A Resonant Graphene NEMS Vibrometer.

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.

Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers.

Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitations regarding mechanical robustness, manufacturing yield, and the maximum measurement current that can be applied across the ribbons. Here, we report on suspended graphene membranes that are fully clamped at their circumference and have attached silicon proof masses. We demonstrate their utility as piezoresistive NEMS accelerometers, and they are found to be more robust, have longer life span and higher manufacturing yield, can withstand higher measurement currents, and are able to suspend larger silicon proof masses, as compared to the previous graphene ribbon devices. These findings are an important step toward bringing ultraminiaturized piezoresistive graphene NEMS closer toward deployment in emerging applications such as in wearable electronics, biomedical implants, and internet of things (IoT) devices.

Modeling and Simulation of Graphene-Based Transducers in NEMS Accelerometers.

The mechanical characteristics of graphene ribbons with an attached proof mass that can be used as NEMS transducers have been minimally studied, which hinders the development of graphene-based NEMS devices. Here, we simulated the mechanical characteristics of graphene ribbons with an attached proof mass using the finite element method. We studied the impact of force, residual stress, and geometrical size on displacement, strain, resonant frequency, and fracture strength of graphene ribbons with an attached proof mass. The results show that the increase of width and thickness of graphene ribbons would result in a decrease of the displacement and strain but also an increase of resonant frequency. The increase of the length of graphene ribbons has an insignificant impact on the strain, but it could increase the displacement and decrease the resonant frequency. The increase of residual stress in the graphene ribbons decreases its strain and displacement. The estimated fracture strength of graphene shows limited dependence on its thickness, with an estimated value of around 148 GPa. These findings contribute to the understanding of the mechanical characteristics of graphene ribbons with an attached proof mass and lay the solid foundation for the design and manufacture of high-performance graphene-based NEMS devices such as accelerometers.

A fast response and highly sensitive flexible humidity sensor based on a nanocomposite film of MoS2 and graphene oxide.

Graphene oxide (GO)-based humidity sensors are attracting widespread attention due to their high responsivity and low cost. However, GO-based humidity sensors generally suffer from slow response and recovery as well as poor stability. Here, we report a flexible resistive humidity sensor based on a MoS2/GO composite film that was fabricated by mixing different volumes of MoS2 and GO dispersions with adjustable volume ratios. The MoS2/GO composite film has been used as a sensing layer on screen-printed interdigital electrodes. The results show that the best device performance was achieved at a dispersion volume of 0.05 mL with a MoS2/GO volume ratio of 5 : 1, featuring a high responsivity (∼98%), a fast response/recovery time (1.3/12.1 s), excellent stability and low cost. Furthermore, the humidity sensor exhibits good linearity over a wide humidity range (33%RH-98%RH) at room temperature (25 °C) and can be fabricated easily and feasibly. The application of the humidity sensors we prepared in human respiration detection and human fingertip proximity detection has been demonstrated. These findings indicate the great potential of the MoS2/GO composite in developing next generation high-performance humidity sensors.

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors.

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

Rapid and Large-Area Visualization of Grain Boundaries in MoS2 on SiO2 Using Vapor Hydrofluoric Acid.

Grain boundaries in two-dimensional (2D) material layers have an impact on their electrical, optoelectronic, and mechanical properties. Therefore, the availability of simple large-area characterization approaches that can directly visualize grains and grain boundaries in 2D materials such as molybdenum disulfide (MoS2) is critical. Previous approaches for visualizing grains and grain boundaries in MoS2 are typically based on atomic resolution microscopy or optical imaging techniques (i.e., Raman spectroscopy or photoluminescence), which are complex or limited to the characterization of small, micrometer-sized areas. Here, we show a simple approach for an efficient large-area visualization of the grain boundaries in continuous chemical vapor-deposited films and domains of MoS2 that are grown on a silicon dioxide (SiO2) substrate. In our approach, the MoS2 layer on a SiO2/Si substrate is exposed to vapor hydrofluoric acid (VHF), resulting in the differential etching of SiO2 at the MoS2 grain boundaries and SiO2 underneath the MoS2 grains as a result of VHF diffusing through the defects in the MoS2 layer at the grain boundaries. The location of the grain boundaries can be seen by the resulting SiO2 pattern using optical microscopy, scanning electron microscopy, or Raman spectroscopy. This method allows for a simple and rapid evaluation of grain sizes in 2D material films over large areas, thereby potentially facilitating the optimization of synthesis processes and advancing applications of 2D materials in science and technology.

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications.

Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 µm to 110 µm, and suspended proof masses consisting of solid silicon cubes that are from 5 µm × 5 µm × 16.4 µm to 100 µm × 100 µm × 16.4 µm in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were >90%, with >70% of the graphene membranes having >90% graphene area without visible defects. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The graphene membranes with suspended proof masses were extremely robust, and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to ~7000 nN. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.

Nanoelectromechanical Sensors Based on Suspended 2D Materials.

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

Direct observation of grain boundaries in graphene through vapor hydrofluoric acid (VHF) exposure.

The shape and density of grain boundary defects in graphene strongly influence its electrical, mechanical, and chemical properties. However, it is difficult and elaborate to gain information about the large-area distribution of grain boundary defects in graphene. An approach is presented that allows fast visualization of the large-area distribution of grain boundary-based line defects in chemical vapor deposition graphene after transferring graphene from the original copper substrate to a silicon dioxide surface. The approach is based on exposing graphene to vapor hydrofluoric acid (VHF), causing partial etching of the silicon dioxide underneath the graphene as VHF diffuses through graphene defects. The defects can then be identified using optical microscopy, scanning electron microscopy, or Raman spectroscopy. The methodology enables simple evaluation of the grain sizes in polycrystalline graphene and can therefore be a valuable procedure for optimizing graphene synthesis processes.

Influence of Humidity on Contact Resistance in Graphene Devices.

The electrical contact resistance at metal-graphene interfaces can significantly degrade the properties of graphene devices and is currently hindering the full exploitation of graphene's potential. Therefore, the influence of environmental factors, such as humidity, on the metal-graphene contact resistance is of interest for all graphene devices that operate without hermetic packaging. We experimentally studied the influence of humidity on bottom-contacted chemical-vapor-deposited (CVD) graphene-gold contacts, by extracting the contact resistance from transmission line model (TLM) test structures. Our results indicate that the contact resistance is not significantly affected by changes in relative humidity (RH). This behavior is in contrast to the measured humidity sensitivity [Formula: see text] of graphene's sheet resistance. In addition, we employ density functional theory (DFT) simulations to support our experimental observations. Our DFT simulation results demonstrate that the electronic structure of the graphene sheet on top of silica is much more sensitive to adsorbed water molecules than the charge density at the interface between gold and graphene. Thus, we predict no degradation of device performance by alterations in contact resistance when such contacts are exposed to humidity. This knowledge underlines that bottom-contacting of graphene is a viable approach for a variety of graphene devices and the back end of the line integration on top of conventional integrated circuits.