Extreme UV Resist Exhibiting Synergism between Chemical and Physical Crosslinking Mechanisms.

Carbon-fluorine bonds in fluorinated molecules can undergo homolytic cleavage reactions when electrons are injected, and the resulting radicals combine to form network structures characterized by reduced solubility. This crosslinking chemistry suggests a new category of patterning materials that function under electron beam (e-beam) and extreme ultraviolet (EUV) lithographic conditions. Although this chemistry enables the production of 50 nm or smaller-sized features of simple fluoroalkylated polymers, it is limited by the need for relatively large amounts of irradiation energy to achieve required solubility changes. Therefore, this study was undertaken to devise a sensitivity-enhancing strategy based on a synergistic combination of radical crosslinking and hydrogen-bonding interactions between highly fluoroalkylated copolymers. An alternating copolymer was synthesized using tert-butoxystyrene and a fluoroalkylated maleimide, the former of which produces active hydrogens through catalytic acidolysis reactions. When the polymer was blended with a catalytic amount of a photoacid generator and subjected to lithographic patterning tests under e-beam and EUV irradiation, the deprotection reactions of tert-butoxy moieties proceeded at room temperature and led to a solubility decrease. We presume the small number of hydroxyl moieties produced formed an intermolecular hydrogen-bonding network, which acted synergistically with the covalent crosslinks generated by C-F bonds. When 30 nm features of copolymer thin films were fabricated by EUV lithography, sensitivity was improved by 25-34% without significant deterioration of pattern quality, especially line-edge roughness. These results demonstrate that EUV resists with improved patterning capabilities can be achieved by combining catalytic acidolysis reactions and noncatalytic crosslinking chemistry.

Dissolution Behavior of Fluoroalkylated Diazonaphthoquinone and Its Blends with Fluorinated Copolymers under UV Irradiation.

This article reports on the synthesis of materials containing both a fluoroalkyl group and a diazonaphthoquinone (DNQ) moiety as well as the fabrication of negative- and positive-tone stencil patterns. Additionally, the photoreaction mechanism that contributes to the pattern formation process is discussed, and the application of these materials is explored in the pixel-formation process in organic light-emitting diode (OLED) displays. Fluoroalkylated diazonaphthoquinone (RF2D1) was synthesized using chemically binding a DNQ unit, which can be converted into carboxylic acid derivatives having stronger polarity, with two fluorinated alkyl chains. The purified compound is found to be soluble in a nonpolar fluorous solvent and can be uniformly coated as a thin film. When the thin film of RF2D1 is exposed to 365 nm UV light, its solubility in a fluorous solvent decreases due to the Wolff rearrangement and subsequent hydrolysis of a ketene moiety. In contrast, when a mixture of RF2D1 and a hydrophobic, fluorinated copolymer is tested for the patterning process, the copolymer delays the conversion of the ketene intermediate to carboxylic acid, resulting in the dissolution of the exposed areas in the fluorous solvent. Finally, the applicability of these materials in micropatterning is demonstrated by adopting them in the orthogonal photolithography process to create pixels of OLEDs.

Structural and Dynamic Disorder, Not Ionic Trapping, Controls Charge Transport in Highly Doped Conducting Polymers.

Doped organic semiconductors are critical to emerging device applications, including thermoelectrics, bioelectronics, and neuromorphic computing devices. It is commonly assumed that low conductivities in these materials result primarily from charge trapping by the Coulomb potentials of the dopant counterions. Here, we present a combined experimental and theoretical study rebutting this belief. Using a newly developed doping technique based on ion exchange, we prepare highly doped films with several counterions of varying size and shape and characterize their carrier density, electrical conductivity, and paracrystalline disorder. In this uniquely large data set composed of several classes of high-mobility conjugated polymers, each doped with at least five different ions, we find electrical conductivity to be strongly correlated with paracrystalline disorder but poorly correlated with ionic size, suggesting that Coulomb traps do not limit transport. A general model for interacting electrons in highly doped polymers is proposed and carefully parametrized against atomistic calculations, enabling the calculation of electrical conductivity within the framework of transient localization theory. Theoretical calculations are in excellent agreement with experimental data, providing insights into the disorder-limited nature of charge transport and suggesting new strategies to further improve conductivities.

