A Multi-Functional Microelectrode Array Featuring 59760 Electrodes, 2048 Electrophysiology Channels, Stimulation, Impedance Measurement and Neurotransmitter Detection Channels.

Biological cells are characterized by highly complex phenomena and processes that are, to a great extent, interdependent. To gain detailed insights, devices designed to study cellular phenomena need to enable tracking and manipulation of multiple cell parameters in parallel; they have to provide high signal quality and high spatiotemporal resolution. To this end, we have developed a CMOS-based microelectrode array system that integrates six measurement and stimulation functions, the largest number to date. Moreover, the system features the largest active electrode array area to date (4.48×2.43 mm2) to accommodate 59,760 electrodes, while its power consumption, noise characteristics, and spatial resolution (13.5 µm electrode pitch) are comparable to the best state-of-the-art devices. The system includes: 2,048 action-potential (AP, bandwidth: 300 Hz to 10 kHz) recording units, 32 local-field-potential (LFP, bandwidth: 1 Hz to 300 Hz) recording units, 32 current recording units, 32 impedance measurement units, and 28 neurotransmitter detection units, in addition to the 16 dual-mode voltage-only or current/voltage-controlled stimulation units. The electrode array architecture is based on a switch matrix, which allows for connecting any measurement/stimulation unit to any electrode in the array and for performing different measurement/stimulation functions in parallel.

Impedance Imaging of Cells and Tissues: Design and Applications.

Due to their label-free and noninvasive nature, impedance measurements have attracted increasing interest in biological research. Advances in microfabrication and integrated-circuit technology have opened a route to using large-scale microelectrode arrays for real-time, high-spatiotemporal-resolution impedance measurements of biological samples. In this review, we discuss different methods and applications of measuring impedance for cell and tissue analysis with a focus on impedance imaging with microelectrode arrays in in vitro applications. We first introduce how electrode configurations and the frequency range of the impedance analysis determine the information that can be extracted. We then delve into relevant circuit topologies that can be used to implement impedance measurements and their characteristic features, such as resolution and data-acquisition time. Afterwards, we detail design considerations for the implementation of new impedance-imaging devices. We conclude by discussing future fields of application of impedance imaging in biomedical research, in particular applications where optical imaging is not possible, such as monitoring of ex vivo tissue slices or microelectrode-based brain implants.

Stimulation and Artifact-Suppression Techniques for In Vitro High-Density Microelectrode Array Systems.

We present novel voltage stimulation buffers with controlled output current, along with recording circuits featuring adjustable high-pass cut-off filtering to perform efficient stimulation while actively suppressing stimulation artifacts in high-density microelectrode arrays. Owing to the dense packing and close proximity of the electrodes in such systems, a stimulation through one electrode can cause large electrical artifacts on neighboring electrodes that easily saturate the corresponding recording amplifiers. To suppress such artifacts, the high-pass corner frequencies of all available 2048 recording channels can be raised from several Hz to several kHz by applying a "soft-reset" or pole-shifting technique. With the implemented artifact suppression technique, the saturation time of the recording circuits, connected to electrodes in immediate vicinity to the stimulation site, could be reduced to less than 150 µs. For the stimulation buffer, we developed a circuit, which can operate in two modes: either control of only the stimulation voltage or control of current and voltage during stimulation. The voltage-only controlled mode employs a local common-mode feedback operational transconductance amplifier with a near rail-to-rail input/output range, suitable for driving high-capacitive loads. The current/voltage controlled mode is based on a positive current conveyor generating adjustable output currents, whereas its upper and lower output voltages are limited by two feedback loops. The current/voltage controlled circuit can generate stimulation pulses up to 30 µA with less than ±0.1% linearity error in the low-current mode and up to 300 µA with less than ±0.2% linearity error in the high-current mode.

Impedance Spectroscopy and Electrophysiological Imaging of Cells With a High-Density CMOS Microelectrode Array System.

A monolithic multi-functional CMOS microelectrode array system was developed that enables label-free electrochemical impedance spectroscopy of cells in vitro at high spatiotemporal resolution. The electrode array includes 59,760 platinum microelectrodes, densely packed within a 4.5 mm × 2.5 mm sensing region at a pitch of 13.5 µm. A total of 32 on-chip lock-in amplifiers can be used to measure the impedance of any arbitrarily chosen subset of electrodes in the array. A sinusoidal voltage, generated by an on-chip waveform generator with a frequency range from 1 Hz to 1 MHz, was applied to the reference electrode. The sensing currents through the selected recording electrodes were amplified, demodulated, filtered, and digitized to obtain the magnitude and phase information of the respective impedances. The circuitry consumes only 412 µW at 3.3 V supply voltage and occupies only 0.1 mm2, for each channel. The system also included 2048 extracellular action-potential recording channels on the same chip. Proof of concept measurements of electrical impedance imaging and electrophysiology recording of cardiac cells and brain slices are demonstrated in this paper. Optical and impedance images showed a strong correlation.

High-Density Mapping of Brain Slices using a Large Multi-Functional High-Density CMOS Microelectrode Array System.

We present a CMOS-based high-density microelectrode array (HD-MEA) system that enables high-density mapping of brain slices in-vitro with multiple readout modalities. The 4.48×2.43 mm2 array consists of 59,760 micro-electrodes at 13.5 µm pitch (5487 electrodes/mm2). The overall system features 2048 action-potential, 32 local-field-potential and 32 current recording channels, 32 impedance-measurement and 28 neurotransmitter-detection channels and 16 voltage/current stimulation channels. The system enables real-time and label-free monitoring of position, size, morphology and electrical activity of brain slices.

2048 Action Potential Recording Channels with 2.4 µVrms Noise and Stimulation Artifact Suppression.

Here, we present 2048 low-noise, low-offset, and low-power action-potential recording channels, integrated in a multi-functional high-density microelectrode array. A resistively loaded open-loop topology has been adapted for the first-stage amplifier to achieve 2.4 µVrms noise levels at low power consumption. Two novel pseudo-resistor structures have been used to realize very low HPF corner frequencies with small variations across all channels. The adjustability of pseudo resistors has been exploited to realize a "soft" reset technique that suppresses stimulation artifacts so that the amplifiers can recover from saturation within 200 µs. The chips were fabricated in a 0.18 µm 6M1P CMOS process, and measurement results are presented to show the performance of the proposed circuit structures and techniques.