Integrated array of 2-µm antimonide-based single-photon counting devices.

A 32x32 Sb-based Geiger-mode (GM) avalanche photodiode array, operating at 2 µm with three-dimensional imaging capability, is presented. The array is interfaced with a ROIC (readout integrated circuit) in which each pixel can detect a photon and record the arrival time. The hybridized unit for the 1000-element focal plane array, when operated at 77K with 1 V overbias range, shows an average dark count rate of 1.5 kHz. Three-dimensional range images of objects were acquired.