Direct replication of a glass micro Fresnel zone plate array by laser irradiation using an infrared transmissive mold.

It is not yet possible to fabricate micrometer-scale, glass optical components with nanometer-scale precision. Glass thermal imprinting enhances production efficiency. However, dimensional changes caused by shrinkage are inevitable because of phase transitions. Replication is very difficult when high-level pitch precision is essential. We used an infrared-transparent silicon mold and a CO2 laser to perform replica-type, thermal surface texturing at the nanoscale level; we analyzed a glass Fresnel zone plate array to this end. The Fresnel zone plate array was 10 × 10 mm2 in area and featured a 20 × 20 array. The individual Fresnel zone plate diameter was 500 µm and had 21 rings of minimum linewidth 2.9 µm and height 737 nm.

Replication of high refractive index glass microlens array by imprinting in conjunction with laser assisted rapid surface heating for high resolution confocal microscopy imaging.

In a multi optical probe confocal imaging system utilizing a microlens arrays as an objective lens, a high numerical aperture is required to improve resolving power. Glass microlens arrays are suitable for high-resolution imaging since they provide outstanding optical properties with a high refractive index. We demonstrated the rapid fabrication of microlens arrays on a high refractive index optical glass substrate via laser assisted thermal imprinting. The optical performance of the fabricated glass microlens arrays were evaluated and compared to that of a polymer microlens. In contrast to the polymer, the real image afforded by, and the calculated resolution of, the imprinted glass microlens arrays were significantly better, at about 0.73 µm compared to the polymer (∼1.56 µm). Our results reveal the considerable potential of direct thermal imprinting as a rapid, single-step, low cost fabrication method for replication of glass microlens array of high dimensional accuracy affording excellent optical performance.

Transparent, Flexible, Conformal Capacitive Pressure Sensors with Nanoparticles.

The fundamental challenge in designing transparent pressure sensors is the ideal combination of high optical transparency and high pressure sensitivity. Satisfying these competing demands is commonly achieved by a compromise between the transparency and usage of a patterned dielectric surface, which increases pressure sensitivity, but decreases transparency. Herein, a design strategy for fabricating high-transparency and high-sensitivity capacitive pressure sensors is proposed, which relies on the multiple states of nanoparticle dispersity resulting in enhanced surface roughness and light transmittance. We utilize two nanoparticle dispersion states on a surface: (i) homogeneous dispersion, where each nanoparticle (≈500 nm) with a size comparable to the visible light wavelength has low light scattering; and (ii) heterogeneous dispersion, where aggregated nanoparticles form a micrometer-sized feature, increasing pressure sensitivity. This approach is experimentally verified using a nanoparticle-dispersed polymer composite, which has high pressure sensitivity (1.0 kPa-1 ), and demonstrates excellent transparency (>95%). We demonstrate that the integration of nanoparticle-dispersed capacitor elements into an array readily yields a real-time pressure monitoring application and a fully functional touch device capable of acting as a pressure sensor-based input device, thereby opening up new avenues to establish processing techniques that are effective on the nanoscale yet applicable to macroscopic processing.

Acoustically sticky topographic metasurfaces for underwater sound absorption.

A class of metasurfaces for underwater sound absorption, based on a design principle that maximizes thermoviscous loss, is presented. When a sound meets a solid surface, it leaves a footprint in the form of thermoviscous boundary layers in which energy loss takes place. Considered to be a nuisance, this acoustic to vorticity/entropy mode conversion and the subsequent loss are often ignored in the existing designs of acoustic metamaterials and metasurfaces. The metasurface created is made of a series of topographic meta-atoms, i.e., intaglios and reliefs engraved directly on the solid object to be concealed. The metasurface is acoustically sticky in that it rather facilitates the conversion of the incident sound to vorticity and entropy modes, hence the thermoviscous loss, leading to the desired anechoic property. A prototype metasurface machined on a brass object is tested for its anechoicity, and shows a multitude of absorption peaks as large as unity in the 2-5 MHz range. Computations also indicate that a topographic metasurface is robust to hydrostatic pressure variation, a quality much sought-after in underwater applications.

Rough-Surface-Enabled Capacitive Pressure Sensors with 3D Touch Capability.

