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An FMCW LiDAR (frequency-modulated continuous-wave light detection and ranging) is a sensor that can measure distance using optical interference frequency (fb). This sensor has recently attracted interest because it is robust to harsh environmental conditions and sunlight due to the wave properties of the laser. Theoretically, when the frequency of the reference beam is linearly modulated, a constant fb is obtained with respect to the distance. However, when the frequency of the reference beam fails to be linearly modulated, the distance measurement is not accurate. In this work, linear frequency modulation control using frequency detection is proposed to improve the distance accuracy. The FVC (frequency to voltage converting) method is used to measure fb for high-speed frequency modulation control. The experimental results show that linear frequency modulation control using an FVC improves FMCW LiDAR performance in terms of control speed and frequency accuracy.
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The optical laser displacement sensor is widely used for noncontact measurement of the three-dimensional (3D) shape profile of the object surface. When the surface of an object has a slope variation, the sensor gain is proportionally varied according to that of the object surface. In order to solve the sensor gain variation problem, the constant gap control method is applied to adjust the gap to the nominal distance. Control error compensation is also proposed to cope with the situation even when the gap is not perfectly controlled to the nominal distance using an additional sensor attached to the actuator. 3D shape measurement applying the proposed constant gap control method shows better performances rather than the constant sensor height method.
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The voice coil motor nanoscanner has the advantages of large working range, easy control, and low cost compared to the conventional lead zirconate titanate driven nanoscanner. However, it has a small damping problem which causes mechanical vibration. The mechanical vibration reduces the accuracy as well as servobandwidth, which deteoriates the atomic force microscopy (AFM) image of the samples. In order to solve the vibration problem, the loop shaping technique [for vertical (z)] and input prefilter [for lateral (xy)] are applied. Experimental results of the proposed techniques are presented for vertical (z) and lateral (xy) scanner. Finally, the AFM images are provided to investigate its effect.
Asunto(s)
Magnetismo/instrumentación , Micromanipulación/instrumentación , Microscopía de Fuerza Atómica/instrumentación , Nanotecnología/instrumentación , Transductores , Diseño de Equipo , Análisis de Falla de Equipo , Micromanipulación/métodos , Microscopía de Fuerza Atómica/métodos , Nanotecnología/métodos , Reproducibilidad de los Resultados , Sensibilidad y Especificidad , VibraciónRESUMEN
The homodyne interferometer has the advantages of simple optical configuration and low cost. However, it requires a caution in using an electronic filter such as high pass filter (HPF) to get rid of low frequency electronic noises and the dc offset associated with the optical intensity in the photodiode electronic circuitry. When the vibration amplitude is smaller than at least 12 of the wavelength of He-Ne laser, a problem of incorrect velocity or distorted velocity measurement can be caused since a dc value of the interference signal is eliminated by using the HPF. To solve this problem of using the HPF in the homodyne interferometer, a synthetic interferometer using a mechanical modulation method is proposed in this work by exciting a reference mirror with the displacement larger than 12 of the wavelength. In this work, the analytical work is presented to show how the synthetic interferometer solves the problem of incorrect velocity measurement by using the Fourier-Bessel function description of the interference signals. Simulation and experimental works are also presented to validate the synthetic heterodyne interferometer proposed in this work.
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For vibration testing, discrete types of scanning laser Doppler vibrometer (SLDV) have been developed and have proven to be very useful. For complex structures, however, SLDV takes considerable time to scan the surface of structures and require large amounts of data storage. To overcome these problems, a continuous scan was introduced as an alternative. In this continuous method, the Chebyshev demodulation (or polynomial) technique and the Hilbert transform approach have been used for mode shape reconstruction with harmonic excitation. As an alternative, in this paper, the Hilbert-Huang transform approach is applied to impact excitation cases in terms of a numerical approach, where the vibration of the tested structure is modeled using impulse response functions. In order to verify this technique, a clamped-clamped beam was chosen as the test rig in the numerical simulation and real experiment. This paper shows that with additional innovative steps of using ideal bandpass filters and nodal point determination in the postprocessing, the Hilbert-Huang transformation can be used to create a better mode shape reconstruction even in the impact excitation case.