The effects of social comparison orientation on psychological well-being in social networking sites: Serial mediation of perceived social support and self-esteem.

This study investigates the effects of the social comparison orientation in social networking sites on psychological well-being. In particular, it examines the mediation effect of perceived social support and self-esteem in the relationship between social comparison orientation and psychological well-being. Data were collected through an online survey with 236 participants in South Korea. The results showed that social comparison orientation negatively influenced psychological well-being. In the relationship between social comparison orientation and psychological well-being, perceived social support had no mediation effect, self-esteem had a significant negative mediation effect, and perceived social support and self-esteem had a negative serial mediation effect. The social comparison orientation in social networking sites could elicit negative emotions, which decrease perceived social support, self-esteem, and psychological well-being. Theoretical and practical implications as well as suggestions for future studies are discussed in detail.

The roles of individual differences in time perspective, promotion focus, and innovativeness: Testing technology acceptance model.

The goal of this study is to examine the roles of Zimbardo's time perspective along with other individual differences such as promotion focus and innovativeness in perceived ease of use, perceived usefulness, and attitude toward SNSs (social networking sites) in the technology acceptance model (TAM). A total of 234 participants joined this online study in South Korea. As predicted, past positive time perspective (TP) positively affected promotion focus and innovativeness, whereas past negative TP negatively affected them. Present hedonic TP positively affected innovativeness, and present fatalistic TP negatively affected promotion focus each. Future TP also positively related to promotion focus and innovativeness. In addition, simple and serial mediation effects of perceived ease of use and perceived usefulness independently and sequentially mediated the impact of TP on attitude toward SNSs. By considering TP along with promotion focus and innovativeness in conjunction with beliefs in the TAM, this study identifies psychological underpinnings of how individual differences affect technology adoption attitude and behavior. Research implications and future research suggestions will be discussed in detail.

Highly Sensitive Electrochemical Sensor for Diagnosis of Diabetic Ketoacidosis (DKA) by Measuring Ketone Bodies in Urine.

In this report, we present an enzyme deposited Au electrode for an electrochemical measurement of acetylacetic acid (AcAc) in urine. The electrode has an immobilized layer of a mixture of D-ß-hydroxybutyrate dehydrogenase (HBDH) and nicotinamide adenine dinucleotide (NADH) as sensing material to investigate its electroanalytical properties by means of cyclic voltammetry (CV). The modified electrodes are used for the detection of AcAc and present a linear current increase when the AcAc concentration increases. The electrode presents a limit of detection (LOD) of 6.25 mg/dL in the range of 6.25-100 mg/dL for investigation of clinical relevance. Finally, the electrode was evaluated using 20 patient samples. The measured results of urine ketone by the developed electrode were compared with the clinical results from a commercial kit, and the analysis showed good agreement. The proposed electrode was demonstrated to be a very promising platform as a miniaturized electrochemical analyzer for point-of-care monitoring of the critical biochemical parameters such as urine ketone.

Electroluminescence from Solution-Processed Pinhole-Free Nanometer-Thickness Layers of Conjugated Polymers.

We report the formation of robust, reproducible, pinhole-free, thin layers of fluorinated polyfluorene conjugated copolymers on a range of polymeric underlayers via a simple solution processing method. This is driven by the different characters of the fluorinated and nonfluorinated sections of these polymers. Photothermal deflection spectroscopy is used to determine that these layers are 1-2 nm thick, corresponding to a molecularly thin layer. Evidence that these layers are continuous and pinhole-free is provided by electroluminescence data from polymer LED devices that incorporate these layers within the stacked LED structure. These reveal, remarkably, light emission solely from these molecularly thin layers.

Orthogonal patterning of multiple biomolecules using an organic fluorinated resist and imprint lithography.

The ability to spatially deposit multiple biomolecules onto a single surface with high-resolution while retaining biomolecule stability and integrity is critical to the development of micro- and nanoscale biodevices. While conventional lithographic patterning methods are attractive for this application, they typically require the use of UV exposure and/or harsh solvents and imaging materials, which may be damaging to fragile biomolecules. Here, we report the development of a new patterning process based on a fluorinated patterning material that is soluble in hydrofluoroether solvents, which we show to be benign to biomolecules, including proteins and DNA. We demonstrate the implementation of these materials into an orthogonal processing system for patterning multibiomolecule arrays by imprint lithography at room temperature. We further showcase this method's capacity for fabricating patterns of receptor-specific ligands for fundamental cell studies.

