Inverse-designed polarization multiplexing non-uniformly distributed gratings for one-dimensional beam steering.

Non-uniformly distributed gratings on the silicon-on-insulator platform for one-dimensional beam steering are designed by direct binary search inverse-design method. The gratings exhibit good emission directionality and far-field characteristics. Within a relatively small wavelength tuning range of 1517-1577 nm, the longitudinal scanning angle for TE and TM light is 23.65° and 10.81°, respectively, both of which are much larger than their uniform counterparts. By polarization multiplexing and etching depth optimization, a remarkable longitudinal scanning angle of 32.10° and high beam steering efficiency of 0.55°/nm are obtained. This work may pave the way for the development of miniaturized optical phased arrays with excellent beam steering performance.