Fabrication strategies that pursue "simplicity" for the production process and "functionality" for a device, in general, are mutually exclusive. Therefore, strategies that are less expensive, less equipment-intensive, and consequently, more accessible to researchers for the realization of omnipresent electronics are required. Here, this study presents a conceptually different approach that utilizes the inartificial design of the surface roughness of paper to realize a capacitive pressure sensor with high performance compared with sensors produced using costly microfabrication processes. This study utilizes a writing activity with a pencil and paper, which enables the construction of a fundamental capacitor that can be used as a flexible capacitive pressure sensor with high pressure sensitivity and short response time and that it can be inexpensively fabricated over large areas. Furthermore, the paper-based pressure sensors are integrated into a fully functional 3D touch-pad device, which is a step toward the realization of omnipresent electronics.

Design methodology for micro-discrete planar optics with minimum illumination loss for an extended source.

Recently, studies have examined techniques for modeling the light distribution of light-emitting diodes (LEDs) for various applications owing to their low power consumption, longevity, and light weight. The energy mapping technique, a design method that matches the energy distributions of an LED light source and target area, has been the focus of active research because of its design efficiency and accuracy. However, these studies have not considered the effects of the emitting area of the LED source. Therefore, there are limitations to the design accuracy for small, high-power applications with a short distance between the light source and optical system. A design method for compensating for the light distribution of an extended source after the initial optics design based on a point source was proposed to overcome such limits, but its time-consuming process and limited design accuracy with multiple iterations raised the need for a new design method that considers an extended source in the initial design stage. This study proposed a method for designing discrete planar optics that controls the light distribution and minimizes the optical loss with an extended source and verified the proposed method experimentally. First, the extended source was modeled theoretically, and a design method for discrete planar optics with the optimum groove angle through energy mapping was proposed. To verify the design method, design for the discrete planar optics was achieved for applications in illumination for LED flash. In addition, discrete planar optics for LED illuminance were designed and fabricated to create a uniform illuminance distribution. Optical characterization of these structures showed that the design was optimal; i.e., we plotted the optical losses as a function of the groove angle, and found a clear minimum. Simulations and measurements showed that an efficient optical design was achieved for an extended source.

Design methodology accounting for fabrication errors in manufactured modified Fresnel lenses for controlled LED illumination.

The increasing demand for lightweight, miniaturized electronic devices has prompted the development of small, high-performance optical components for light-emitting diode (LED) illumination. As such, the Fresnel lens is widely used in applications due to its compact configuration. However, the vertical groove angle between the optical axis and the groove inner facets in a conventional Fresnel lens creates an inherent Fresnel loss, which degrades optical performance. Modified Fresnel lenses (MFLs) have been proposed in which the groove angles along the optical paths are carefully controlled; however, in practice, the optical performance of MFLs is inferior to the theoretical performance due to fabrication errors, as conventional design methods do not account for fabrication errors as part of the design process. In this study, the Fresnel loss and the loss area due to microscopic fabrication errors in the MFL were theoretically derived to determine optical performance. Based on this analysis, a design method for the MFL accounting for the fabrication errors was proposed. MFLs were fabricated using an ultraviolet imprinting process and an injection molding process, two representative processes with differing fabrication errors. The MFL fabrication error associated with each process was examined analytically and experimentally to investigate our methodology.

A metallic anti-biofouling surface with a hierarchical topography containing nanostructures on curved micro-riblets.

Metallic surface finishes have been used in the anti-biofouling, but it is very difficult to produce surfaces with hierarchically ordered structures. In the present study, anti-biofouling metallic surfaces with nanostructures superimposed on curved micro-riblets were produced via top-down fabrication. According to the attachment theory, these surfaces feature few attachment points for organisms, the nanostructures prevent the attachment of bacteria and algal zoospores, while the micro-riblets prohibit the settlement of macrofoulers. Anodic oxidation was performed to induce superhydrophilicity. It forms a hydration layer on the surface, which physically blocks foulant adsorption along with the anti-biofouling topography. We characterized the surfaces via scanning electron and atomic force microscopy, contact-angle measurement, and wear-resistance testing. The contact angle of the hierarchical structures was less than 1°. Laboratory settlement assays verified that bacterial attachment was dramatically reduced by the nanostructures and/or the hydration layer, attributable to superhydrophilicity. The micro-riblets prohibited the settlement of macrofoulers. Over 77 days of static immersion in the sea during summer, the metallic surface showed significantly less biofouling compared to a surface painted with an anticorrosive coating.