High Performance Transparent Silver Grid Electrodes for Organic Photovoltaics Fabricated by Selective Metal Condensation.

Silver grid electrodes on glass and flexible plastic substrates with performance that exceeds that of commercial indium-tin oxide (ITO) coated glass are reported and show their suitability as a drop-in replacement for ITO glass in solution-processed organic photovoltaics (OPVs). When supported on flexible plastic substrates these electrodes are stable toward repeated bending through a small radius of curvature over tens of thousands of cycles. The grid electrodes are fabricated by the unconventional approach of condensation coefficient modulation using a perfluorinated polymer shown to be far superior to the other compounds used for this purpose to date. The very narrow line width and small grid pitch that can be achieved also open the door to the possibility of using grid electrodes in OPVs without a conducting poly(3,4-ethylenedioxythiophene-poly(styrenesulfonate) (PEDOT: PSS) layer to span the gaps between grid lines.

Single-Component Hydrophilic Terpolymer Thin Film Systems for Imparting Surface Chemical Versatility on Various Substrates.

We demonstrate a single-component hydrophilic photocrosslinkable copolymer system that incorporates all critical functionalities into one chain. This design allows for the creation of uniform functional organic coatings on a variety of substrates. The copolymers were composed of a poly(ethylene oxide)-containing monomer, a monomer that can release a primary amine upon UV light, and a monomer with reactive epoxide or cyclic dithiocarbonate with a primary amine. These copolymers are easily incorporated into the solution-casting process using polar solvents. Furthermore, the resulting coating can be readily stabilized through UV light-induced crosslinking, providing an advantage for controlling the surface properties of various substrates. The photocrosslinking capability further enables us to photolithographically define stable polymer domains in a desirable region. The resulting copolymer coatings were chemically versatile in immobilizing complex molecules by (i) post-crosslinking functionalization with the reactive groups on the surface and (ii) the formation of a composite coating by mixing varying amounts of a protein of interest, i.e., fish skin gelatin, which can form a uniform dual crosslinked network. The number of functionalization sites in a thin film could be controlled by tuning the composition of the copolymers. In photocrosslinking and subsequent functionalizations, we assessed the reactivity of the epoxide and cyclic dithiocarbonate with the generated primary amine. Moreover, the orthogonality of the possible reactions of the presented reactive functionalities in the crosslinked thin films with complex molecules is assessed. The resulting copolymer coatings were further utilized to define a hydrophobic surface or an active surface for the adhesion of biological objects.

Triggering ZT to 0.40 by Engineering Orientation in One Polymeric Semiconductor.

Breaking the thermoelectric (TE) trade-off relationship is an important task for maximizing the TE performance of polymeric semiconductors. Existing efforts have focused on designing high-mobility semiconductors and achieving ordered molecular doping, ignoring the critical role of the molecular orientation during TE conversion. Herein, the achievement of ZT to 0.40 is reported by fine-tuning the molecular orientation of one diketopyrrolopyrrole (DPP)-based polymer (DPP-BTz). Films with bimodal molecular orientation yield superior doping efficiency by increasing the lamellar spacing and achieve increased splitting between the Fermi energy and the transport energy to enhance the thermopower. These factors contribute to the simultaneous improvement in the Seebeck coefficient and electrical conductivity in an unexpected manner. Importantly, the bimodal film exhibits a maximum power factor of up to 346 µW m-1 K-2 , >400% higher than that of unimodal films. These results demonstrate the great potential of molecular orientation engineering in polymeric semiconductors for developing state-of-the-art organic TE (OTE) materials.

Photoinduced ordering of block copolymers.

Photoinduced ordering of disordered block copolymers (BCPs) would provide an on-demand, nonintrusive route for formation of well-ordered nanostructures in arbitrarily defined regions of an otherwise disordered material. Here we achieve this objective using a rapid and simple approach in which photoconversion of an additive blended with the BCP introduces strong interactions between the additive and one of the chain segments and induces strong order in the BCP blend. The strategy is generally applicable to block copolymers containing chain segments capable of hydrogen bonding with the additive.

