An in-plane nano-mechanics approach to achieve reversible resonance control of photonic crystal nanocavities.

Control of photonic crystal resonances in conjunction with large spectral shifting is critical in achieving reconfigurable photonic crystal devices. We propose a simple approach to achieve nano-mechanical control of photonic crystal resonances within a compact integrated on-chip approach. Three different tip designs utilizing an in-plane nano-mechanical tuning approach are shown to achieve reversible and low-loss resonance control on a one-dimensional photonic crystal nanocavity. The proposed nano-mechanical approach driven by a sub-micron micro-electromechanical system integrated on low loss suspended feeding nanowire waveguide, achieved relatively large resonance spectral shifts of up to 18 nm at a driving voltage of 25 V. Such designs may potentially be used as tunable optical filters or switches.

Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities.

We present dynamic tuning of optical resonance using microelectromechanical systems (MEMS)-driven coupled photonic crystal (PhC) nanocavities. The device consists of an air-suspended one-dimensional PhC nanocavity coupled to input and output waveguides and a perturbing nanocavity attached to a submicrometer MEMS comb drive. Resonance tuning is achieved through varying the gap between the two coupled cavities. We demonstrate experimentally that resonance can be tuned up to 8nm with no significant deterioration in the Q factor. The proposed mechanism potentially enables a new platform of on-chip photonic devices that can achieve a large tuning range with low power and small footprint and may find useful applications in tunable optical/photonic devices.