Binary-state scanning probe microscopy for parallel imaging.

Scanning probe microscopy techniques, such as atomic force microscopy and scanning tunnelling microscopy, are harnessed to image nanoscale structures with an exquisite resolution, which has been of significant value in a variety of areas of nanotechnology. These scanning probe techniques, however, are not generally suitable for high-throughput imaging, which has, from the outset, been a primary challenge. Traditional approaches to increasing the scalability have involved developing multiple probes for imaging, but complex probe design and electronics are required to carry out the detection method. Here, we report a probe-based imaging method that utilizes scalable cantilever-free elastomeric probe design and hierarchical measurement architecture, which readily reconstructs high-resolution and high-throughput topography images. In a single scan, we demonstrate imaging with a 100-tip array to obtain 100 images over a 1-mm2 area with 106 pixels in less than 10 min. The potential for large-scale tip integration and the advantage of a simple probe array suggest substantial promise for our approach to high-throughput imaging far beyond what is currently possible.

Massively parallel direct writing of nanoapertures using multi-optical probes and super-resolution near-fields.

Laser direct-writing enables micro and nanoscale patterning, and is thus widely used for cutting-edge research and industrial applications. Various nanolithography methods, such as near-field, plasmonic, and scanning-probe lithography, are gaining increasing attention because they enable fabrication of high-resolution nanopatterns that are much smaller than the wavelength of light. However, conventional methods are limited by low throughput and scalability, and tend to use electron beams or focused-ion beams to create nanostructures. In this study, we developed a procedure for massively parallel direct writing of nanoapertures using a multi-optical probe system and super-resolution near-fields. A glass micro-Fresnel zone plate array, which is an ultra-precision far-field optical system, was designed and fabricated as the multi-optical probe system. As a chalcogenide phase-change material (PCM), multiple layers of Sb65Se35 were used to generate the super-resolution near-field effect. A nanoaperture was fabricated through direct laser writing on a large-area (200 × 200 mm2) multi-layered PCM. A photoresist nanopattern was fabricated on an 8-inch wafer via near-field nanolithography using the developed nanoaperture and an i-line commercial exposure system. Unlike other methods, this technique allows high-throughput large-area nanolithography and overcomes the gap-control issue between the probe array and the patterning surface.

Reverse functional design of discontinuous refractive optics using an extended light source for flat illuminance distributions and high color uniformity.

We propose a reverse functional design of modified Fresnel lens (MFL) with discontinuous refractive surfaces to achieve cost-effective high optical performance with thin lenses. The reverse-geometry design process was optimized to control the spatial illuminance distribution (SID) of light-emitting diodes (LEDs). Analysis results based on non-sequential ray-tracing simulations for flat SIDs indicated that the illuminance uniformity of LEDs with optimum MFL with different groove angles increased about 22 times, from 0.348 to 0.016, compared with the normalized standard deviation (NSD) of the general Fresnel lenses (GFL) with groove angles of 0°. In addition, the proposed method enhanced the color uniformity by reducing the circular yellow pattern. Tolerance analysis was carried out to determine tolerance limits for applying the optimum MFL in the assembly process. Finally, the feasibility of the reverse design process was verified by optical measurements of the optimum MFL.

Development of a two-chamber process for self-assembling a fluorooctatrichlorosilane monolayer for the nanoimprinting of full-track nanopatterns with a 35 nm half pitch.

The technology of depositing a uniform and stable anti-adhesion layer on a wafer-scale nanostamp is a critical issue in the industrialized nanoimprinting process. The deposition of an anti-adhesion layer involves O2 plasma treatment to modify the stamp surface and the reaction of the monomers with the surface. Although an automated one-chamber system was developed for uniform and stable anti-adhesion layer coating, unwanted molecules are irregularly deposited on a sample during the O2 plasma treatment due to the contamination of the chamber, leading to the degradation of the anti-adhesion properties. In this paper, a two-chamber self-assembled monolayer (SAM) deposition system was proposed to prevent the degradation of the anti-adhesion properties due to contamination. To examine the effectiveness of the proposed system, the contact angles and chemical compositions of the SAM-coated silicon mold prepared using the one- and two-chamber systems were measured and compared. Finally, 4-in nanoimprinting of 35-nm-half-pitch full-track nanopatterns was conducted using a SAM-coated silicon nanomold prepared using the one- and two-chamber systems, and the replication quality was examined.