Near-field infrared nanoscopic study of EUV- and e-beam-exposed hydrogen silsesquioxane photoresist.

This article presents a technique of scattering-type scanning near-field optical microscopy (s-SNOM) based on scanning probe microscopy as a nanoscale-resolution chemical visualization technique of the structural changes in photoresist thin films. Chemical investigations were conducted in the nanometer regime by highly concentrated near-field infrared on the sharp apex of the metal-coated atomic force microscopy (AFM) tip. When s-SNOM was applied along with Fourier transform infrared spectroscopy to characterize the extreme UV- and electron-beam (e-beam)-exposed hydrogen silsesquioxane films, line and space patterns of half-pitch 100, 200, 300, and 500 nm could be successfully visualized prior to pattern development in the chemical solutions. The linewidth and line edge roughness values of the exposed domains obtained by s-SNOM were comparable to those extracted from the AFM and scanning electron microscopy images after development. The chemical analysis capabilities provided by s-SNOM provide new analytical opportunities that are not possible with traditional e-beam-based photoresist measurement, thus allowing information to be obtained without interference from non-photoreaction processes such as wet development.

Investigation of correlative parameters to evaluate EUV lithographic performance of PMMA.

Investigations to evaluate the extreme ultraviolet (EUV) lithographic performance of 160 nm thick poly(methyl methacrylate) with 13.5 nm wavelength EUV light were performed using a synchrotron radiation source at Pohang Light Source-II (PLS-II). The single system enabled the determination of the sensitivity, contrast, linear absorption coefficient, critical dimension, and line edge roughness of polymer thin films through tests and measurements. The experimental findings were also compared to theoretical results and those of previously reported studies. According to the results of the dose-to-clear test and transmission measurements, the critical dimension of a line and space pattern (>50 nm) via interference lithography with 250 nm pitch grating agreed well with the results calculated using the lumped parameter model. The experimental results demonstrated that the equipment and test protocol can be used for EUV material infrastructure evaluation in academia and in industry.

High-performance electron-transporting polymers derived from a heteroaryl bis(trifluoroborate).

In this communication, we report that dipotassium aryl bis(trifluoroborate)s make stable and easy-to-purify yet reactive monomers under Suzuki polycondensation reactions. A bis(trifluoroborate) of 2-alkylbenzotriazole was prepared successfully and copolymerized with dibromobenzothiadiazole in the presence of a Pd catalyst and LiOH, yielding high molecular weight conjugated polymers. This polymer (P1) composed of all electron-accepting units shows excellent electron-transport properties (µ(e) = 0.02 cm(2) V(-1) s(-1)), which proves the value of the aryl bis(trifluoroborate) monomers and suggests that many other types of semiconducting polymers that could not be accessed previously can be synthesized using this approach.

Synthesis and properties of copolymers composed of arylenevinylene and phenothiazine for organic solar cells.

A series of new organic semiconducting copolymers composed of {(2E,2'E)-3,3'-[2,5-bis(octyloxy)-1,4-phenylene]-bis[2-(thiophen-2-yl)acrylonitrile]}(OPTAN) and 10(2'-ethylhexylphenothiazine) (PTZ) monomers, (the copolymers are hereafter referred to as poly(OPTAN-co-PTZ)s), were synthesized by using Suzuki coupling polymerization in which the monomer ratios were controlled. An increase in the OPTAN content shifted the peak and onset absorption of the copolymers to the longer wavelength regions, which resulted in a decrease in the band gap energy. The maximum UV absorption of the polymer films was in the range 523-540 nm and the optical band gap energies were in the range 1.90-1.87 eV. Energy levels of the highest occupied molecular orbital (HOMO) of the polymers were determined by cyclic voltammetry (CV). The HOMO energy level of the copolymers was between -5.07 and -5.12 eV. Photovoltaic devices were fabricated by using the copolymers as the p-type donor and C60-PCBM or C70-PCBM as the electron acceptors. The device with poly(50OPTAN-alt-50PTZ) and C70-PCBM showed the best performance among the fabricated devices; the open circuit voltage, short circuit current, fill factor, and maximum power conversion efficiency of this device were 0.79 V, 5.25 mA/cm2, 0.30, and 1.25%, respectively.

