ku, Tokyo 152-8550, Japan.
  • Kikuchi W; Department of Electrical and Electronic Engineering, School of Engineering, Tokyo Institute of Technology, 2-12-1-N1-10 Ookayama, Meguro-ku, Tokyo 152-8550, Japan.
  • Nezu A; Safety and Radiation Management Division, Open Facility Center, Tokyo Institute of Technology, 2-12-1-N1-10 Ookayama, Meguro-ku, Tokyo 152-8550, Japan.
  • Akatsuka H; Laboratory for Zero-Carbon Energy, Institute of Innovative Research, Tokyo Institute of Technology, 2-12-1-N1-10 Ookayama, Meguro-ku, Tokyo 152-8550, Japan.
Rev Sci Instrum ; 94(8)2023 Aug 01.
Article em En | MEDLINE | ID: mdl-38065137
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article