Binding characteristics of staphylococcal protein A and streptococcal protein G for fragment crystallizable portion of human immunoglobulin G.

In the wide array of physiological processes, protein-protein interactions and their binding are the most basal activities for achieving adequate biological metabolism. Among the studies on binding proteins, the examination of interactions between immunoglobulin G (IgG) and natural immunoglobulin-binding ligands, such as staphylococcal protein A (spA) and streptococcal protein G (spG), is essential in the development of pharmaceutical science, biotechnology, and affinity chromatography. The widespread utilization of IgG-spA/spG binding characteristics has allowed researchers to investigate these molecular interactions. However, the detailed binding strength of each ligand and the corresponding binding mechanisms have yet to be fully investigated. In this study, the authors analyzed the binding strengths of IgG-spA and IgG-spG complexes and identified the mechanisms enabling these bindings using molecular dynamics simulation, steered molecular dynamics, and advanced Poisson-Boltzmann Solver simulations. Based on the presented data, the binding strength of the spA ligand was found to significantly exceed that of the spG ligand. To find out which non-covalent interactions or amino acid sites have a dominant role in the tight binding of these ligands, further detailed analyses of electrostatic interactions, hydrophobic bonding, and binding free energies have been performed. In investigating their binding affinity, a relatively independent and different unbinding mechanism was found in each ligand. These distinctly different mechanisms were observed to be highly correlated to the protein secondary and tertiary structures of spA and spG ligands, as explicated from the perspective of hydrogen bonding.

Eliminating hotspots in a multi-chip LED array direct backlight system with optimal patterned reflectors for uniform illuminanceand minimal system thickness.

We propose an optical design process that significantly reduces the time and costs in direct backlight unit (BLU) development. In it, the basic system specifications are derived from the optical characteristics of RGB light-emitting diodes (LEDs) comprising the BLU. The driving currents are estimated to determine the theoretical RGB flux ratio for a desired white point. The number of LEDs needed to produce the target luminance is then calculated from the combined optical efficiencies of the components. Last, an appropriate array configuration is sought based on the illuminance distribution function for meeting the target uniformity. To showcase the design process we built two 42-inch triangular cluster arrays of 40 x 16 LED elements. When a flat reflective sheet was used, the minimum thickness required of the system to satisfy the target uniformity was 30 mm. Introducing a patterned reflective sheet removed hotspots that resulted from reducing the system thickness without the aid of additional optical components. Using an optimized patterned reflective sheet, reduction in system thickness as much as 5 mm was possible.

Gigapixel confocal imaging using a massively parallel optical probe array with single directional infinite scanning.

Here we demonstrate high-throughput gigapixel confocal imaging using a massively parallel optical probe array with single directional infinite scanning. For implementation of the single directional infinite scan with high lateral resolution, a parallelogram array micro-objective lens module, composed of two wafer-level microlens arrays, is proposed to generate a massively parallel optical probe array for integration into the confocal imaging system, including an objective-side telecentric relay lens with a low-magnification. To test the feasibility of the proposed system with single directional infinite scanning, we designed and constructed a confocal imaging system using a parallelogram array of multi-optical probes with a massively parallel array size of 200 × 140. The constructed system provides a full width-half maximum lateral resolution of 1.55 µm, as measured by the knife-edge detection method, and a field-of-view width of 28.0 mm with a sampling interval of 1 µm/pixel.

Near-field sub-diffraction photolithography with an elastomeric photomask.

Photolithography is the prevalent microfabrication technology. It needs to meet resolution and yield demands at a cost that makes it economically viable. However, conventional far-field photolithography has reached the diffraction limit, which imposes complex optics and short-wavelength beam source to achieve high resolution at the expense of cost efficiency. Here, we present a cost-effective near-field optical printing approach that uses metal patterns embedded in a flexible elastomer photomask with mechanical robustness. This technique generates sub-diffraction patterns that are smaller than 1/10th of the wavelength of the incoming light. It can be integrated into existing hardware and standard mercury lamp, and used for a variety of surfaces, such as curved, rough and defect surfaces. This method offers a higher resolution than common light-based printing systems, while enabling parallel-writing. We anticipate that it will be widely used in academic and industrial productions.