Role of solvent dielectric properties on charge transfer from PbS nanocrystals to molecules.

Transfer of photoexcited charge from PbS nanocrystals to ligand molecules is investigated in different solvents. We find that the charge transfer rate increases dramatically with solvent dielectric constant. This trend is accounted for by a modified Marcus theory that incorporates only static dielectric effects. The choice of solvent allows significant control of the charge transfer process. As an important example, we find that PbS nanocrystals dispersed in water exhibit charge transfer rates 1000 times higher than the same nanocrystals in organic solvent. Rapid charge extraction will be important to efficient nanocrystal-based photovoltaic and photodetector devices.

Perfluoroalkylated alternating copolymer possessing solubility in fluorous liquids and imaging capabilities under high energy radiation.

A highly fluorinated alternating polymer, P(RFMi-St), possessing improved thermal properties and patterning capabilities over perfluoroalkyl polymethacrylates under high energy radiation was achieved with semi-perfluorododecyl maleimide (RFMi) and styrene (St). RFMi could be synthesised efficiently via a Mitsunobu reaction condition and copolymerised with St by free radical and reversible-deactivation radical polymerisation protocols. P(RFMi-St) showed a satisfactory glass-transition temperature (108 °C) and intermolecular cross-linking behaviour under electron-beam and commercially more important extreme UV (λ = 13.5 nm) irradiation. The exposed regions lost their solubility, resulting in the successful formation of mechanically non-deteriorated negative-tone images down to 50 nm. In addition, P(RFMi-St) could be solution-processed with chemically non-damaging fluorous liquids, which enabled the polymer to be applied effectively on top of an organic semiconductor layer as a dielectric material (dielectric constant 2.7) for the organic field-effect transistor fabrication.

New Surface Modification Method To Develop a PET-Based Membrane with Enhanced Ion Permeability and Organic Fouling Resistance for Efficient Production of Marine Microalgae.

This paper presents a new surface modification strategy to develop a poly(ethylene terephthalate) (PET)-based membrane having a hydrophilic surface, high nutrient ion permeability, sufficient mechanical strength, and organic fouling resistance, using an anthracene (ANT)-attached polyethylene glycol (PEG) surface modification agent (SMA) synthesized in this work. During the modification process, the ANT parts of the SMAs poke through and anchor to the surface of a commercial PET woven fabric via physical interactions and mechanical locking. The PEG chain parts coat the surface in the brush and arch forms, which generates a hydration layer on the fabric surface. The consequently obtained surface property and unique structure of the modified PET-based membrane result in higher nitrate ion permeability, organic fouling resistance, and microalgae production compared to those of the unmodified one. These are also affected by the molecular weight of the PEG and the number density of the anchored SMAs. The study demonstrates that this new surface modification method has the potential to allow the development of a desirable PET-based membrane for the efficient massive production of marine microalgae.

Two-Color Pixel Patterning for High-Resolution Organic Light-Emitting Displays Using Photolithography.

Nowadays, the display industry is endeavoring to develop technology to provide large-area organic light-emitting diode (OLED) display panels with 8K or higher resolution. Although the selective deposition of organic molecules through shadow masks has proven to be the method of choice for mobile panels, it may not be so when independently defined high-resolution pixels are to be manufactured on a large substrate. This technical challenge motivated us to adopt the well-established photolithographic protocol to the OLED pixel patterning. In this study, we demonstrate the two-color OLED pixels integrated on a single substrate using a negative-tone highly fluorinated photoresist (PR) and fluorous solvents. Preliminary experiments were performed to examine the probable damaging effects of the developing and stripping processes upon a hole-transporting layer (HTL). No significant deterioration in the efficiency of the develop-processed device was observed. Efficiency of the device after lift-off was up to 72% relative to that of the reference device with no significant change in operating voltage. The procedure was repeated to successfully obtain two-color pixel arrays. Furthermore, the patterning of 15 µm green pixels was accomplished. It is expected that photolithography can provide a useful tool for the production of high-resolution large OLED displays in the near future.