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We develop a four-mount active vibration isolation system (AVIS) using voice coil actuators. The flexible body modes in the upper plate of the AVIS can cause an instability problem due to control signal whose frequency is close to the resonant frequency of the flexible modes. The loop shaping technique is applied to reduce the amplitude of the control signal. We investigate the performances of the active vibration isolation system proposed in the word in the time domain and frequency domain by comparing to the passive isolation system.
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Time-of-flight-based two-dimensional and three-dimensional light detection and ranging (LiDAR) applications have recently been implemented in several industries because of their high-precision measuring capabilities over long distances in outdoor environments. Avalanche photodetectors (APDs) are commonly used for LiDARs because of their high internal gain that significantly amplifies a measured signal. However, the magnitude of the measured signal changes significantly with temperature variations, owing to the temperature dependent characteristics of the APD. In this study, a temperature compensation method, in which a bias voltage of the APD is adjusted for temperature changes using signal-to-noise ratio feedback control, is proposed to solve the problem. This method has the advantage of a simple hardware configuration, without using a conventionally considered cooler.
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The topology image is constructed from the 2D matrix (XY directions) of heights Z captured from the force-feedback loop controller. For small height variations, nonlinear effects such as hysteresis or creep of the PZT-driven Z nano scanner can be neglected and its calibration is quite straightforward. For large height variations, the linear approximation of the PZT-driven Z nano scanner fail and nonlinear behaviors must be considered because this would cause inaccuracies in the measurement image. In order to avoid such inaccuracies, an additional strain gauge sensor is used to directly measure displacement of the PZT-driven Z nano scanner. However, this approach also has a disadvantage in its relatively low precision. In order to obtain high precision data with good linearity, we propose a method of overcoming the low precision problem of the strain gauge while its feature of good linearity is maintained. We expect that the topology image obtained from the strain gauge sensor showing significant noise at high frequencies. On the other hand, the topology image obtained from the controller output showing low noise at high frequencies. If the low and high frequency signals are separable from both topology images, the image can be constructed so that it is represented with high accuracy and low noise. In order to separate the low frequencies from high frequencies, a 2D Haar wavelet transform is used. Our proposed method use the 2D wavelet transform for obtaining good linearity from strain gauge sensor and good precision from controller output. The advantages of the proposed method are experimentally validated by using topology images.
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An optical component called a Dove prism is used to rotate the laser beam of a laser-scanning vibrometer (LSV). This is called a derotator and is used for measuring the vibration of rotating objects. The main advantage of a derotator is that it works independently from an LSV. However, this device requires very specific alignment, in which the axis of the Dove prism must coincide with the rotational axis of the object. If the derotator is misaligned with the rotating object, the results of the vibration measurement are imprecise, owing to the alteration of the laser beam on the surface of the rotating object. In this study, a method is proposed for aligning a derotator with a rotating object through an image-processing algorithm that obtains the trajectory of a landmark attached to the object. After the trajectory of the landmark is mathematically modeled, the amount of derotator misalignment with respect to the object is calculated. The accuracy of the proposed method for aligning the derotator with the rotating object is experimentally tested.
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To utilize a time-of-flight-based laser scanner as a distance measurement sensor, the measurable distance and accuracy are the most important performance parameters to consider. For these purposes, the optical system and electronic signal processing of the laser scanner should be optimally designed in order to reduce a distance error caused by the optical crosstalk and wide dynamic range input. Optical system design for removing optical crosstalk problem is proposed in this work. Intensity control is also considered to solve the problem of a phase-shift variation in the signal processing circuit caused by object reflectivity. The experimental results for optical system and signal processing design are performed using 3D measurements.
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Generally, it is time consuming to experimentally identify the operating deflection shape or mode shape of a structure. To overcome this problem, the Hilbert Huang transform (HHT) technique has been recently proposed. This technique is used to extract the mode shape from measurements that continuously measure the vibration of a region of interest within a structure using a non-contact laser sensor. In previous research regarding the HHT, two technical processes were needed to obtain the mode shape for each mode. The purpose of this study is to improve and complement our previous research, and for this purpose, a modal analysis approach is adapted without using the two technical processes to obtain an accurate un-damped impulse response of each mode for continuous scanning measurements. In addition, frequency response functions for each type of beam are derived, making it possible to make continuously scanned measurements along a straight profile. In this paper, the technical limitations and drawbacks of the damping compensation technique used in previous research are identified. In addition, the separation of resonant frequency (the Doppler effect) that occurs in continuous scanning measurements and the separation of damping phenomenon are also observed. The proposed method is quantitatively verified by comparing it with the results obtained from a conventional approach to estimate the mode shape with an impulse response.