Elimination of flux loss by optimizing the groove angle in modified Fresnel lens to increase illuminance uniformity, color uniformity and flux efficiency in LED illumination.

A Fresnel lens is an optical component that can be used to create systems more compact, cost-effective, and lightweight than those using conventional continuous surface optics. However, Fresnel lenses can usually cause a loss of flux efficiency and non-uniform distribution of illuminance due to secondary refraction by surface discontinuities, especially along the groove facet. We therefore proposed to modify a groove angle in the Fresnel lens and analyzed interrelation between the groove angle and multiple optical performances, such as flux efficiency and the uniformity of illuminance and color. The groove angle was optimized to maximize the uniformity and efficiency in the target viewing angle considering various weights of merit functions. Specifically, in our study, when the uniformity of illuminance had a little more weight than the flux efficiency (ratio of 0.6:0.4), final optimum groove angles of 24.7 degrees , 29.4 degrees , and 31.3 degrees were obtained at target viewing angles of 20 degrees , 30 degrees , and 40 degrees , respectively. We also fabricated a modified Fresnel lens with a groove angle of 29.4 degrees using UV-imprinting. The real optical performance of the fabricated Fresnel lens was then compared to that of a spherical lens.

Active Accumulation of Spherical Analytes on Plasmonic Hot Spots of Double-Bent Au Strip Arrays by Multiple Dip-Coating.

To achieve sensitive plasmonic biosensors, it is essential to develop an efficient method for concentrating analytes in hot spots, as well as to develop plasmonic nanostructures for concentrating light. In this study, target analytes were delivered to the surface of double-bent Au strip arrays by a multiple dip-coating method; they were self-aligned in the valleys between neighboring Au strips by capillary forces. As the valleys not only accommodate target analytes but also host strong electromagnetic fields due to the interaction between adjacent strips, sensitive measurement of target analytes was possible by monitoring changes in the wavelength of a localized surface plasmon resonance. Using the proposed plasmonic sensor and target delivery method, the adsorption and saturation of polystyrene beads 100 nm in size on the sensor surface were monitored by the shift of the resonance wavelength. In addition, the pH-dependent stability of exosomes accumulated on the sensor surface was successfully monitored by changing the pH from 7.4 to 4.0.

Megahertz-wave-transmitting conducting polymer electrode for device-to-device integration.

The ideal combination of high optical transparency and high electrical conductivity, especially at very low frequencies of less than the gigahertz (GHz) order, such as the radiofrequencies at which electronic devices operate (tens of kHz to hundreds of GHz), is fundamental incompatibility, which creates a barrier to the realization of enhanced user interfaces and 'device-to-device integration.' Herein, we present a design strategy for preparing a megahertz (MHz)-transparent conductor, based on a plasma frequency controlled by the electrical conductivity, with the ultimate goal of device-to-device integration through electromagnetic wave transmittance. This approach is verified experimentally using a conducting polymer, poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT:PSS), the microstructure of which is manipulated by employing a solution process. The use of a transparent conducting polymer as an electrode enables the fabrication of a fully functional touch-controlled display device and magnetic resonance imaging (MRI)-compatible biomedical monitoring device, which would open up a new paradigm for transparent conductors.

Electrical, Structural, Optical, and Adhesive Characteristics of Aluminum-Doped Tin Oxide Thin Films for Transparent Flexible Thin-Film Transistor Applications.

The properties of Al-doped SnOx films deposited via reactive co-sputtering were examined in terms of their potential applications for the fabrication of transparent and flexible electronic devices. Al 2.2-atom %-doped SnOx thin-film transistors (TFTs) exhibit improved semiconductor characteristics compared to non-doped films, with a lower sub-threshold swing of ~0.68 Vdec-1, increased on/off current ratio of ~8 × 107, threshold voltage (Vth) near 0 V, and markedly reduced (by 81%) Vth instability in air, attributable to the decrease in oxygen vacancy defects induced by the strong oxidizing potential of Al. Al-doped SnOx films maintain amorphous crystallinity, an optical transmittance of ~97%, and an adhesive strength (to a plastic substrate) of over 0.7 kgf/mm; such films are thus promising semiconductor candidates for fabrication of transparent flexible TFTs.