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In the continuous-wave time-of-flight method, the distance traveled by light can be obtained by using the phase difference between the reference signal and the measured signal. However, when the phase difference exceeds 2π, the distance cannot be differentiated because the distance variation repeats every 2π period. In this paper, we propose a method in which low- and high-frequency signals are separately applied to two laser diodes simultaneously, and processed using two different signal processing circuits to solve the 2π ambiguity problem and achieve a high distance resolution for a longer distance measurement.
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In the phase-shift measurement method, the distance traveled by light can be obtained on the basis of the phase difference between the reference signal and the measured signal. When a different colored object is measured, the intensity of the measured signal varies greatly, even at the same distance, which causes a different phase delay owing to the wide dynamic range input into the signal processing circuit. In this study, an intensity control method is proposed to solve this phase delay problem.
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Since an atomic force microscope is used to measure sub-nanometer level precision, it is sensitive to external vibration. If the vibration can be measured by using an additional sensor, we can obtain the vibration-free signal by subtracting the vibration signal from the signal containing the vibration. To achieve a highly effective vibration rejection ratio, it is important to decide where to locate the additional sensor. This is because the vibration measured at the sensing position should have the same phase as that of the vibration in the signal. Vibration reduction control using this electrical sensing method is verified through time domain analysis and topology images of a standard grid sample.
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In the phase-shift measurement method, the distance light travels can be obtained via the phase difference between the reference and the measured signals. In this paper, a multiple-step phase demodulation method with time counting is proposed for measuring the phase difference, with resulting robustness against electric noise. When the phase differences are close to 2nπ (n = 0, 1, 2, ...]), 2π ambiguity problems commonly occur; here, a time-counting method using a 180°-shifted reference signal is proposed in order to resolve this problem.
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Vibration is a key factor to be considered when designing the mechanical components of a high precision and high speed atomic force microscope (AFM). It is required to design the mechanical components so that they have resonant frequencies higher than the external and internal vibration frequencies. In this work, the mechanical vibration in a conventional AFM system is analyzed by considering its mechanical components, and a vibration reduction is then achieved by reconfiguring the mechanical components. To analyze the mechanical vibration, a schematic of the lumped model of the AFM system is derived and the vibrational influences of the AFM components are experimentally examined. Based on this vibration analysis, a reconfigured AFM system is proposed and its effects are compared to a conventional system through a series of simulations and experiments.
Asunto(s)
Diseño de Equipo/métodos , Fenómenos Mecánicos , Microscopía de Fuerza Atómica/instrumentación , VibraciónRESUMEN
A six-axis active vibration isolation system (AVIS) is designed by using the direct driven guide and ball contact mechanisms in order to have no cross-coupling between actuators. The point contact configuration gives an advantage of having an easy assembly of eight voice coil actuators to an upper and a base plate. A voice coil actuator is used since it can provide a large displacement and sufficient bandwidth required for vibration control. The AVIS is controlled considering the effect of flexible vibration mode in the upper plate and velocity sensor dynamics. A loop shaping technique and phase margin condition are applied to design a vibration controller. The performances of the AVIS are investigated in the frequency domain and finally validated by comparing with the passive isolation system. The scanning profiles of the specimen are compared together by using the atomic force microscope. The robustness of the AVIS is verified by showing the impulse response.
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A six-axis active vibration isolation system (AVIS) is developed using voice coil actuators. Point contact configuration is employed to have an easy assembly of eight voice coil actuators to an upper and a base plates. The velocity sensor, using an electromagnetic principle that is commonly used in the vibration control, is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. The performances of the AVIS are investigated in the frequency domain and finally validated by comparing with the passive isolation system using the atomic force microscope images.
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To have higher resolution of distance in the laser scanner using the phase demodulation method, signal should be modulated with a high frequency. In the signal processing of modulation and demodulation, it is inevitable to amplify the signals. However, it is not easy to amplify the high frequency since the amplifying gain is restricted by the frequency bandwidth. It is advantageous to demodulate using an intermediate frequency in which high gain amplification as well as less contaminated signal is obtained. Analytical and experimental results are presented to show how the intermediate frequency demodulation method works and how good performance is obtained in the time and frequency domains.